Applied Materials MIRRA 3400 Integrated CMP Polishing system configured for use with a DNS-AS2000 cleaner (Also available for purchase) for Sale

OEM : Applied Materials    
MODEL : MIRRA CMP 5201    
VINTAGE : AUG 1998    
WAFER SIZE: 8 INCH    
FACTORY INTERFACE    
LOADER TRACK SYSTEM    

-Fitted with qty 4 200 mm SMIF loader ports

-This tool has been used with a DNS-AS2000 cleaner, which is also available for purchase if required.
-Used for Tungsten CMP Process
-Processionally de-installed from working condition in the fab in February 2024
-Has 208VAC voltage setup

Overview
The AMAT Mirra Chemical Mechanical Polishing (CMP) system is a Dry In – Wet Out (DI-WO) polisher with 3 polishing heads (Platens).
Wafers can be loaded into the machine via 4 wafer carriers. These feed a carousel transfer system that moves the wafers through a single, dual or triple step polishing process. It is capable to process wafers from 150 to 200mm in diameter, and is typically used for used for CMP of thin films such as oxide, tungsten, and Polysilicon.

The basic Mirra polisher system can be configured either in a stand-alone configuration, or else with one of the following clearner module options:

    MIRRA ONTRAK – provides Dry In-Dry Out (DIDO) processing and is integrated with an OnTRAK “Integra” double sided wafer cleaning system.
    MIRRA MESA – provides fully automated Dry In-Dry Out (DIDO) processing and is integrated with a MESA cleaner. A FABS unit is added that can accommodate up to four 25-wafer cassettes.
    MIRRA AS-2000 – integrated with the DNS AS-2000 Post-CMP cleaning tool and includes FABS (Factory Automation Buffer Station) and an LTA (Linear Transfer Assembly).

Note: This particular tool is in the "Mirra AS-2000" configuration

    
HEAD CONFIGURATION    
HEAD #1    TITAN 2
HEAD #2    TITAN 2
HEAD #3    TITAN 2
HEAD #4    TITAN 2
    
PLATEN #1    
PLATEN #2    
PLATEN #3    
    
Dimensions of the parts:-

1. Mainframe 206 cm x 165 cm x 221 cm
2. Factory Interface 211 cm x 92 cm x 214 cm
3. System Controller 92 cm x 107 cm x 211 cm 675 KG
4. Unloader track system 165 cm x 33 cm x 94 cm
5. Monitor, computer cart etc. 59 cm x 63.5 cm x 180 cm
6. Misc. Parts Pallet 122 cm x 122 cm x 122 cm

Packing List    
Tote 1    
Titan 2 Head    4
Monitor Switch box    2
Keyboard mouse switch box    2
Flat screen monitor    3
Keyboard stand    1
Monitor stand    1
Head Clamp    4
Keyboard    2
Mouse    1
Loadlock drip tray    1
Drip tray Nova    1
    
Tote 2    
Power strip    1
monitor cable    3
Monitor power cable    1
power for exhaust switch     1
Com cable front pc rack    2
Transmitter ch 3 cable    1
Data switch cable    1
0140-77645    3
Leak detect cable    1
Mouse/Keyboard cable    1
Light tower Y cable    1
0140-77546    1
0140-77557    1
0140-77345    1
Light Tower cable, short    1
Tranmitter ch 2 cable    1
Mouse/Keyboard extension cable    1
0140-77615    1
    
Pallet    
Wafer Tub    1
Tote 1    1
Tote 2    1
Robot Track Door    2
5 cable  bundle    1
0150-77053    1
0150-77052    1
0150-77050    1
0150-77048    1
0150-77047    1
0150-77051    1
Cassette Rail    1