ASML TWINSCAN XT1250D

SDI fabsurplus.com is pleased to announce the availability of the following listed used ASML TWINSCAN XT1250D 193nm (ArF) Scanner - Cymer laser not included.
Please click on the "Get Quote" button at the end of the TWINSCAN XT1250D description, if you'd like to get a quotation, photos and specifications of this 193nm (ArF) Scanner - Cymer laser not included, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This ASML TWINSCAN XT1250D 193nm (ArF) Scanner - Cymer laser not included is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

ASML TWINSCAN XT1250D Equipment Details

SDI ID:	109551
Manufacturer:	ASML
Model:	TWINSCAN XT1250D
Description:	193nm (ArF) Scanner - Cymer laser not included
Version:	300 mm
Vintage:	01.05.2004
Quantity:	1
Sales Condition:	as is where is
Lead Time:	immediately
Sales Price:	Inquire
Comments:	ASML TWINSCAN XT 1250D ArF SCANNER Please note: The Cymer laser from this tool has been sold. So, it would be necessary to purchase another Cymer laser to replace it with. The Cymer laser is a completely separate sub-system from the main equipment. Hence, adding another laser to the system will not present technical problems. Configuration Items: Track Pre-warning signal (APR)s: APR enabled Avoid Track INPUT/OUTPUT conflicts, Raise AS after APRs: Avoid Track INPUT/OUTPUT conflicts enabled Active wafer release for dry WSs: FALSE Closing disk types: No closing disk present Safeguard to prevent loading of reticles with too wide or mispositioned pellicles: Disabled Continuous clampable wafer table for dry WSs: Absent Type of wafer table on chuck 1 & 2 for immersion machines: Zerodur version 1 WS Immersion throughput packages: None WS Immersion thermal control packages: None Wafer Stage Configurations: Wafer Stage type 2 configuration Wafer Carrier Locations: Right Wafers per Carriers: 25 Wafer Mark Sensors: Absent Wafer Id Readers: Absent Wafer Sizes:300mm Wafer Tracks: Present Wafer Stage Types: Dual Chuck Wafer Stress Relaxations: FALSE Lower Docking Plates: Present WS Balance Masss: Stainless Steel WH Robot Power Amplifiers: CPM 20 Wafer Stage Fast Stiff X Move Electronicss: Present Wafer Stage Mirror Block Down Electronicss: Present Universal Prealignments: Disabled Interferometer axis version at exposures: 3 plus 1 axis Wafer Handling Pneumaticss: Dedicated Wafer Switchs: Absent Chuck 1 & 2 wafer sizes: 300mm Type of immersion hood for immersions: None Specifies chuck1 & 2 layout relev. for Immersions: Chuck does not support immersion Specifies chuck1 & 2 configs: Dry Specifies chuck1 & 2 versions: not specified Changed Short Stroke diff XY controllers: Disabled Docking wheels at WH unloads: Present Docking plate heights: Low Immersion Hood versions: AbsentCarrier Handler Types: Mark I 300 Foup Wafer Handling Load & Unload Robot Types: Double Fold Arm, 12 mm Z stroke Wafer Handling Store Units: Absent Wafer Handler wrt BF Shifted in Zs: Not Shifted Reticle streaming lites: Disabled Enhancements in Reticle Monitors: no enhancements Reticle streaming: Disabled Improvements for reticle handlings: Disabled Extend IRIS maximum particles scanned to 50000.s: Absent Zeroing type for Encoders Measurement Systems: Using extra hall sensors for zeroing Reticle Stage Chuck Types: Glued Leafspring, TYPE_2: Glued LS, Pneum. GC, IFM / ENC Nitrogen purging of Reticle Stages: RS is not purged Reticle Carrier Locations: Right Integrated Reticle Inspection Systems: PPD1 with IRIS1 functionality Integrated Reticle Librarys: IRL with original functionality Reticle Sizes: 6 inch Reticle Carrier Tag Readers: Present Reticle Stage Long Stroke Motor Types: Cobalt Ferro 18 teeth Reticle Stage Long Stroke Configs: TYPE_3:CoFe_18 motor, SB controlled, int. vacuum supply, pneum GC Automated Reticle Transport Systems: Absent Reticle Stage Lenscooler Boxes: Lenscooler Box with anti-aliasing Filter Maximum Reticle ID Lengths: 24 Characters Reticle Stage Measurement System on Scans: Heidenhain Encoders Relative direction of ws to rs on the X axiss: Same RS Object Fields: Normal Reticle exchange types: Retex option: E Iris feature Scans: Absent (Overrules Absent) Reticle Handler types: Original 2D Barcode Readers: Absent Integrated Reticle Inspection System Configurations: Disable creation of OSIRIS viewable files. WS Immersion Hood Only Testrigs: Absent Version of RS/WS IO librarys: Version 1 Dynamic Performance Calculations: Mark 1 Stages Sample Rates: 5.0 kHz Interferometer Electronics: Ifsr Capacitive z-height sensor type.s: Dual Z sensor board Ifm config at measure sides: 8 axes Dose System Performance Test sequences: Test sequence 1 PEP-ADC Intensitys: Disable PEP-ADC Intensity Online Lamp Peak: Disable Online Lamp Peak Dose Intensity Optimizations: Dose Intensity OptimizationLaser Gas Life extensions: Disable Laser Gas Life extension Type of multi foil lens elements: none Depolarizer types: fixed depolarizer present PSE & PCE Locations: not applicable Intensity Calibration Per DOEs: Disabled Pupil qualification methods: Centre of gravity method Polarized illumination amorph DOE: Only unpolarized illumination Fresnel corrections for WSSSs: Disabled Is NA accuracy measurement allowed: Disabled Exchangeable Pupil Lens Elements: No EPLE Multifunction Active Lens Elements: 0 Multifunctional Active Elementss: 0 Use Sigma Calibrations: no Sigma Calibration