Unaxis/Balzers ZH620 Alumina Fill Fill Sputter Deposition System for Sale

Main Features:

high rate cavity filling Al2O3 process, 2 targets, DC and RF, Onboard Cryogenic pump, backside cooling, 5“ wafer size.

Tool Status: Professionally deinstalled from operational condition and moved to the warehouse.

Please check pictures below for more information

Chuck XY Stage (Programmable)

Travel range 310 mm x 310 mm (12.2 x 12.2 in)

Resolution 0.5 µm

Accuracy ± 2.0 µm (0.08 mils)

Repeatability ± 1.0 µm

XY stage drive Closed-loop high precision stepper motors

Speed* Slowest: 10 μm / sec | Fastest: 50 mm / sec

Chuck Z Stage (Programmable)

Travel range 30 mm (1.18 in)

Resolution 0.2 µm

Accuracy ± 2.0 µm

Repeatability ± 1.0 µm

Z stage drive Closed-loop high precision stepper motor

Speed* Slowest: 10 μm / sec | Fastest: 50 mm / sec

Guider Precision ball bearings

Chuck Theta Stage (Programmable)

Travel range ± 5.0°

Resolution 0.0001° (0.24 μm @ 300mm edge)

Accuracy < 2.0 µm (measured at the edge of the 300 mm chuck)

Repeatabilty < 1.0 µm

Theta stage drive High resolution stepper motor with linear encoder feedback system

XYZ Stage (Programmable)

Travel range (X x Y x Z)* 50 mm x 50 mm x 140 mm

(2.0 in. x 2.0 in. x 5.5 in.)

Resolution, X-Y axis 1 µm (0.04 mils)

Repeatability, X-Y axis ≤ 2 µm (0.08mils)

Accuracy, X-Y axis ≤ 5 µm (0.2 mils)

Resolution, Z axis 0.05 µm (0.002 mils)

Repeatability, Z axis ≤ 2 µm (0.08mils)

Accuracy, Z axis ≤ 4 µm (0.016 mils)

PROBE PLATEN Specifications

Material Nickel plated steel

Chuck to platen height 50 ± 0.5 mm

Platen cooling Fully integrated CDA cooling, by using the chiller CDA

Configuration Probe card holder 4.5 x 7” and/or MicroPositioners

Max. No. of MicroPositioners 8x DC MicroPositioners or 4x DC + 4x RF MicroPositioner Setup

RF MicroPositioner mounting Magnetic with guided rail

DC MicroPositioner mounting Magnetic

Stored in air-conditioned facility