SDI fabsurplus.com is pleased to announce the availability of the following listed used Tepla 4011 Box Plasma Etcher.
Please click on the "Get Quote" button at the end of the 4011 description, if you'd like to get a quotation, photos and specifications of this Box Plasma Etcher, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Tepla 4011 Box Plasma Etcher is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
| SDI ID: | 112948 |
|---|---|
| Manufacturer: | Tepla |
| Model: | 4011 |
| Description: | Box Plasma Etcher |
| Version: | Inquire |
| Vintage: | Inquire |
| Quantity: | 1 |
| Sales Condition: | as is where is |
| Lead Time: | Inquire |
| Sales Price: | Inquire |
| Comments: | 4 gas, 4000 w.Specification Process chamber: Material Aluminum Width 820 mm Height 138 mm Depth 706 mm Chamber door: Aluminum, quartz inspection window with ultraviolet and high-frequency radiation protection Vacuum system Process pressure: Approx. 0.1 - 1 mbar Gas and vacuum piping: High-grade steel, ¼“ Swagelok connections as well as aluminum KF components Gas supply: 2 - 4 separate gas ducts (2 option, metering by means of mass-flow controller Venting: By means of solenoid valve and series throttle valve Vacuum Ultimate pressure attainable: Approx. 0.01 mbar Vacuum measurement: Capacitive pressure gauge measuring range from 0.01 to 10 mbar The suction system is located in the bottom of the chamber. Electro-pneumatic valve DN 65 ISO-K in suction line. (Optional) Dimensions: Height: approx. 1720 mm Width: approx. 1615 mm Depth: approx. 950 mm Weight: approx. 800 kg Recommended pump equipment Rotary-vane oil pump, two-stage, filled with PFPE oil Minimum suction capacity 65 m3 / h Exhaust filter with oil return 1 meter flexible metal tubing DN 65 ISO-K with connection components Microwave generator Regulated Magnetron Frequency: 2.45 GHz Power output: 2 x 2000 watts Fault monitoring: Overload protection Control unit Display of: • Process time • HF output • Process pressure • Gas flow Hardware: • Centronics printer interface • PC keyboard with Trackball • RS 232 Software: • Unlimited recipes can be programmed and afterwards automatically processed and put into memory storage. • A manual operating mode is available for test purposes. • Superposing of information or fault message windows Safety features: • Safety switches on all parts of the housing • Emergency Off switch • Defined abortion sequences • Plasma detection |
Get Quote |
The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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