Use Sigma WIP Preserving Offsetss: no Sigma WIP Preserving Offsets THFFC FDE model lens dependents: Disabled TIS diffusers: absent Determination of NA ellipticitys: Disabled XML output for LITHOGUIDEs: Disabled Use validity ranges around UIP data when Enabled: Use exact matching for UIP data Number of EXLE elements: 0 Functional use of Active Elements: ALE function as ALE Polarization Shaping Element Retractors: No PSER hardware installed in the machine Method for alignment of the laser beams: Align the beam by minimizing the uniformity tilt over the slit (LUBF) Pupil TIS angular sensitivity calibration and corrections: TIS Pupil Measurement will not be improved Describes at what plane the BMU measures: BMU readings are directly used as if they are at DOE1 plane Lens Types: 12 Light-source Architectures: Laser Light-source Types: Cymer Laser: XLA 165 (Not Included) Light-source Wave-lengths: 193nm DOSEMAPPERs: Present DOSE_MAPPER_1s: Present REMA architectures: REMA C Illuminator Types: 120 Zoom Axicon Architectures/ Types: ZZA/120 NA Control Architectures/ Types: NA2 Torlon/ 120 Automated DOE Exchangers/ Architectures: Present/ 5 slots MIP Control UNICOMs/ Architectures: Present/ 1 Motor Test Tables: Absent Imaging Electronics Architectures: B Architecture Attenuator Types: VariableTest Table Z Axiss: Worm Wheel PUPICOMs/ Architectures: Present/ DC Motor with gearbox Number of Z Lens Manipulatorss: 5 Number of Active Lens Elementss: 1 Number of Bi-directional Active Lens Elementss: 0 Number of Active Manipulator Elementss: 0 Number of Active Elementss: 1 Number of Half Dome Mirrorss: 0 Number of Semi-Active X-Y Lens Manipulatorss: 4 Setup sensor board versions: Setup SSD version 1 Imaging Generic Power Amplifiers: Generic Power Amplifier Imaging Control Rack Configurations: IPDR Type of projection multiplexer boards: MUX Absent LEC Rack in Electronic Architectures: Present Projection GPA Configuration Versions: Version 2 Number of Lens NEXZ Manipulatorss: 5 Number of Lens Z Manipulators Using Camdisks: 0 Spotsensor surface coatings: Bilatal Energy Sensors: VLOC Spot Sensor Chuck 1s & 2s: VLOC Modelling for MAXYSs: Absent Uniformity Improvement Packages: Present Number of pre-amps available per Z-manipulators: 0 Immersions: Absent Pupil measurements with ILIASs: Present Automatic CUAs: Absent Beam Controls: Beam adjustment Extended Spot Sensor Matchings: Present Number of Rxms/ Ryms: 5/5 Diaphragm Limiters: Absent NA1 motor types: None Spot Sensor Reticle Stages: Absent Smooth Field Uniformitys: Absent Exchangeable Last Lens Elements: Present Exchangeable Pupil Lens Elements: Absent Number of manipulable ELLE axess: 0 UV Shutter versions: UV Shutter version 1 Dosecontrol Hardwares: ISB Illuminator platforms: Aerial 2 Polarizations: Absent Automatic PCE exchangers: Absent Automatic CUA exchanger architectures: Not applicable Test table architectures: Aerial 2Illumination modes: All illumination modes DUV Lightsource Power Levels: 45.00 Watt Lens Top Tool Connections: Lens Top Tool can be mounted on top of the Lens Scanning Energy Sensor Calibrations: Static Energy Sensor Calibration Position of Spot Sensor on Chuck 1s: Spot Sensor Position on Chuck 1 layout 1 Position of Spot Sensor on Chuck 2s: Spot Sensor Position on Chuck 2 layout 1 Z-capture for low relfectivity wafers: Off TIS plate deformation corrections: Disabled FSM Flexibility packages: Disabled Field width optimised leveling: Disabled Constrained fits: Disabled Levelling throughput improvement on measure sides: No levelling throughput package Point-to-Point LS Machine Matchings: Disabled Circuit Dependent FECs: Present Focus Monitorings: Present Extended LS areas: Disabled Air Gauges: Absent Type of Air Gauges: No Air Gauge device present Reticle shape corrections: Disabled ( Overrules Enabled ) LS focus nodes: LS focus node 3 Level Sensor Processing Racks: LCSR LS_PEMM_CONFIGs: Present LS_CPU_CONFIGs: 3 CPU's available Base Liner overlay high order intrafields: Disabled BaseLiner focus high order intrafields: Disabled BaseLiner focus control.s: Disabled Pattern Matcher fullchips: Absent Pattern Matchers: Absent Maximum numerical aperature (NA) that can be used in Lot Productions: level 0 Log missed translations: Disabled Allow even orders usages: Present Multilingual UIs: Absent Improved Maintenance action scheduling.s: Disabled Recipe Creators: Light Lot Report Data Categorys: Enhanced Diagnostics CDCs: Enabled EFESEs: Absent PED control modes: Absent Proximity Matchings: Present mbds controls: Present Enhanced exposures 1s: Present Data collection not covered by FOCUS and OVERLAYs: InformPro Data Collection disabledOverlay Data Collections: Disabled XML Lot Report Content Levels: Basic Enable the Maintenance Assistants: Disable Maintenance Assistant EDA Interfaces: Disabled Equipment Constants via SECS interfaces: Disabled LCI WaitWatcher plug-ins: Absent Reorder Lot Services: Absent Shot Data Collections: Absent Focus Data Collections: Absent Alignment Recipe Overrides: Disabled Enable to support SMASH XY mark types.s: not supported Specifies which mark types are supporteds: ASML marks only Alignment laser configurations: 2 color laser OADB Improved Dynamic Ranges: Disabled board configurations: ODB + ADB Alignment Camera Mirrors: Absent Athena Narrow Marks Twinscans: Present Alignment Sensor