Evatec Solaris S151 Multi-chamber sputtering system for Ag, Al, W, TCO ITO and AZO for Sale

At SDI-fabsurplus, we currently have several deposition systems that are no longer needed and which we would therefore like to sell. The systems have already been removed from the FAB and are stored in a heated warehouse.
If you are interested in the systems or parts of them, we would be happy to discuss further details or offer an on-site inspection.

EVATEC SOLARIS S151
Multi-chamber sputtering system

Brief description of the system
This system is a high-speed sputtering system for single wafers, which is designed similarly to high-
throughput production systems used in the optical disk systems industry for the production of DVD
and Blu-ray discs.

The system consists of a handling area with an automated unit for feeding and discharging the
substrates and the coating area; a main chamber with 6 cathode chambers arranged in a circle.
Various plasma processes (RF or DC, also reactive) or other substrate treatments (e.g. heating) can be
carried out using these sources. Equipment of the 6 cathode chambers: 2x sources with a diameter of
30 cm each, 1x heating source, 3x multisource (currently unused).

Condition of the system

During its operating time, the system has undergone customization to one of the coating
chambers and the software.
The SOLARIS S151 will continue to be built and sold by the manufacturer.
Depositions with silver, aluminium, possibly tungsten and the TCO layers ITO and
AZO were carried out on the SOLARIS S151. Consequently, residues of these materials can be found
inside some of the chambers.

After its last use, the system was taken out of operation and packed; it is currently stored in a
weather-protected, temperature-controlled warehouse.
Substrate sizes and throughput (for typical configurations):
Processable substrates: with ∅ 200 mm or 156 mm × 156 mm edge length
Maximum thickness: 2 mm
Capacity (depending on configuration and layer structure): Max. 1200 substrates per hour
Cycle time < 3 seconds.
Dimensions and weight of the system
Main system dimensions: L x W x H [cm] = 335 x 225 x 155
Weight of main system: 3.3 t
Media supply
Gases: Argon, oxygen, forming gas (Ar:H2 = 95:5), nitrogen
Compressed air
Cooling water
Exhaust air