RIGAKU 3640 fluorescent X-ray measurement system for Sale

-Deinstalled from working condition.
-At the warehouse.
-See attached photos for details.
-Can be inspected by appointment
-Was used for loading of open cassettes of 8 inch wafers
-Has CE marking certificate
-Includes computer hard disk drive
-Instruction manuals qty 2 included, printed on cleanroom paper
-Installed in December 2000

Weights and dimensions
Main Body 600 KG, 89 CM X 112 CM X 145 CM (h)
Cassette loader 100 KG, 50 cm x 90 cm x 145 cm (h)
Vacuum pump 220 kg, 85 cm x 43 cm x 53 cm (h)
High Voltage transformer 250 kg, 95 cm x 48 cm x 57 cm (h)
EU Voltage conv. transformer 410v to 208V 3 ph 185 kg, 73 cm x 50 cm x 80 cm  (h)
Power box 700 cm x 30 cm x 87 cm (h)
Heat exchanger 90 KG, 93 cm x 24 cm x 80 cm (h)

Power supply rating: 40 KVA
Machine I/P electrical power rating: 200V 65A 50 Hz

The wafer disk analyser is a fluorescent X-ray measurement system, designed to simultaneously analyse the thickness and composition of thin film layers formed on semiconductor, plass or ceramic wafers. It also features a system which eliminates diffraction rays.

Basic machine Specifications
X-ray generator
max. 60 kV at 100 mA, 3 kW
Tube voltage settings: 20-60 KV, in steps of 5 KV
Tube current settings: 2 mA , and from 5 mA to 100 mA in 5 mA steps

Detector
X-ray tube type: AFX-77L-Rh
target: Rh
max rating: 3 KW
Light elements including B, C and WSix can be analysed.

max wafer size: 200 mm

Full technical specifications are available on request.