Hitachi S-9220 Critical Dimension (CD) Measurement Scanning Electron Microscope for Sale

-Still installed, IN COLD SHUTDOWN and currently available
-Set up for 150 mm wafer loading via open cassettes
-Has 2 open cassette stations
-Feb 2002
-Power supply 208V 60 hz 6 kVA, single phase

Generic Specification of the Hitachi S9220 CD-SEM

(1) General
Wafer size: 200 or 150mm wafer,
orientation flat or V-notch wafer of SEMI or JEIDA
standards is applicable.
Principle of CD measurement : Cursor and line profile measurement
CD measurement range : 0.1 to 2.0μm
CD measurement reproducibility : ±1% or 3nm (3 sigma), whichever larger
Throughput : S-9220; 56 wafers/hr (in continuous measurement via
recipe, under Hitachi standard test conditions)
S-9200; 45 wafers/hr (in continuous measurement via
recipe, under Hitachi standard test conditions)
Measured points; 1 point/chip, 5 chips/wafer
Secondary electron image resolution
: 3nm(at accelerating voltage of 0.8kV; with reference
specimen for resolution measurement)
Image magnification
: SEM image; x500 to x300,000 (CD measurement
Reproducibility guarantee range: x40,000 to x200,000,
excluding effects of contamination or charge-up)
Optical microscope image; About x110

(2) Specimen Stage
Movement rage : X and Y ; 0 to 200mm
Stage drive : Pulse motor
Control and speed : Positioning control via linear encoder, max.speed 50mm/s

(3) Wafer Loader
Wafer transfer from cassette to
loader chamber: Auto transfer via wafer transfer robot
Wafer transfer from loader chamber to
Stage: Auto evacuation and auto loading

(4) Wafer transfer robot
Random access using two cassettes
Wafer detection in cassette : Auto detection via wafer searcher
Chucking method : Vacuum chucking on back of wafer
Orientation flat/V notch detection : Non-contact auto detection via optical sensor.

(5) Electron Optics
Electron gun : Schottky emission type
Accelerating voltage : 500 to 1600V (variable in 10V steps)
Lens system : Electromagnetic condenser lens system,
booster objective lens
Secondary electron detection : Scintillator/Photomultiplier detection system using ExB filter, SE electrons and BSE electrons detected upon
switching
Objective lens aperture: Heating type movable aperture
(4 openings selectable outside of column), fine adjustment possible
Scanning coil : 2-stage electromagnetic deflection
Stigma coil : 8-pole electromagnetic type (X, Y axis)
Probe current monitoring : Faraday cup incorporated,
with automatic measurement function
Optical microscope: 1.2-mm-square visual field, monochrome image

(6) Control and Display System
Viewing control CRT: EWS 21 type monitor, display of SEM and OM images, GUI
operation screen, wafer map, measured values, stage
coordinates, etc
Scanning modes: TV scan, HR scan, SLOW scan (with auto
brightness/contrast function)
Image processing: (a) Software processing using filtering(standard function)
(b) Hardware processing using DSP(option)
Recording: (a) Video printer output function (option)
(b) Image filing function (option)
Safety device : Equipped with emergency off switch

(7) CD Measurement Data Processing System
File storage : Storage function for various setting parameters, Measurement results
Data processing function : Statistics output using worksheet system, output of
measured values in real time graph
Printout : 80-character thermal printer
Hard disk capacity varies with instrument serial no.

8) Evacuation System
Evacuation principle : Full automatic dry & clean evacuation
Vacuum pumps : Ion pump (3 units), turbo molecular pump (2 units),
oil rotary pump (2 units; option)
Safety device
: Equipped with protective devices against power failure,
column vacuum level drop, dry air pressure drop, cooling
water flow rate drop

(9) Dimensions
Main column unit : 1200(W) x 2000(D) x 1850(H) mm, 1200 kg
Display unit : 600(W) x 1290(D) x 1850(H) mm, 340 kg
Power unit : 535(W) x 870(D) x 1800(H) mm, 380 kg
Rotary pump(option) : 410(W) x 610(D) x 500(H) mm, 35 kg/unit (incl. cover)
360(W) x 640(D) x 520(H) mm, 35 kg/unit (incl. cover)
(Model E2M18 of Edwards Japan)
Cooling water circulator
: 400(W) x 450(D) x 600(H) mm, 50 kg
(when using W-5010T of Hitachi Science Systems)

(10) Standard System Composition
Main column unit ······················ 1
Display unit ··························· 1
Power unit ···························· 1
Oil rotary pump (option) ················ 2
Cooling water circulator (option) ········ 1
Standard tools ························ 1 set
Spares and consumables ·············· 1 set
Instruction manual ···················· 1