Ebara EPO 222 Oxide CMP for sale

SDI fabsurplus.com is pleased to announce the availability of the following listed used Ebara EPO 222 Oxide CMP.
Please click on the "Get Quote" button at the end of the EPO 222 description, if you'd like to get a quotation, photos and specifications of this Oxide CMP, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Ebara EPO 222 Oxide CMP is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

Ebara EPO 222 Equipment Details

SDI ID:	111596
Manufacturer:	Ebara
Model:	EPO 222
Description:	Oxide CMP
Version:	200 mm
Vintage:	01.02.1999
Quantity:	1
Sales Condition:	as is where is
Lead Time:	immediately
Sales Price:	Inquire
Comments:	-HAS BEEN OPERATIONAL IN THE FAB WITH NO PROBLEMS. CONFIGURATION:- Software VME (Tool Version) 03.13.31 Touch Panel Version 3.5.14 Endpoint NA Hardware Polishing Unit RPC a) RPC Top Ring Assembly (T1/T2) Yes/Yes b) Atomizer Function Yes c) Spray bar # Nozzles Pusher Unit Enhanced Nozzles Dressing Unit Lightweight Turn-Over Unit (Dry & Wet) Roll Cleaning Unit In-use New Stage Clamps Pencil Cleaning Unit 222 Sponge Slurry Supply Unit LineA-CLC Load/Unload Unit Inx2200 Robot Unit Rorze Yes a) Robot1 Yes b) Robot2 Yes Upgrade / CIP Retrofit Items DTR Pressure Alarm (Lower Limit/Upper Limit) Yes Atomizer Spray Bar Yes Roll Unit Stage Clamps Yes Roll Unit Stage Belts Yes DTR DIW Flow Rate meter Yes Polisher: Oxide Slurry pH ~ 11, supply to POU at Turn Table. Cleaner: 2% Ammonia (NH4OH), supply to Roll-Roll Station.
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Ebara EPO 222 Oxide CMP for Sale

Ebara EPO 222 Equipment Details

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