Types: Athena Narrow Marks OM Athena Focus Improvements 1s: Present Max alignment speeds: Setting 2 AA processing racks: AACR processing rack Particle Extraction Mass Flow Meters: Absent purging configurations: purging CONFIG 3 Bubble Extraction Seal Settings: Not Applicable Ultra Pure Water flow controller (WICC)s: absent LCW Circuit set-ups: Flow Version 1 In situ Wafer TablesStone Cleanings: Absent Clean Air Configurations: Others Metroframe Circuit Water Cabinets: Absent CT Miscellaneous Racks: Present Clean Air Temperature Controls: Driver and ACC Purge Hoods configurations: Compressed Clean air and Extremely Clean Dry air Nitrogen Purge Utility Controls: Absent Reticle Cleanings: Absent Metroframe types: TYPE_I Inlet restriction for clean airs: Inlet restriction at right side Reticle Stage purged mini environments: Present Gas Control Unit Types: High Flow (HF) Wet Imaging Control Cabinets: Not Applicable Readout location of Pneumatic Facility Unit sensors: Machine Base Diagnostics System (MBDS) Laminar Bottom Hoods: Absent Extreme Clean Humiditied Airs: AbsentLens Circuit Water Flows: High Motor Circuit Water Flows: Normal SPM temp correction for lens axiss: Disabled 2 Sided IFM-beams for WS-X (expose/ measure)s: Not available Diff pressure correction for IFM beams: Absent IFM Laser Configurations: AOM Recombo Laser Position Control Rack Configurations: Rack Configuration type 3 Position Control Power Rack Configurations: TYPE_3: Stages Power Rack upto E-spec Number of Motion Controllerss: 5 Motion Controllers present Position Control Motion Control racks: PMCR Reticle Stage Short Stroke X/Y11/Y12/Y21/Y22/Y11/Y11 amp.s: PADC 100V/16A Wafer Stage Short Stroke 1 XY1/ XY2/XY3 amp.s: PADC 100V/16A Wafer Stage Short Stroke 2 XY1/ XY2/XY3 amp.s: PADC 100V/16A Reticle Stage Short Stroke Z1/Z2/Z3 amp.s: Pass Low Current 8.5A Wafer Stage Short Stroke 1 Z1/Z2/Z3 amp.s: Pass Low Current 8.5A Wafer Stage Short Stroke 2 Z1/Z2/Z3 amp.s: Pass Low Current 8.5A Reticle Stage Long Stroke Y11/Y12/Y21/Y22 amp.s: 450V20A: PAAC AT-pepD Reticle Balance Mass 1/2 amp.s: 450V20A: PAAC AT-pepD Wafer Stage Long Stroke E/M X amp.s: 400V16A: PAAC AT-D Wafer Stage Long Stroke E Y1/Y2/CS amp.s: 400V16A: PAAC AT-D Wafer Stage Long Stroke M Y1/Y2/CS amp.s: 400V16A: PAAC AT-D Wafer Stage Balance Mass 11/12/21/22 amp.s: 325V14A: PAAC AT-C Pressure update rate for fringelength corrections: Pressure update rate 2 or 4 Hz TestStreams: TestStream disabled Performance Enhancement Packages: None PEP Image Streamings: Present Lot Overhead Reductions: LOR2 Extended Zone Alignments: Disabled Intrafield Higher Order Process Correctionss: Disabled SMASH Reuse Capture Information in Stage Alignments: Coarse capture scans are done on all stage alignment marks. Allow wafer plane deviation check with Focus Monitorings: Disabled Parameter indicates how long overlay data will be stored.s: Short retention period. Level sensor Ry drift corrections: Disabled Fading Control Switchs: Disabled Improved wafer reject modes: Disabled Automated Lens Heating Calibrations: Disabled Lens heating History in LH Feedforwards: Enabled Allow different Exp,TIS Align sets: Absent Imaging Fading Controls: Disabled Gridmappers: Disabled 2D grid corrections: Enabled Double TIS scans: DisabledSymmetrical Reticle Alignments: Disabled Ast offset correction in TIS LHFB/LOCO (Version 3)s: Enabled Choice of avoidance routing.s: Absent NEXZ-tilt per exposures: The NEXZ-tilt cannot be adjusted per exposure. Off-axis slits: Projection lens has no off-axis slit. Improved Edge Field Levelings: Disabled Enhanced Throughput Reticle Alignments: Present Wavelength Adjustables: Adjustable Allow L1L7 Type 1 Optimizations: Absent Lot Alignment Report Encryptions: Unencrypted Stage Alignment Filters: Present Lot Correction Sequences: Unencrypted Stage Alignment Filters: Present Lot Correction Sequences: Type B Lens Heating Feedbacks: Present Application Specific Lens Heating Calibration and Verifications: Present Improved Contrast Controls: Absent ILIAS lens setups: Absent Air Gauge Improved Levellings: Absent Process Dependent Gain Corrections: Absent Enhanced Exposure Overlays: Absent ALE 1 Uses: Lens heating only Overlay Nodes: Level 0 E-chuck Flatness Qualification Tests: Disabled TOP HDs: Absent Reticle Align High Precisions: Absent LS spot coverages: Absent Layout Version Number TIS Plate 1 on Chuck 1s/2s: TIS Plate 1 Layout Version 2 Layout Version Number TIS Plate 2 on Chuck 1s2s: TIS Plate 2 Layout Version 4 Usage of wavelength/ Energy Sensor data by TISs: Disabled Indication what kind of AM controller hardware is presents: SUCR Piezo Active Lens Mountss: Absent ILIAS Functionality For Lithoguides: Present ISIS Functionality For Lithoguides: Absent SAMOS Stray Light Test For Lithoguides: Present PUPIL Measurement For Lithoguides: Present FOCAL Measurement for Lithoguides: Present Leveling Verification Test for Lithoguides: Present Lithoguide Imaging Recipess: Absent Dose System Performance Test for Lithoguides: Present ILIAS Sensor Locations: Chuck 2 ILIAS sensor type chuck 2s: Multiple scan grid ILIAS sensor type chuck 1s: NoneReticle Level Polarization Sensors: Absent SASO robustness and fiber connectivitys: Disable SASO robustness Extended X width masking ranges: Disabled PDO offset for EFL LS spots: Disabled Assure System Snapshotss: