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PlasmaTherm Versaline DSE-III Deep Silicon Etcher for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used PlasmaTherm Versaline DSE-III Deep Silicon Etcher.
Please click on the "Get Quote" button at the end of the Versaline DSE-III description, if you'd like to get a quotation, photos and specifications of this Deep Silicon Etcher, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This PlasmaTherm Versaline DSE-III Deep Silicon Etcher is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


PlasmaTherm Versaline DSE-III Equipment Details

SDI ID: 111603
Manufacturer: PlasmaTherm
Model: Versaline DSE-III
Description: Deep Silicon Etcher
Version: 4,6 and 8 inch
Vintage: 01.06.2012
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

Plasma-Therm Versaline DSE-III (Deep Silicon Etcher)
single chamber with single wafer semi-auto load lock
- Vintage 2012, sold “As-Is”, no warranty.
- Available for inspection before disassembly on July 30 th 2024.
- Last known condition: operational, GUI PC and CTC PC in e-rack are not working.
Main specification (ask for details):
- Application: deep silicon etch
- Substrate size: 4”,6”,8”. Mechanical clamp -40C..+40C with Affinity chiller
- Semi-auto load lock, single wafer
- Plasma-Therm ICP-II DSE 3-turn source
- 3.5kW, 2MHz ICP RF package (5kW limited to 3.5kW)
- High-Speed Process Modulation w/ 1-100kHz DBS RF package for DSE
- Heated chamber 180C
- Optical End Point Detection
- Gas box with 4 lines (C4F8, SF6, Ar, O2. 400/600/50/50sccm)
- Fast gas switching option for DSE
- User terminal mobile cart
- Edwards ih80 dry pump
- Edwards xds35i load lock dry pump
- Edwards 1300l/s STPA turbo
- 380VAC 3 phase (with transformer)
- Low Maintenance Package
- Through-wall panel is not included


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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