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TEL TOKYO ELECTRON Tactras Vigus RK3 Dielectric Etch for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used TEL TOKYO ELECTRON Tactras Vigus RK3 Dielectric Etch.
Please click on the "Get Quote" button at the end of the Tactras Vigus RK3 description, if you'd like to get a quotation, photos and specifications of this Dielectric Etch, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This TEL TOKYO ELECTRON Tactras Vigus RK3 Dielectric Etch is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


TEL TOKYO ELECTRON Tactras Vigus RK3 Equipment Details

SDI ID: 111951
Manufacturer: TEL TOKYO ELECTRON
Model: Tactras Vigus RK3
Description: Dielectric Etch
Version: 300 mm
Vintage: 01.03.2015
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

-A complete tool

-Fitted with qty 6 process chambers type Vigus RK3

System Power Rating: 208 AC 3-Phase
Loading Configuration: 4 LOAD PORTS
GAS Box Configuration (For each chamber)
Gas Line 1: CAP, 1600sccm
Gas Line 2: C4F8, 250sccm
Gas Line 3: C4F6, 250sccm
Gas Line 4: CH2F2, 130sccm
Gas Line 5: COS, 65sccm
Gas Line 6: O2, 100sccm
Gas Line 7: O2, 2000sccm
Gas Line 8: CHF3, 300sccm
Gas Line 9: CF4, 500sccm
Gas Line 10: CO, 300sccm
Gas Line 11: N2, 500sccm
Gas Line 12: NF3, 65sccm
Gas Line 13: Ar, 1600sccm
Gas Line 14: C4F6, 122sccm
Gas Line 15: C4F8, 64sccm
Gas Line 16: O2, 30sccm
-Recently de-installed
-Can be inspected by appointment


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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