not allowed Insert a delay time before starting a Lot (lens heating).s: Enabled Save throughput data to the disks: Disabled Patch strategys: Patchlevel Chuck Dedications: Basic Application Types: Scanner Application Number of RMCS clients: No clients MDL Viewers: Site View ZERO Fiducials: ILIAS MK2 Machine Architectures: XT Machine Architecture XT Architecture Revisions: Rev1 Machine Types: 1250 Machine Specifications: pep-D Specification Stand-alone Workstations: FALSE CP 1As/1Bs/2s/3s/4s/5s/6s: Absent Wafer Handler Productivitys: Level 0 LENS DATA (SEE ALSO ATTACHED DOCUMENT) :- Operator:ASML Machine:6xxx Release:4.1.0 Date:16/07/2015 Time:16:10 Report Filename : EMCA.68 Report Path : TM/Projection/StrayLightMonitoring/EMCA.log/ Machine Type : 1250D Testname : Straylight At Multiple Opaque Squares Start Time : Thu, 16 Jul 2015 16:07:37 096389us +0800 Stop Time : Thu, 16 Jul 2015 16:10:47 841204us +0800 Execution Time : 00:03:10 Test Run Result : Finished Test Status : Test is Finished Comment : +----------------------------------+------------+-----------+----------+ \| Step \| Start Time \| Stop Time \| Status \| +==================================+============+===========+==========+ \| Prepare machine \| 16:07:37 \| 16:09:15 \| Finished \| \| Perform TIS measurements \| 16:09:15 \| 16:10:08 \| Finished \| \| Perform Spot sensor measurements \| 16:10:08 \| 16:10:27 \| Finished \| \| Create testlog \| 16:10:27 \| 16:10:40 \| Finished \| \| Unload reticle \| 16:10:40 \| 16:10:46 \| Finished \| \| Calculate stray light \| 16:10:46 \| 16:10:47 \| Finished \| +----------------------------------+------------+-----------+----------+ +----------------+ \| Execution Time \| +================+ \| 00:01:37 \| \| 00:00:53 \| \| 00:00:18 \| \| 00:00:13 \| \| 00:00:05 \| \| 00:00:01 \| +----------------+ Main Results Test Log Name : 6xxx Machine Number : 6xxx Machine Type : 1250D Lens Number : 0122xxxx ELLE ID : Measurement Time : 07/16/2015 16:10 Comment : Pupil Shape Illumination mode : Annular NA : 0.850 DOE ID : 15 Sigma inner : 0.690 outer : 0.930 Reticle ID : 45563154P009 Number of Cycles : 1 Attenuator Factor : 0.600 Chuck ID : CHUCK_ID_1 TIS Plate ID : PLATE_1 PGA gain : PGA_GAIN_10DB Number of Samples : 100 Defocus : 0.000 [um] Rema Usage TIS : Homed Number of Laser Pulses : 50 Laser Frequency : 4000 [Hz] Energy : 11.25 [mJ] Rema Usage Spot Sensor : Homed Dark Current : 576 [bits] Reference Blocksize : 33 [um] Straylight at ref. blocksize : 1.35 [%] Max. Straylight position X : -3.55 [mm] Y : 6.60 [mm] Detailled Results +----------------+-----------+----------+-------------+----------+ \| position \| \| \| \| \| \|--------+-------+ \| \| \| \| \| X \| Y \| sensor \| pad size \| Stray Light \| used ref \| \| [mm] \| [mm] \| \| [um] \| [%] \| \| +========+=======+===========+==========+=============+==========+ \| -10.25 \| 7.00 \| TIS Ratio \| 108 \| 0.84 \| 1 \| \| -10.25 \| 6.40 \| TIS Ratio \| 68 \| 0.88 \| 1 \| \| -10.55 \| 7.00 \| TIS Ratio \| 48 \| 1.03 \| 1 \| \| -10.55 \| 6.80 \| TIS Ratio \| 36 \| 1.02 \| 1 \| \| -10.55 \| 6.60 \| TIS Ratio \| 33 \| 1.04 \| 1 \| \| -10.55 \| 6.40 \| TIS Ratio \| 30 \| 1.12 \| 1 \| \| -10.50 \| 8.30 \| TIS Ratio \| 0 \| 0.00 \| 0 \| \| -10.50 \| 10.80 \| TIS Ratio \| 1100 \| 0.49 \| 3 \| \| -10.50 \| 8.45 \| TIS Ratio \| 0 \| 0.00 \| 0 \| \| -6.75 \| 7.00 \| TIS Ratio \| 108 \| 0.85 \| 4 \| \| -6.75 \| 6.40 \| TIS Ratio \| 68 \| 0.91 \| 4 \| \| -7.05 \| 7.00 \| TIS Ratio \| 48 \| 1.00 \| 4 \| \| -7.05 \| 6.80 \| TIS Ratio \| 36 \| 1.04 \| 4 \| \| -7.05 \| 6.60 \| TIS Ratio \| 33 \| 0.97 \| 4 \| \| -7.05 \| 6.40 \| TIS Ratio \| 30 \| 1.12 \| 4 \| \| -7.00 \| 8.30 \| TIS Ratio \| 0 \| 0.00 \| 0 \| \| -7.00 \| 10.80 \| TIS Ratio \| 1100 \| 0.53 \| 6 \| \| -7.00 \| 8.45 \| TIS Ratio \| 0 \| 0.00 \| 0 \| \| -3.25 \| 7.00 \| TIS Ratio \| 108 \| 1.01 \| 7 \| \| -3.25 \| 6.40 \| TIS Ratio \| 68 \| 1.26 \| 7 \| \| -3.55 \| 7.00 \| TIS Ratio \| 48 \| 1.17 \| 7 \| \| -3.55 \| 6.80 \| TIS Ratio \| 36 \| 1.25 \| 7 \| \| -3.55 \| 6.60 \| TIS Ratio \| 33 \| 1.35 \| 7 \| \| -3.55 \| 6.40 \| TIS Ratio \| 30 \| 1.28 \| 7 \| \| -3.50 \| 8.30 \| TIS Ratio \| 0 \| 0.00 \| 0 \| \| -3.50 \| 10.80 \| TIS Ratio \| 1100 \| 0.60 \| 9 \| \| -3.50 \| 8.45 \| TIS Ratio \| 0 \| 0.00 \| 0 \| \| 0.25 \| 7.00 \| TIS Ratio \| 108 \| 0.70 \| 10 \| \| 0.25 \| 6.40 \| TIS Ratio \| 68 \| 0.92 \| 10 \| \| -0.05 \| 7.00 \| TIS Ratio \| 48 \| 0.97 \| 10 \| \| -0.05 \| 6.80 \| TIS Ratio \| 36 \| 1.01 \| 10 \| \| -0.05 \| 6.60 \| TIS Ratio \| 33 \| 1.22 \| 10 \| \| -0.05 \| 6.40 \| TIS Ratio \| 30 \| 1.17 \| 10 \| \| 0.00 \| 8.30 \| TIS Ratio \| 0 \| 0.00 \| 0 \| \| 0.00 \| 10.80 \| TIS Ratio \| 1100 \| 0.57 \| 12 \| \| 0.00 \| 8.45 \| TIS Ratio \| 0 \| 0.00 \| 0 \| \| 3.75 \| 7.00 \| TIS Ratio \| 108 \| 0.71 \| 13 \| \| 3.75 \| 6.40 \| TIS Ratio \| 68 \| 0.88 \| 13 \| \| 3.45 \| 7.00 \| TIS Ratio \| 48 \| 0.89 \| 13 \| \| 3.45 \| 6.80 \| TIS Ratio \| 36 \| 0.99 \| 13 \| \| 3.45 \| 6.60 \| TIS Ratio \| 33 \| 1.02 \| 13 \| \| 3.45 \| 6.40 \| TIS Ratio \| 30 \| 1.13 \| 13 \| \| 3.50 \| 8.30 \| TIS Ratio \| 0 \| 0.00 \| 0 \| \| 3.50 \| 10.80 \| TIS Ratio \| 1100 \| 0.57 \| 15 \| \| 3.50 \| 8.45 \| TIS Ratio \| 0 \| 0.00 \| 0 \| \| 7.25 \| 7.00 \| TIS Ratio \| 108 \| 0.87 \| 16 \| \| 7.25 \| 6.40 \| TIS Ratio \| 68 \| 0.92 \| 16 \| \| 6.95 \| 7.00 \| TIS Ratio \| 48 \| 