Applied Materials Centura AP Enabler E5 Dielectric Etcher with 4 process chambers for Sale

DEINSTALLED AND WAREHOUSED.

CAN BE INSPECTED BY APPOINTMENT

Dielectric Etch
Configuration: 4 Chamber Enabler E5 Etch
Fab Interface type: Centura Etch 5.3 FAC. Frame 5.3 Fi Rev 002
Has CE Mark
Wafer Size: Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, Notch
Online Connection: GEM / CIM JGJ (Hardware Interface : Ethernet 100Base-Tx)
Inter Face: 3 carrier stage (Continuous flow operation) w/ 3 Loadports (Semi compliant
MENV and FMS assemblies
Interface A: Hardware related to EDA
Corrosion Resistant FI & SWLL: N/A
Loader Mod Corrosion Prevent: N/A
Standard SWLL
Side Storage Pod: Side Storage Pod (Left/Right)
OCR: KIT, YAT BACKSIDE OCR, 300MM 5.3FI
Facility Plate: N2 Regulator : Supplied by customer in floor, CDA regulator 125 PSI onboard
SMC pressure switch
Facility Plate: Manual Valve : Supplied by customer in floor
Facility Plate: Pressure Gauge : Supplied by customer on regulator in floor
Transfer Pressure Monitor: 10 Torr Manometer and 1SLM N2 APC, kit
Transfer Pressure Monitor: GAUGE VAC MINI-CONVECTRON W/1-SETPOINT CAJON FTG analog
Load Lock Pressure Monitor: GAUGE VAC MINI-CONVECTRON W/1-SETPOINT CAJON FTG analog
Transfer Chamber Blade Kit: Transfer Chamber Accelerator Blade Kit
LL ISO-Slit Valve Grp Elast.: AP Chemraz 513 Elastomer
Atmospheric Robot: KAWASAKI A3
Mainframe Robot: VXP with Dual blade
Wafer Pass Through: Not available
Loadport type: Enhanced 25 wafer FOUP
Loadports: Loadport System
Open Cassettes Supported: N/A
Water Leak Detector: Configured
EMO Type: Turn to Release (Front x3, Rear x4) - 3 on FI, 1 on front of FI and one on each
side of FI. Rear: 1 for each process chamber.
System Monitors: Monitor #1 is Flat Panel with Keyboard on stand / Monitor #2 is through the
wall flat panel (optional)
Cable Length: RF Cable : 2 cables 75 ft; 1Short Cable
Cable Length: Mnitor Cable : 25 Ft 16ft effective
Cable Length: Pump Cable Length : 75 ft interface cable
Signal Tower: Red/Yellow/Green/Blue ( Front x1 & Center section of loadside and maintenance side x1)DNET
LIGHT TOWER, 4 LIGHT COVER (RAGB) W/ CLR DAUG
Inter Lock: On board interlocks to dissable RFand gas flow at 1/2 atmos., and lid or gas panel door open.
Inter Locks: On board interlocks to disable robots and slit doors when transfer lid or load lock lids are open.
Certificate of Cleanliness: N/A
Remote UPS Interface: N/A
Scrubber Interlock: N/A
Etch Common AC Rack: Lean AC Rack
"Chiller (wall/source): NX20A(ZT150 coolant) 0190-17815"
Chiller (Dual Zone Cathode): NX20A (ZT130 coolant)
"Coolant: Galden ZT-130 for Cathode
Galden ZT-150 for Wall/Source
Galden FC-3283 for Cathode/Wall/Source"
Chiller Hose Length: 75'
RF Gen TOP (162Mhz Source): 3500W RF POWER SUPPLY, 162 MHZ, FIXED FREQUENCY, 208VAC, WATER
COOLED (0190-29389)
"RF Gen #1 Bottom (13Mhz Bias): RF GENERATOR, 13MHZ 5KW, 300MM, RACK MOUNT) 0190-15319"
"RF Gen #2 Bottom (2 Mhz Bias): RF GEN PLASMA 9KW 2MHZ ENI) 0190-29586"
"RF Match: Y (0190-25187)"
IPUP Type: Alcatel A100L (0190-01042)
Process Chb.1,2,3,&4: (IAEF) Enabler (Front End-E5)
Endpoint type (Eye-D): Endpoint type (Eye-D)(0246-00196)
Plasma State Monitor: Plasma State Monitor (1 per system) (0190-17948)
Spectrograph: EyeD HP Spectrongraph (0190-28658)
ESC type (Dual Zone): ESC type (Dual Zone) (0010-33416)
Cathode Base: Non-Anodized (0041-05779)
Cathode N2 Purge: Cathode N2 Purge - Yes
L-collar Si Insert Ring: L-collar Single Crystal Si Insert Ring 1.5mm step
TMP: Shimadzu D3403M, 3000 litre
TMP Back Pressure Monitor: 51A11TGA2BA003 (MKS) Foreline Transducer
Dry Pump: N(ESR80WN (EBARA) ; customer Supply)
Final Valve, Heater: N/A
Wfib: Y(Wfib - Mod (Restriction at RTN))
APC: VALVE THROTTLE GATE VF250-HA WITH NEW CLOSED POSITION SENSOR
Slit Valves: Anodized (AL) 513 Chemrz
Pressure Monitor: 1,000 mt Head
