SDI fabsurplus.com is pleased to announce the availability of the following listed used TEL Tokyo Electron Unity Me SCCM 85S Oxide etcher (3 chamber).
Please click on the "Get Quote" button at the end of the Unity Me SCCM 85S description, if you'd like to get a quotation, photos and specifications of this Oxide etcher (3 chamber), and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This TEL Tokyo Electron Unity Me SCCM 85S Oxide etcher (3 chamber) is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Manufacturer:||TEL Tokyo Electron|
|Model:||Unity Me SCCM 85S|
|Description:||Oxide etcher (3 chamber)|
|Sales Condition:||as is where is|
3 CHAMBER OXIDE ETCHER. SOLD "AS IS, OPERATIONAL", INCLUDING A BUY-OFF AT OUR FACILITY. 1) Tool Name: TEL SCCM 2) Mainframe type : Unity ME 3) Chamber type : Me SCCM oxide, LLDX, 200 mm 4) Chamber Q'ty : 3 SCCM Chamber 5) Additional H/W requirements -. Turbo Pump STP-A2203W1-U -. Chiller : SMC INR-497 -. EPD : EPD302 -. Dual Gas Feed kit -. High pressure kit -. H2 usage prepared -. The Cables included
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