1.00 \| 16 \| \| 6.95 \| 6.80 \| TIS Ratio \| 36 \| 1.01 \| 16 \| \| 6.95 \| 6.60 \| TIS Ratio \| 33 \| 0.99 \| 16 \| \| 6.95 \| 6.40 \| TIS Ratio \| 30 \| 1.12 \| 16 \| \| 7.00 \| 8.30 \| TIS Ratio \| 0 \| 0.00 \| 0 \| \| 7.00 \| 10.80 \| TIS Ratio \| 1100 \| 0.45 \| 18 \| \| 7.00 \| 8.45 \| TIS Ratio \| 0 \| 0.00 \| 0 \| \| 10.75 \| 7.00 \| TIS Ratio \| 108 \| 0.49 \| 19 \| \| 10.75 \| 6.40 \| TIS Ratio \| 68 \| 0.43 \| 19 \| \| 10.45 \| 7.00 \| TIS Ratio \| 48 \| 0.67 \| 19 \| \| 10.45 \| 6.80 \| TIS Ratio \| 36 \| 0.66 \| 19 \| \| 10.45 \| 6.60 \| TIS Ratio \| 33 \| 0.74 \| 19 \| \| 10.45 \| 6.40 \| TIS Ratio \| 30 \| 0.89 \| 19 \| \| 10.50 \| 8.30 \| TIS Ratio \| 0 \| 0.00 \| 0 \| \| 10.50 \| 10.80 \| TIS Ratio \| 1100 \| 0.39 \| 21 \| \| 10.50 \| 8.45 \| TIS Ratio \| 0 \| 0.00 \| 0 \| \| -10.50 \| 10.80 \| Spot \| 1100 \| 0.49 \| 2 \| \| -10.50 \| 9.60 \| Spot \| 0 \| 0.00 \| 0 \| \| -7.00 \| 10.80 \| Spot \| 1100 \| 0.53 \| 5 \| \| -7.00 \| 9.60 \| Spot \| 0 \| 0.00 \| 0 \| \| -3.50 \| 10.80 \| Spot \| 1100 \| 0.60 \| 8 \| \| -3.50 \| 9.60 \| Spot \| 0 \| 0.00 \| 0 \| \| 0.00 \| 10.80 \| Spot \| 1100 \| 0.57 \| 11 \| \| 0.00 \| 9.60 \| Spot \| 0 \| 0.00 \| 0 \| \| 3.50 \| 10.80 \| Spot \| 1100 \| 0.57 \| 14 \| \| 3.50 \| 9.60 \| Spot \| 0 \| 0.00 \| 0 \| \| 7.00 \| 10.80 \| Spot \| 1100 \| 0.45 \| 17 \| \| 7.00 \| 9.60 \| Spot \| 0 \| 0.00 \| 0 \| \| 10.50 \| 10.80 \| Spot \| 1100 \| 0.39 \| 20 \| \| 10.50 \| 9.60 \| Spot \| 0 \| 0.00 \| 0 \| +--------+-------+-----------+----------+-------------+----------+ +--------+----------+--------+--------+--------+-------+ \| \| \| \| \| \| \| \| \| \| \| \| \| \| \| ref id \| used cal \| cal id \| Av TIS \| cal \| Av SS \| +========+==========+========+========+========+=======+ \| 0 \| 1 \| 0 \| 282.9 \| -265.6 \| 0.00 \| \| 0 \| 1 \| 0 \| 283.6 \| -265.6 \| 0.00 \| \| 0 \| 1 \| 0 \| 286.8 \| -265.6 \| 0.00 \| \| 0 \| 1 \| 0 \| 286.6 \| -265.6 \| 0.00 \| \| 0 \| 1 \| 0 \| 287.0 \| -265.6 \| 0.00 \| \| 0 \| 1 \| 0 \| 288.5 \| -265.6 \| 0.00 \| \| 1 \| 1 \| 0 \| 2319.6 \| 0.0 \| 0.00 \| \| 0 \| 1 \| 1 \| 275.7 \| -265.6 \| 0.00 \| \| 3 \| 0 \| 1 \| 2331.2 \| 0.0 \| 0.00 \| \| 0 \| 2 \| 0 \| 285.3 \| -267.8 \| 0.00 \| \| 0 \| 2 \| 0 \| 286.6 \| -267.8 \| 0.00 \| \| 0 \| 2 \| 0 \| 288.3 \| -267.8 \| 0.00 \| \| 0 \| 2 \| 0 \| 289.2 \| -267.8 \| 0.00 \| \| 0 \| 2 \| 0 \| 287.7 \| -267.8 \| 0.00 \| \| 0 \| 2 \| 0 \| 290.8 \| -267.8 \| 0.00 \| \| 4 \| 2 \| 0 \| 2328.0 \| 0.0 \| 0.00 \| \| 0 \| 2 \| 2 \| 278.6 \| -267.8 \| 0.00 \| \| 6 \| 0 \| 2 \| 2309.5 \| 0.0 \| 0.00 \| \| 0 \| 3 \| 0 \| 285.0 \| -264.7 \| 0.00 \| \| 0 \| 3 \| 0 \| 290.1 \| -264.7 \| 0.00 \| \| 0 \| 3 \| 0 \| 288.4 \| -264.7 \| 0.00 \| \| 0 \| 3 \| 0 \| 290.0 \| -264.7 \| 0.00 \| \| 0 \| 3 \| 0 \| 292.0 \| -264.7 \| 0.00 \| \| 0 \| 3 \| 0 \| 290.5 \| -264.7 \| 0.00 \| \| 7 \| 3 \| 0 \| 2281.4 \| 0.0 \| 0.00 \| \| 0 \| 3 \| 3 \| 277.0 \| -264.7 \| 0.00 \| \| 9 \| 0 \| 3 \| 2301.2 \| 0.0 \| 0.00 \| \| 0 \| 4 \| 0 \| 277.3 \| -263.1 \| 0.00 \| \| 0 \| 4 \| 0 \| 281.8 \| -263.1 \| 0.00 \| \| 0 \| 4 \| 0 \| 282.7 \| -263.1 \| 0.00 \| \| 0 \| 4 \| 0 \| 283.5 \| -263.1 \| 0.00 \| \| 0 \| 4 \| 0 \| 287.8 \| -263.1 \| 0.00 \| \| 0 \| 4 \| 0 \| 286.7 \| -263.1 \| 0.00 \| \| 10 \| 4 \| 0 \| 2282.6 \| 0.0 \| 0.00 \| \| 0 \| 4 \| 4 \| 274.5 \| -263.1 \| 0.00 \| \| 12 \| 0 \| 4 \| 2251.7 \| 0.0 \| 0.00 \| \| 0 \| 5 \| 0 \| 278.2 \| -264.0 \| 0.00 \| \| 0 \| 5 \| 0 \| 281.6 \| -264.0 \| 0.00 \| \| 0 \| 5 \| 0 \| 281.8 \| -264.0 \| 0.00 \| \| 0 \| 5 \| 0 \| 283.8 \| -264.0 \| 0.00 \| \| 0 \| 5 \| 0 \| 284.3 \| -264.0 \| 0.00 \| \| 0 \| 5 \| 0 \| 286.6 \| -264.0 \| 0.00 \| \| 13 \| 5 \| 0 \| 2262.3 \| 0.0 \| 0.00 \| \| 0 \| 5 \| 5 \| 275.5 \| -264.0 \| 0.00 \| \| 15 \| 0 \| 5 \| 2286.1 \| 0.0 \| 0.00 \| \| 0 \| 6 \| 0 \| 277.1 \| -259.4 \| 0.00 \| \| 0 \| 6 \| 0 \| 278.1 \| -259.4 \| 0.00 \| \| 0 \| 6 \| 0 \| 279.8 \| -259.4 \| 0.00 \| \| 0 \| 6 \| 0 \| 279.9 \| -259.4 \| 0.00 \| \| 0 \| 6 \| 0 \| 279.6 \| -259.4 \| 0.00 \| \| 0 \| 6 \| 0 \| 282.1 \| -259.4 \| 0.00 \| \| 16 \| 6 \| 0 \| 2294.1 \| 0.0 \| 0.00 \| \| 0 \| 6 \| 6 \| 268.4 \| -259.4 \| 0.00 \| \| 18 \| 0 \| 6 \| 2267.8 \| 0.0 \| 0.00 \| \| 0 \| 7 \| 0 \| 273.6 \| -263.5 \| 0.00 \| \| 0 \| 7 \| 0 \| 272.2 \| -263.5 \| 0.00 \| \| 0 \| 7 \| 0 \| 277.1 \| -263.5 \| 0.00 \| \| 0 \| 7 \| 0 \| 276.9 \| -263.5 \| 0.00 \| \| 0 \| 7 \| 0 \| 278.5 \| -263.5 \| 0.00 \| \| 0 \| 7 \| 0 \| 281.6 \| -263.5 \| 0.00 \| \| 19 \| 7 \| 0 \| 2295.2 \| 0.0 \| 0.00 \| \| 0 \| 7 \| 7 \| 271.4 \| -263.5 \| 0.00 \| \| 21 \| 0 \| 7 \| 2289.7 \| 0.0 \| 0.00 \| \| 0 \| 0 \| 1 \| 0.0 \| 0.0 \| 0.00 \| \| 2 \| 0 \| 1 \| 0.0 \| 0.0 \| 0.91 \| \| 0 \| 0 \| 2 \| 0.0 \| 0.0 \| 0.00 \| \| 5 \| 0 \| 2 \| 0.0 \| 0.0 \| 0.91 \| \| 0 \| 0 \| 3 \| 0.0 \| 0.0 \| 0.01 \| \| 8 \| 0 \| 3 \| 0.0 \| 0.0 \| 0.92 \| \| 0 \| 0 \| 4 \| 0.0 \| 0.0 \| 0.01 \| \| 11 \| 0 \| 4 \| 0.0 \| 0.0 \| 0.91 \| \| 0 \| 0 \| 5 \| 0.0 \| 0.0 \| 0.01 \| \| 14 \| 0 \| 5 \| 0.0 \| 0.0 \| 0.91 \| \| 0 \| 0 \| 6 \| 0.0 \| 0.0 \| 0.00 \| \| 17 \| 0 \| 6 \| 0.0 \| 0.0 \| 0.92 \| \| 0 \| 0 \| 7 \| 0.0 \| 0.0 \| 0.00 \| \| 20 \| 0 \| 7 \| 0.0 \| 0.0 \| 0.92 \| +--------+----------+--------+--------+--------+-------+ Operator:ASML Machine:6xxx Release:4.1.0 Date:13/05/2015 Time:21:07 Report Filename : EMZQ.76 Report Path : TM/Projection/AberrationsQualification/ILIAS/EMZQ.log/ Machine