Hitachi S-9300 High Resolution CD-SEM Fully Refurbished and Operational for Sale

-The SEM will be provided fully refurbished
-Fab interface type can be changed to meet your needs
-Can load 200 mm wafers or 300 mm wafers
-A full demo will be provided showing the SEM in working condition before consignment

General specifications for the Hitachi S9300 as follows:
Electron Optical System:
Electron Gun: Schottky emission source
Accelerating Voltage: 500V to 1600V, 10V steps,
Probe current: 4~24pA
Electromagnetic Lens: 3-Stage Electromagnetic Lens System with boosting voltage
Objective aperture: 4-opening, click-stop, heated aperture is selectable/adjustable outside the vacuum
Scan Coil: 2-Stage Electromagnetic Deflection
Magnification = 1000X to > 300,000X
Wafer Imaging Ability: Entire Surface of 12 INCH wafer
Resolution: 3nm (800V)
Field of view: 1.2mm
SECS/GEM communication interface
Dual XY Hitachi Microscale
DSP Image Processing
BSE Mode Functionality
Multipoint Measurement Function
Edge Roughness Function
Static measurement accuracy: 3sigma 5nm (without auto-focus)
Loading test: 25 times loading with no error., (both port A and B).
Throughput: 28 wafer per hour
Auto-addressing accuracy: Within ±3.0μm, both in x and y direction