Pressure Monitor: 100 mt Head
Pressure Monitor: Transducer 100 Torr Cal Tank
Pressure Monitor: Chamber ATM Switch : 51A13TGA2AA720 (MKS)
Pressure Monitor: Pressure Switch : 51A11TGA2BA010 (MKS), H2/fluoro gas Switch flow
through 600Torr
Chamber Controller Module: SBC C400MHZ, 3U CPCI, 256MB RAM
FES Server: FES Server
NSR# 621632-0: Enabler Chamber FRCII, ratio 1000/1000
NSR# 621638-0: Chamber First in Fab for IADB Enabler Chamber
NSR# 621633-0: Transforma run to run option
Thottle Gate Valve (TGV): Throttle Gate Valve (TGV) - Ceramic
Gas Line 1: Gas line 1- C4F6 100 sccm UNIT IFC-125
Gas Line 2: Gas line 2- CH2F2 100 sccm UNIT IFC-125
Gas Line 3: Gas line 3- C3F8 50 sccm UNIT IFC-125
Gas Line 4: Gas line 4- O2_M 300 sccm UNIT-125
Gas Line 5: Gas line 5- SO2 200 sccm UNIT IFC-125
Gas Line 6: Gas line 6- CF4 200 sccm UNIT IFC-125
Gas Line 7: Gas line 7 - C4F6_IGI 5 sccm UNIT-125
Gas Line 8: Gas line 8 - O2_IGI 5 sccm UNIT-125
Gas Line 9: Gas line 9- O2_L 50 sccm UNIT-125
Gas Line 10: Gas line 10- O2_H 5000 sccm UNIT-125
Gas Line 11: Gas line 11- Ar 2000 sccm UNIT-125
Gas Line 12: Gas line 12- N2 200 sccm UNIT-125
Gas Line 13: Gas line 13- CHF3 200 sccm UNIT-125
Gas Line 14: Gas line 14- C4F8 100 sccm UNIT-125
Gas Pallet Type: NextGen
Gas Pallet: ASSY, FULL 6/1/1/6 PALLET, 300MM ETCH NEXT GEN
Regulators: Regulator on SLD (Inlet to Gas Pannel, 1 per unique gas, 12 max, VCR connection)
Valves: CKD
Transducers: Transducers inside MFC's
Flow Ratio Controller (NSTU): Flow Ratio Controller (NTSU)
IGI Interlock: N/A
Filters: MYKROLIS (nickel, VCR, P/N 4020-01285), Nippon (VCR 12 max, P/N 4020-00084)
Gas Leak Detection Port: External Connection Point
Gas Panel Exhaust: Top Exhaust
Gas Panel Facilities Hook Up: Single Line Drop
Piping: Standard high purity stainless & Exhaust through Gas box
Final Pressure Switch: At 600 Torr coming from gas pallet, At chambers switch pressure
signal 10 torr half atmosphere
Purge: N2 (Process Grade N2)
L-collar Single Crystal Si: L-collar Singe Crystal Si Insert Ring 1.5mm step
Source Bottom Ring: QUARTZ RING SOURCE, E5(0200-07362)
Quartz Barrier Ring: Quartz Barrier Ring (0200-03170)
TGV o-ring: TGV o-ring (3700-03701)
TGV Hard Stop - Ceramic: TGV Hard Stop - Ceramic
TGV Pads: TGV Pades (0041-03304)
Source Chiller Bypass: Source Chiller Bypass
Annular Baffle Heated: Annular Baffle Heated
Cover, Lower Liner: Cover, Lower Liner
Upper Liner: SUPPORT LINER (0040-37601)
Process Kit: Process Kit
"Showerhead Assy: Showerhead Assy, 4mm SiC Top Electrode Tokai (0041-32335)"
Aluminum shims: Polymer Shims(0242-55460)
Plasma Containment Door: Plasma Containment Door

Packing List
NO.    Description        Package    N.W. KG    G.W. KG    L (cm)    W (cm)    H (cm)
1    Fab Interface    Wooden Crate    1200    1583    230    210    290
2    Main Frame        Wooden Crate    1500    1719    200    170    180
3    Chamber A        Wooden Crate    900        1118    180    160    210
4    Chamber B        Wooden Crate    900        1118    180    160    210
5    Chamber C        Wooden Crate    900        1118    180    160    210
6    Chamber D        Wooden Crate    900        1118    180    160    210
7    Panel, side storage, monitors    Wooden Crate    350    583    300    180    110
8    AC Rack            Wooden Crate    500        641        120    100    240
9    RF Rack            Wooden Crate    600        741        120    100    240
10    Chiller            Wooden Crate    300        436        150    100    190
11    Chiller            Wooden Crate    300        436        150    100    190
12    Parts boxes qty 8 Wooden Crate  300        533        300    180    110
13    Parts Boxes qty 6 Wooden Crate  200        372        230    170    100
14    water tray + Electric board + I pump    Wooden Crate    200    297    160    100    110