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TEL Tokyo Electron ACT 12 Double Block DUV Photoresist Coater and Developer Track for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used TEL Tokyo Electron ACT 12 Double Block DUV Photoresist Coater and Developer Track.
Please click on the "Get Quote" button at the end of the ACT 12 description, if you'd like to get a quotation, photos and specifications of this Double Block DUV Photoresist Coater and Developer Track, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This TEL Tokyo Electron ACT 12 Double Block DUV Photoresist Coater and Developer Track is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


TEL Tokyo Electron ACT 12 Equipment Details

SDI ID: 110752
Manufacturer: TEL Tokyo Electron
Model: ACT 12
Description: Double Block DUV Photoresist Coater and Developer Track
Version: 300 mm
Vintage: 01.01.2009
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

- Still installed in the cleanroom
- The tool is connected in-line with a Nikon S204B scanner.

-Upon purchase, buyer to pay for de-installation and rig out of fab.

At the following link on youtube, you will see a walk-around video of the TEL ACT 12 track, with the connected Nikon NSR-S204B scanner and Cymer laser, as they are currently in the cleanroom:-

https://youtu.be/jhKOMi45DLM


- The direction of wafer flow is right to left
- 300mm – 12inch wafer setup
- Type 4 Main controller
- Dual Block
- Dispense Monitoring system on all 24 resist lines
- Aut- air vent function on all resist LE tanks
- 4 FOUP load ports for 12” wafers
- 2 COT units
- 2 BARC units
- 4 DEV units
- 1 WEE unit
- 2 ADH units
- Closed Loop T&H System
- IFB for wafer transport system NIKON NSR-S204B
- Several Software Options
- Chemical Cabinet 1
- Chemical Cabinet 2
- Chemical Cabinet 3
- AC Power Box
- Temp. Cont. Unit SMC
- System T&H 1 with filter system SHINWA RS-50-A-00
- System T&H 2 with filter system SHINWA RS450-A-01
Resists used:-
-HMDS
-PGMEA
-TMAH 2.48%
-DUV 42 SERIES
-KRF 91Y
General:
- CE Marking

Known broken parts:-
- Temp. Cont. Unit / system leaky and deactivated
- T&H chamber requires service
- Resist pump status unclear
- 1 FOUP load port defective
- IRA Z driver missing
- WEE unit defective


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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