fabsurplus.com

PlasmaTherm SLR 740 Dual Chamber RIE / Plasma etch for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used PlasmaTherm SLR 740 Dual Chamber RIE / Plasma etch.
Please click on the "Get Quote" button at the end of the SLR 740 description, if you'd like to get a quotation, photos and specifications of this Dual Chamber RIE / Plasma etch, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This PlasmaTherm SLR 740 Dual Chamber RIE / Plasma etch is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


PlasmaTherm SLR 740 Equipment Details

SDI ID: 110613
Manufacturer: PlasmaTherm
Model: SLR 740
Description: Dual Chamber RIE / Plasma etch
Version: 200 mm
Vintage: 01.04.1999
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

The LH Chamber is Standard, the RH chamber is also RIE  , but with adjustable top electrode gap. (similar to old ECR config.)
Both chambers can work also as PE (Plasma Etch-Top power). RIE or PE is switched by software.
One Chamber has a Low pressure feature with TMP .the other one has no TMP,i.e just working med. Vacuum process using the rough pump (but has an option for adding TMP).
Each chamber has 8 Gas Channels (with 8 MFCs each).see attached XLS file.
  System is configured for European power rating, i.e 3 phase 400v.
 
   The system is currently  up and running  so is in fair condition. (see photos)
 
The equipment will include : 1 Chiller, 1 Process Rough Pump ,1 LoadLock pump (oil).

MFC CONFIGURATION:-

 

CHAMBER LEFT   GAS NAME MFC FULL SCALE UNITS MFC TYPE   CHAMBER RIGHT   GAS NAME MFC FULL SCALE UNITS MFC TYPE
    AR 100 SCCM MKS 1479A       CF-41 100 SCCM MKS 1479A
    CHF3 100 SCCM MKS 1479A       SF6 50 SCCM MKS 1479A
    C2F6 100 SCCM MKS 1479A       HE 100 SCCM MKS 1479A
    CF41 100 SCCM MKS 1479A       CHF3 100 SCCM MKS 1479A
    SF6 50 SCCM MKS 1479A       C2F6 100 SCCM MKS 1479A
    HE 100 SCCM MKS 1479A       O2 10 SCCM MKS 1479A
    O2 10 SCCM MKS 1479A       O2 100 SCCM MKS 1479A
    O2 100 SCCM MKS 1479A       AR 100 SCCM MKS 1479A

 

 


Get Quote



Not the item you were looking for?

Ask SDI fabsurplus.com!

If you are looking for a specific piece of semiconductor equipment let us know what type of semiconductor manufacturing equipment you would like to buy, and we will conduct a search for what you are looking for.

Inquiry

The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

sdi logo

SDI-Fabsurplus has worked with determination and tenacity over the last 25 years to develop one of the largest semiconductor equipment databases and the best software.

We strive to provide our customers with the best equipment at the lowest prices using our unparalleled network of industry contacts.

We are truely devoted to become your professional , customer-oriented , efficient and value-for-money semiconductor equipment and parts source.

Read more about us






View all Equipment owned by SDI for sale

View all FAB Dry Etch for sale

Search for PlasmaTherm items for sale

Search for SLR 740 items for sale


Ask SDI fabsurplus.com! If you can't find what you need, or are looking for a specific piece of semiconductor equipment. Let us know what type of semiconductor manufacturing equipment you would like to buy, and we will conduct a search for what you are looking for.

Inquiry



sdi logo

Click here for all contact information.
SDI-Fabsurplus Srl Italy.




SDI fabsurplus.com works by using the latest technology to continuously monitor the used equipment market place.
If you want to join our mailing list, please send click on the button below to send an e-mail to subscribe to our monthly equipment news update.

Request monthly equipment news





We'd love to get your feedback about our website and our services! If you can think of ways we can improve or other services you need, please feel free to send details.

Feedback Form