EVG Hercules NIL 200 Nanoimprint Lithography System for Sale

For immediate sale:-

EVG / EV GROUP Hercules NIL 200 Lithography system
-Can process up to 200 mm wafer size.
-Still installed and running in the cleanroom
-Can be inspected by appointment
-Available for immediate purchase
Wedge Error Compensation (WEC)
SECS / GEM Host communication
No TSA and BSA
No SMIF / FOUP Capability
Exposure source: (3) PHOSEON FireJet FJ100 UV Light LED Arrays
Parameters configurable via recipe:
Exposure time (sec)
Delay time
Expose cycles
Dose (mJ/cm²)
Operating system: Windows 7 SP1 x64
2016 vintage.

The HERCULES NIL is a fully integrated UV nanoimprint lithography track solution for wafers up to 200 mm. Combining cleaning baking pre-processing and resist coating steps with EVG’s SmartNIL imprinting technology, the HERCULES NIL is solution which starts with bare wafers being loaded into the tool, and results in fully processed nanostructured being returned.
HERCULES NIL is able to optimise the process chain and fabrication of multi-use soft stamps, without requiring any extra imprint stamp manufacturing equipment.
Features
-Volume manufacturing of structures down to 40 nm and smaller
-Combines pre-processing (clean / coat / bake / chill) and SmartNIL®
-Volume-proven imprinting technology with superior replication fidelity
-Fully automated imprinting and controlled low-force detachment for maximum working stamp reusability
-Includes working stamp manufacturing capability
-Fastest curing times due to high-power light source
-Optimized modular platform for high throughput