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CYMER ELS-6400 248 NM DUV Excimer Laser for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used CYMER ELS-6400 248 NM DUV Excimer Laser.
Please click on the "Get Quote" button at the end of the ELS-6400 description, if you'd like to get a quotation, photos and specifications of this 248 NM DUV Excimer Laser, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This CYMER ELS-6400 248 NM DUV Excimer Laser is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


CYMER ELS-6400 Equipment Details

SDI ID: 110753
Manufacturer: CYMER
Model: ELS-6400
Description: 248 NM DUV Excimer Laser
Version: Facilities
Vintage: 01.06.2002
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

The equipment is still installed in the cleanroom. Upon purchase, buyer to pay for de-installation and rig out of fab.

Equipment condition:Good.

This laser has been used with a Nikon NSR-S204B scanner and a TEL ACT 12 DUV coater and developer track, which are also available for purchase if required.

-The laser is still installed in the cleanroom, and is in working condition. Please refer to the attached photos showing the current condition of this laser, and also some photos showing the light pipe, which give the position of the laser w.r.t. the scanner to which it is attached.
-The laser was installed at the current location in 2011.
-The laser was last used in 2022. As far as the laser performance is concerned, please refer to the attached data in the images.
-Has CE mark
-The laser includes the following modules:

Module 143730 date 02/11/11
Module 05-04555-01 date 0009
Module 143731 date 27/04/11
Module 05-11019-02 date 02/19/02
Module 05-04556-01 date 0009
Module 114125 date 12/19/02
Module S06-09103-07 date 08/10/05
Module 06-03252-00 date 03/01/00
Module 05-08120-01 date 12/17/01

I took a video of the inside of the laser, and uploaded it to you-tube.

You can see the video at the following link:-

Cymer ELS-6400 248 nm excimer laser fabsurplus


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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