Applied Materials Mirra Ontrak Poly/STI CMP for Sale

THIS EQUIPMENT IS AVAILABLE IN COMPLETELY REFURBISHED CONDITION, RE-BUILT TO YOUR REQUIRED SPECIFICATION.

EQUIPMENT DETAILS:
-  Wafer Size (inches) : 8
-  Install Type : Through-the-wall
-  Year of Manufacture: 1999
-  Software Version : MB60A1
-  CPU Board Type : Pentium 3      400MHz or Higher : Yes
-  Electrical Requirements : 200/208VAC
-  Process Type: Polysilicon
-  Mainframe: Mirra Track
o Dry In/Dry Out
o Signal Lamp Tower
o Integrated SMIF (qty 3 loaders)
o Cassette Tank : Standard
o Robot Type : 112”
o Cleaner Type : Ontrak
o Cleaner Chemicals Used : NH4OH
o E-Chain Lifetime : Since installation
o Cleaning Package : No
o Spray Gun : Single
o In-Situ Removal Rate Monitor : Motor Torque
o Metrology Option : None
o IPM : No
-  Mirra Polish Heads
o Titan 1 Polish Heads
o PPS Retaining Rings
o Standard Wafer Loss Sensor
-  Mirra Platens
o Teflon Coated Platens : No
o Pad Type : IC 1000
o Pad Conditioner Head : P4 Intel
o Pad Conditioner Disc : EWHA  
o Universal Disk Holder : No
o Temperature Control : None
-  Slurrieso Slurries/Platen Used : 1
o Chemicals Used : Oxide Slurry
o Flow Rate : Standard  
o Dispense Arm : Standard  
o Slurry Flow Monitors : Yes