PlasmaTherm SLR 770 ICP Deep Silicon Etcher for sale

SDI fabsurplus.com is pleased to announce the availability of the following listed used PlasmaTherm SLR 770 ICP Deep Silicon Etcher.
Please click on the "Get Quote" button at the end of the SLR 770 ICP description, if you'd like to get a quotation, photos and specifications of this Deep Silicon Etcher, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This PlasmaTherm SLR 770 ICP Deep Silicon Etcher is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

PlasmaTherm SLR 770 ICP Equipment Details

SDI ID:	111602
Manufacturer:	PlasmaTherm
Model:	SLR 770 ICP
Description:	Deep Silicon Etcher
Version:	4 inch
Vintage:	01.06.1998
Quantity:	1
Sales Condition:	as is where is
Lead Time:	immediately
Sales Price:	Inquire
Comments:	Plasma-Therm SLR 770 ICP (Deep Silicon Etcher) single chamber with single wafer semi-auto load lock - Vintage 1998, sold “As-Is”, no warranty. - Available for inspection before disassembly on July 30 th 2024. - Last known condition: operational, one analog I/O box is not working. Main specification (ask for details): - Application: deep silicon etch - Substrate size: 4” - Semi-auto load lock, single wafer - 1.0kW ICP RF package (2kW generator limited to 1.0kW) - 500W RF bias - Gas box with 5 lines (CHF3, C4F8, SF6, Ar, O2) - ThermoFlex 900 chiller - Edwards ih80 dry pump - Edwards nxds load lock dry pump - Load lock small turbo pump Leybold - Edwards STPA-1303CV turbo - 380VAC 3 phase - Through-wall installation package
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PlasmaTherm SLR 770 ICP Deep Silicon Etcher for Sale

PlasmaTherm SLR 770 ICP Equipment Details

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