Type : 1250D Testname : Ilias Lens Qualification Start Time : Wed, 13 May 2015 20:03:24 088689us +0800 Stop Time : Wed, 13 May 2015 21:07:27 542791us +0800 Execution Time : 01:04:03 Test Run Result : Finished Test Status : Test is Finished Results Validation : N.A. Measurement Quality : N.A. Comment : +----------------------+------------+-----------+----------+----------------+ \| Step \| Start Time \| Stop Time \| Status \| Execution Time \| +======================+============+===========+==========+================+ \| Initialize Data \| 20:03:24 \| 20:03:25 \| Finished \| 00:00:01 \| \| Prepare Machine \| 20:03:25 \| 20:06:04 \| Finished \| 00:02:39 \| \| Perform Measurements \| 20:06:04 \| 21:06:35 \| Finished \| 01:00:30 \| \| Model \| 21:06:35 \| 21:07:27 \| Finished \| 00:00:52 \| +----------------------+------------+-----------+----------+----------------+ Scenario Inputs Selected Scenario : Manual Verification Set : No Verification Overrule Inputs : Yes Manual Scenario Selected : Yes Test Info Machine ID : 6xxx Machine type : 1250D Lens ID : 0122xxxx ELLE ID : 000000 Testlog : ZSQF_6xxx_20150513_2006_manual.tlg Date and time of measurement : 05/13/2015 20:06 Reticle ID : 45564101P111 Measurements layout : UV13X2 Clearout reticle : Yes Chuck ID : Chuck 2 Number of cycles : 1 Number of Y positions : 5 Lens Temperature : 22.00 [C] Lens Pressure : 984.00 [mbar] Lens Stability Zernike delta over measurement time +------+--------+-------+----------+ \| \| Delta \| Spec. \| In Spec. \| \| \| [nm] \| [nm] \| \| +======+========+=======+==========+ \| Z5 \| -0.104 \| 2.000 \| Yes \| \| Z7 \| -0.221 \| 2.000 \| Yes \| \| Z9 \| 0.095 \| 2.000 \| Yes \| \| Z14 \| -0.049 \| 2.000 \| Yes \| \| Z16 \| 0.054 \| 2.000 \| Yes \| +------+--------+-------+----------+ RMS values +-------------+---------+------------------+-----------------------+ \| \| \| After Correction \| Deltas \| \| \| +---------+--------+-------+-------+-------+ \| \| Current \| NEXZ \| +SA \| NEXZ \| SA \| Both \| \| \| [nm] \| [nm] \| [nm] \| [nm] \| [nm] \| [nm] \| +=============+=========+=========+========+=======+=======+=======+ \| Spherical \| 0.92 \| 0.94 \| 0.94 \| -0.02 \| 0.00 \| -0.02 \| \| Coma \| 0.78 \| 0.63 \| 0.63 \| 0.14 \| 0.01 \| 0.15 \| \| Astigmatism \| 1.10 \| 1.10 \| 1.10 \| 0.00 \| 0.00 \| 0.00 \| \| 3-foil \| 0.55 \| 0.56 \| 0.57 \| -0.01 \| -0.00 \| -0.01 \| \| (Z5->Z37) \| 2.27 \| 2.29 \| 2.28 \| -0.01 \| 0.01 \| -0.01 \| \| (Z38->) \| 0.99 \| 0.99 \| 0.99 \| 0.00 \| 0.00 \| 0.00 \| +-------------+---------+---------+--------+-------+-------+-------+ Measured Zernike distributions (integrated) +-----+---------------+-------------------+---------------------+ \| \| Offset \| Tilt in X \| Curv in X \| \| +-------+-------+---------+---------+----------+----------+ \| \| Value \| Range \| Value \| Range \| Value \| Range \| \| \| [nm] \| [nm] \| [nm/cm] \| [nm/cm] \| [nm/cm2] \| [nm/cm2] \| +=====+=======+=======+=========+=========+==========+==========+ \| Z5 \| -3.24 \| 3.21 \| -0.30 \| 0.43 \| 2.72 \| 0.78 \| \| Z6 \| 0.70 \| 0.57 \| -0.24 \| 0.44 \| -0.20 \| 1.28 \| \| Z7 \| 0.48 \| 0.39 \| 0.67 \| 0.23 \| -0.51 \| 0.45 \| \| Z8 \| -0.49 \| 2.89 \| 0.22 \| 0.51 \| 0.62 \| 2.11 \| \| Z9 \| -0.45 \| 0.78 \| -0.20 \| 0.08 \| 0.83 \| 0.41 \| \| Z14 \| -0.07 \| 0.23 \| -0.08 \| 0.38 \| 0.39 \| 0.25 \| \| Z15 \| -0.13 \| 0.88 \| 0.07 \| 0.24 \| 0.08 \| 0.53 \| \| Z16 \| -0.59 \| 0.83 \| -0.43 \| 0.15 \| 0.95 \| 0.48 \| +-----+-------+-------+---------+---------+----------+----------+ Non-integrated non-correctable aberration data (cycle averaged) +-----+-------+------+ \| \| Min \| Max \| \| \| [nm] \| [nm] \| +=====+=======+======+ \| Z5 \| -4.80 \| 3.87 \| \| Z6 \| -1.06 \| 2.46 \| \| Z7 \| -1.90 \| 1.12 \| \| Z8 \| -2.46 \| 1.72 \| \| Z9 \| -1.04 \| 1.30 \| \| Z10 \| -1.75 \| 1.03 \| \| Z11 \| -1.78 \| 2.18 \| \| Z12 \| -0.29 \| 3.93 \| \| Z13 \| -1.77 \| 1.48 \| \| Z14 \| -1.65 \| 1.38 \| \| Z15 \| -1.14 \| 0.83 \| \| Z16 \| -2.03 \| 1.29 \| \| Z17 \| -3.41 \| 0.09 \| \| Z18 \| -1.13 \| 1.38 \| \| Z19 \| -1.20 \| 2.14 \| \| Z20 \| -1.34 \| 0.81 \| \| Z21 \| -2.50 \| 2.00 \| \| Z22 \| -2.96 \| 2.25 \| \| Z23 \| -0.81 \| 1.77 \| \| Z24 \| -0.87 \| 0.76 \| \| Z25 \| -1.56 \| 1.58 \| \| Z26 \| -0.83 \| 0.84 \| \| Z27 \| -0.98 \| 0.85 \| \| Z28 \| 0.28 \| 2.48 \| \| Z29 \| -1.27 \| 0.89 \| \| Z30 \| -1.05 \| 1.38 \| \| Z31 \| -1.18 \| 1.00 \| \| Z32 \| -0.63 \| 0.92 \| \| Z33 \| -1.07 \| 0.86 \| \| Z34 \| -0.97 \| 1.69 \| \| Z35 \| -0.64 \| 0.75 \| \| Z36 \| -1.09 \| 0.72 \| \| Z37 \| 1.30 \| 2.83 \| +-----+-------+------+ Integrated non-correctable aberration (cycle averaged, scan integrated) +-----+-------+-------+ \| \| Min \| Max \| \| \| [nm] \| [nm] \| +=====+=======+=======+ \| Z5 \| -3.51 \| 1.49 \| \| Z6 \| -0.07 \| 0.85 \| \| Z7 \| -0.70 \| 0.71 \| \| Z8 \| -0.43 \| 0.87 \| \| Z9 \| -0.75 \| 0.78 \| \| Z10 \| -0.97 \| 0.22 \| \| Z11 \| -0.72 \| 0.50 \| \| Z12 \| 0.81 \| 3.30 \| \| Z13 \| -1.08 \| 0.03 \| \| Z14 \| -1.36 \| 1.20 \| \| Z15 \| -0.17 \| 0.20 \| \| Z16 \| -1.37 \| 1.05 \| \| Z17 \| -2.74 \| -1.71 \| \| Z18 \| -0.35 \| 0.70 \| \| Z19 \| -0.86 \| 1.23 \| \| Z20 \| -0.45 \| 0.10 \| \| Z21 \| -1.57 \| 1.15 \| \| Z22 \| -0.53 \| -0.24 \| \| Z23 \| -0.55 \| 1.40 \| \| Z24 \| -0.14 \| 0.15 \| \| Z25 \| -1.34 \| 1.30 \| \| Z26 \| -0.52 \| 0.50 \| \| Z27 \| -0.62 \| 0.23 \| \| Z28 \| 1.04 \| 2.01 \| \| Z29 \| -0.06 \| 0.28 \| \| Z30 \| -0.78 \| 1.11 \| \| Z31 \| -0.30 \| 0.09 \| \| Z32 \| -0.23 \| 0.47 \| \| Z33 \| -0.29 \| 0.08 \| \| Z34 \| -0.70 \| 1.43 \| \| Z35 \| -0.10 \| 0.15 \| \| Z36 \| -0.88 \| 0.53 \| \| Z37 \| 1.56 \| 2.20 \| +-----+-------+-------+ Integrated non-correctable aberration (cycle averaged, scan integrated) +----+--------+------+------+------+-------+-------+-------+ \| \| X \| Z2 \| Z3 \| Z4 \| Z5 \| Z6 \| Z7 \| \| \| [mm] \| [nm] \| [nm] \| [nm] \| [nm] \| [nm] \| [nm] \| +====+========+======+======+======+=======+=======+=======+ \| 0 \| -12.72 \| \| \| \| 1.49 \| 0.80 \| -0.70 \| \| 1 \| -10.60 \| \| \| \| 0.70 \| 0.39 \| -0.21 \| \| 2 \| -8.48 \| \| \| \| -0.63 \| 0.55 \| -0.16 \| \| 3 \| -6.36 \| \| \| \| -1.82 \| 0.42 \| -0.00 \| \| 4 \| -4.24 \| \| \| \| -3.17 \| 0.52 \| 0.57 \| \| 5 \| -2.12 \| \| \| \| -3.51 \| 0.57 \| 0.71 \| \| 6 \| -0.00 \| \| \| \| -3.51 \| 0.79 \| 0.39 \| \| 7 \| 2.12 \| \| \| \| -3.37 \| 0.62 \| -0.25 \| \| 8 \| 4.24 \| \| \| \| -2.69 \| 0.81 \| 0.01 \| \| 9 \| 6.36 \| \| \| \| -1.77 \| 0.85 \| 0.16 \| \| 10 \| 8.48 \| \| \| \| -0.54 \| 0.67 \| -0.02 \| \| 11 \| 10.60 \| \| \| \| 0.70 \| 0.51 \| -0.19 \| \| 12 \| 12.72 \| \| \| \| 0.14 \| -0.07 \| -0.48 \| +----+--------+------+------+------+-------+-------+-------+ +----+--------+-------+-------+-------+-------+------+-------+ \| \| X \| Z8 \| Z9 \| Z10 \| Z11 \| Z12 \| Z13 \| \| \| [mm] \| [nm] \| [nm] \| [nm] \| [nm] \| [nm] \| [nm] \| +====+========+=======+=======+=======+=======+======+=======+ \| 0 \| -12.72 \| 0.33 \| 0.76 \| -0.97 \| 0.32 \| 0.94 \| -0.06 \| \| 1 \| -10.60 \| 0.17 \| 0.57 \| 0.08 \| 0.50 \| 0.81 \| 0.03 \| \| 2 \| -8.48 \| -0.15 \| 0.04 \| 0.22 \| 0.13 \| 1.12 \| 0.01 \| \| 3 \| -6.36 \| -0.41 \| -0.75 \| 0.09 \| -0.42 \| 1.06 \| -0.00 \| \| 4 \| -4.24 \| -0.42 \| -0.38 \| -0.13 \| -0.29 \| 2.65 \| -0.24 \| \| 5 \| -2.12 \| -0.43 \| -0.29 \| 0.06 \| -0.35 \| 3.04 \| -0.02 \| \| 6 \| -0.00 \| -0.30 \| -0.40 \| 0.05 \| -0.42 \| 3.08 \| -0.17 \| \| 7 \| 2.12 \| -0.31 \| -0.18 \| -0.25 \| -0.72 \| 3.30 \| -0.50 \| \| 8 \| 4.24 \| -0.11 \| -0.21 \| 0.13 \| -0.54 \| 3.09 \| -0.69 \| \| 9 \| 6.36 \| -0.06 \| -0.44 \| -0.15 \| -0.58 \| 1.81 \| -0.65 \| \| 10 \| 8.48 \| 0.04 \| 0.25 \| -0.61 \| -0.62 \| 2.15 \| -0.78 \| \| 11 \| 10.60 \| 0.68 \| 0.67 \| -0.71 \| -0.17 \| 1.72 \| -0.79 \| \| 12 \| 12.72 \| 0.87 \| 0.78 \| 0.09 \| 0.17 \| 1.82 \| -1.08 \| +----+--------+-------+-------+-------+-------+------+-------+ +----+--------+-------+-------+-------+-------+-------+-------+ \| \| X \| Z14 \| Z15 \| Z16 \| Z17 \| Z18 \| Z19 \| \| \| [mm] \| [nm] \| [nm] \| [nm] \| [nm] \| [nm] \| [nm] \| +====+========+=======+=======+=======+=======+=======+=======+ \| 0 \| -12.72 \| 1.20 \| -0.03 \| 1.05 \| -1.83 \| 0.24 \| 1.23 \| \| 1 \| -10.60 \| 0.23 \| 0.11 \| 0.65 \| -2.21 \| 0.18 \| -0.07 \| \| 2 \| -8.48 \| 0.43 \| 0.05 \| 0.64 \| -2.20 \| 0.42 \| 0.36 \| \| 3 \| -6.36 \| -0.42 \| -0.04 \| 0.60 \| -2.74 \| 0.13 \| 0.36 \| \| 4 \| -4.24 \| -1.36 \| -0.17 \| -0.27 \| -2.22 \| -0.05 \| 0.01 \| \| 5 \| -2.12 \| -1.11 \| -0.17 \| -0.97 \| -2.34 \| 0.10 \| 0.15 \| \| 6 \| -0.00 \| -0.50 \| -0.05 \| -1.37 \| -2.45 \| 0.01 \| -0.15 \| \| 7 \| 2.12 \| 0.52 \| 0.06 \| -1.29 \| -2.07 \| -0.35 \| -0.21 \| \| 8 \| 4.24 \| 1.20 \| 0.12 \| -0.57 \| -1.95 \| -0.30 \| 0.01 \| \| 9 \| 6.36 \| 0.63 \| 0.20 \| 0.08 \| -2.45 \| 0.10 \| -0.37 \| \| 10 \| 8.48 \| 0.31 \| 0.09 \| 0.01 \| -1.71 \| 0.45 \| -0.10 \| \| 11 \| 10.60 \| 0.28 \| 0.08 \| -0.05 \| -1.78 \| 0.59 \| 0.27 \| \| 12 \| 12.72 \| -0.62 \| 0.18 \| -0.02 \| -1.94 \| 0.70 \| -0.86 \| +----+--------+-------+-------+-------+-------+-------+-------+ +----+--------+-------+-------+-------+-------+-------+-------+ \| \| X \| Z20 \| Z21 \| Z22 \| Z23 \| Z24 \| Z25 \| \| \| [mm] \| [nm] \| [nm] \| [nm] \| [nm] \| [nm] \| [nm] \| +====+========+=======+=======+=======+=======+=======+=======+ \| 0 \| -12.72 \| -0.45 \| 0.69 \| -0.24 \| 1.40 \| 0.15 \| -0.72 \| \| 1 \| -10.60 \| -0.34 \| 0.76 \| -0.38 \| 1.29 \| 0.08 \| -1.34 \| \| 2 \| -8.48 \| 0.04 \| 1.06 \| -0.44 \| 0.38 \| -0.03 \| -1.09 \| \| 3 \| -6.36 \| 0.10 \| 1.15 \| -0.50 \| 0.57 \| 0.06 \| -0.34 \| \| 4 \| -4.24 \| -0.16 \| -0.15 \| -0.43 \| 0.63 \| 0.02 \| 0.34 \| \| 5 \| -2.12 \| -0.25 \| -1.03 \| -0.33 \| 0.82 \| -0.04 \| 0.85 \| \| 6 \| -0.00 \| -0.08 \| -1.57 \| -0.39 \| 0.97 \| -0.08 \| 1.30 \| \| 7 \| 2.12 \| -0.17 \| -1.27 \| -0.37 \| 0.78 \| -0.05 \| 1.00 \| \| 8 \| 4.24 \| -0.23 \| -0.13 \| -0.42 \| 1.02 \| -0.14 \| 0.47 \| \| 9 \| 6.36 \| -0.10 \| 0.97 \| -0.37 \| 0.64 \| -0.13 \| -0.08 \| \| 10 \| 8.48 \| -0.08 \| 0.97 \| -0.27 \| 0.48 \| -0.14 \| -0.81 \| \| 11 \| 10.60 \| -0.20 \| 0.59 \| -0.51 \| -0.43 \| -0.02 \| -1.20 \| \| 12 \| 12.72 \| -0.16 \| 0.27 \| -0.53 \| -0.55 \| -0.10 \| -0.55 \| +----+--------+-------+-------+-------+-------+-------+-------+ +----+--------+-------+-------+------+-------+-------+-------+ \| \| X \| Z26 \| Z27 \| Z28 \| Z29 \| Z30 \| Z31 \| \| \| [mm] \| [nm] \| [nm] \| [nm] \| [nm] \| [nm] \| [nm] \| +====+========+=======+=======+======+=======+=======+=======+ \| 0 \| -12.72 \| 0.20 \| -0.62 \| 1.36 \| 0.28 \| 1.11 \| -0.01 \| \| 1 \| -10.60 \| -0.52 \| -0.57 \| 1.05 \| 0.15 \| 0.58 \| -0.30 \| \| 2 \| -8.48 \| -0.25 \| -0.06 \| 1.19 \| -0.06 \| -0.25 \| -0.29 \| \| 3 \| -6.36 \| 0.06 \| 0.23 \| 1.76 \| -0.04 \| -0.05 \| -0.14 \| \| 4 \| -4.24 \| 0.40 \| -0.16 \| 1.68 \| -0.02 \| -0.00 \| -0.27 \| \| 5 \| -2.12 \| 0.50 \| -0.37 \| 1.99 \| 0.08 \| 0.19 \| -0.19 \| \| 6 \| -0.00 \| 0.02 \| -0.25 \| 1.94 \| -0.04 \| 0.05 \| -0.16 \| \| 7 \| 2.12 \| -0.08 \| -0.10 \| 2.01 \| 0.08 \| -0.21 \| -0.11 \| \| 8 \| 4.24 \| -0.11 \| -0.12 \| 1.97 \| 0.05 \| 0.14 \| 0.03 \| \| 9 \| 6.36 \| -0.23 \| 0.10 \| 1.80 \| 0.27 \| 0.12 \| 0.09 \| \| 10 \| 8.48 \| 0.12 \| 0.18 \| 1.18 \| 0.20 \| 0.47 \| 0.07 \| \| 11 \| 10.60 \| 0.39 \| 0.14 \| 1.04 \| 0.14 \| -0.37 \| 0.04 \| \| 12 \| 12.72 \| 0.04 \| 0.01 \| 1.13 \| 0.13 \| -0.78 \| -0.16 \| +----+--------+-------+-------+------+-------+-------+-------+ +----+--------+-------+-------+-------+-------+-------+------+ \| \| X \| Z32 \| Z33 \| Z34 \| Z35 \| Z36 \| Z37 \| \| \| [mm] \| [nm] \| [nm] \| [nm] \| [nm] \| [nm] \| [nm] \| +====+========+=======+=======+=======+=======+=======+======+ \| 0 \| -12.72 \| 0.14 \| -0.29 \| 1.33 \| 0.04 \| 0.01 \| 1.56 \| \| 1 \| -10.60 \| -0.23 \| -0.20 \| 1.43 \| 0.08 \| -0.51 \| 1.69 \| \| 2 \| -8.48 \| -0.12 \| -0.19 \| 1.10 \| 0.15 \| -0.88 \| 1.71 \| \| 3 \| -6.36 \| -0.15 \| -0.23 \| 0.28 \| 0.03 \| -0.56 \| 1.57 \| \| 4 \| -4.24 \| -0.05 \| -0.15 \| 0.23 \| -0.00 \| -0.11 \| 1.63 \| \| 5 \| -2.12 \| 0.18 \| -0.29 \| 0.02 \| -0.06 \| 0.21 \| 1.90 \| \| 6 \| -0.00 \| 0.36 \| -0.09 \| 0.38 \| -0.10 \| 0.43 \| 2.20 \| \| 7 \| 2.12 \| 0.39 \| -0.09 \| 1.01 \| 0.02 \| 0.32 \| 1.85 \| \| 8 \| 4.24 \| 0.11 \| 0.08 \| 0.51 \| 0.01 \| 0.21 \| 1.67 \| \| 9 \| 6.36 \| 0.22 \| 0.07 \| 0.50 \| 0.03 \| -0.27 \| 1.64 \| \| 10 \| 8.48 \| -0.04 \| -0.01 \| -0.36 \| 0.05 \| -0.41 \| 1.73 \| \| 11 \| 10.60 \| -0.05 \| -0.04 \| -0.63 \| 0.00 \| -0.19 \| 1.85 \| \| 12 \| 12.72 \| 0.47 \| 0.08 \| -0.70 \| 0.05 \| 0.53 \| 1.87 \| +----+--------+-------+-------+-------+-------+-------+------+ Non-integrated non-correctable aberration data (cycle averaged) +----+--------+-------+------+------+------+-------+-------+-------+ \| \| X \| Y \| Z2 \| Z3 \| Z4 \| Z5 \| Z6 \| Z7 \| \| \| [mm] \| [mm] \| [nm] \| [nm] \| [nm] \| [nm] \| [nm] \| [nm] \| +====+========+=======+======+======+======+=======+=======+=======+ \| 0 \| -12.72 \| 3.60 \| \| \| \| 1.99 \| 0.56 \| -0.48 \| \| 1 \| -10.60 \| 3.60 \| \| \| \| -0.04 \| 0.51 \| -0.27 \| \| 2 \| -8.48 \| 3.60 \| \| \| \| -1.03 \| 0.91 \| 0.27 \| \| 3 \| -6.36 \| 3.60 \| \| \| \| -1.61 \| 0.06 \| 0.15 \| \| 4 \| -4.24 \| 3.60 \| \| \| \| -2.67 \| 0.94 \| 1.12 \| \| 5 \| -2.12 \| 3.60 \| \| \| \| -3.15 \| 0.45 \| 1.03 \| \| 6 \| -0.00 \| 3.60 \| \| \| \| -2.96 \| 0.93 \| 0.51 \| \| 7 \| 2.12 \| 3.60 \| \| \| \| -3.28 \| 1.15 \| 0.02 \| \| 8 \| 4.24 \| 3.60 \| \| \| \| -2.86 \| 0.70 \| -0.13 \| \| 9 \| 6.36 \| 3.60 \| \| \| \| -1.96 \| 1.28 \| 0.33 \| \| 10 \| 8.48 \| 3.60 \| \| \| \| -0.81 \| 0.15 \| -0.09 \| \| 11 \| 10.60 \| 3.60 \| \| \| \| 0.12 \| -0.19 \| 0.13 \| \| 12 \| 12.72 \| 3.60 \| \| \| \| -0.03 \| -0.98 \| -0.92 \| \| 13 \| -12.72 \| 1.80 \| \| \| \| 0.86 \| -1.06 \| -0.50 \| \| 14 \| -10.60 \| 1.80 \| \| \| \| 0.11 \| -0.29 \| -0.52 \| \| 15 \| -8.48 \| 1.80 \| \| \| \| -1.67 \| 1.50 \| -0.65 \| \| 16 \| -6.36 \| 1.80 \| \| \| \| -2.90 \| 0.98 \| 0.21 \| \| 17 \| -4.24 \| 1.80 \| \| \| \| -4.44 \| 0.52 \| 0.79 \| \| 18 \| -2.12 \| 1.80 \| \| \| \| -4.63 \| 0.25 \| 0.54 \| \| 19 \| -0.00 \| 1.80 \| \| \| \| -4.80 \| 0.87 \| 0.30 \| \| 20 \| 2.12 \| 1.80 \| \| \| \| -4.28 \| 1.02 \| -0.01 \| \| 21 \| 4.24 \| 1.80 \| \| \| \| -3.83 \| 0.46 \| 0.26 \| \| 22 \| 6.36 \| 1.80 \| \| \| \| -2.79 \| 0.28 \| 0.14 \| \| 23 \| 8.48 \| 1.80 \| \| \| \| -1.56 \| 0.84 \| 0.22 \| \| 24 \| 10.60 \| 1.80 \| \| \| \| -0.27 \| 1.20 \| -0.05 \| \| 25 \| 12.72 \| 1.80 \| \| \| \| -1.64 \| -0.83 \| -0.54 \| \| 26 \| -12.72 \| -0.00 \| \| \| \| -0.44 \| 0.42 \| 0.13 \| \| 27 \| -10.60 \| -0.00 \| \| \| \| 0.65 \| 0.22 \| -0.04 \| \| 28 \| -8.48 \| -0.00 \| \| \| \| -0.46 \| 0.56 \| -0.83 \| \| 29 \| -6.36 \| -0.00 \| \| \| \| -2.78 \| 0.53 \| -0.02 \| \| 30 \| -4.24 \| -0.00 \| \| \| \| -4.42 \| 0.61 \| 0.64 \| \| 31 \| -2.12 \| -0.00 \| \| \| \| -4.50 \| 0.36 \| 0.75 \| \| 32 \| -0.00 \| -0.00 \| \| \| \| -4.59 \| 1.32 \| 0.42 \| \| 33 \| 2.12 \| -0.00 \| \| \| \| -3.89 \| 0.67 \| -0.58 \| \| 34 \| 4.24 \| -0.00 \| \| \| \| -3.46 \| 0.65 \| 0.27 \| \| 35 \| 6.36 \| -0.00 \| \| \| \| -2.40 \| 0.65 \| 0.16 \| \| 36 \| 8.48 \| -0.00 \| \| \| \| -0.93 \| 0.57 \| 0.12 \| \| 37 \| 10.60 \| -0.00 \| \| \| \| 0.07 \| 0.48 \| -0.40 \| \| 38 \| 12.72 \| -0.00 \| \| \| \| -1.10 \| -0.28 \| -0.17 \| \| 39 \| -12.72 \| -1.80 \| \| \| \| 1.18 \| 2.46 \| -0.75 \| \| 40 \| -10.60 \| -1.80 \| \| \| \| 1.06 \| 1.24 \| 0.05 \| \| 41 \| -8.48 \| -1.80 \| \| \| \| -0.57 \| -0.35 \| -0.26 \| \| 42 \| -6.36 \| -1.80 \| \| \| \| -2.10 \| -0.32 \| -0.19 \| \| 43 \| -4.24 \| -1.80 \| \| \| \| -3.53 \| 0.55 \| 0.26 \| \| 44 \| -2.12 \| -1.80 \| \| \| \| -4.05 \| 1.08 \| 0.55 \| \| 45 \| -0.00 \| -1.80 \| \| \| \| -3.85 \| 0.41 \| 0.19 \| \| 46 \| 2.12 \| -1.80 \| \| \| \| -4.09 \| -0.07 \| -0.19 \| \| 47 \| 4.24 \| -1.80 \| \| \| \| -3.14 \| 1.28 \| 0.03 \| \| 48 \| 6.36 \| -1.80 \| \| \| \| -2.19 \| 1.63 \| 0.03 \| \| 49 \| 8.48 \| -1.80 \| \| \| \| -0.55 \| 0.75 \| 0.19 \| \| 50 \| 10.60 \| -1.80 \| \| \| \| 1.12 \| 0.26 \| -0.13 \| \| 51 \| 12.72 \| -1.80 \| \| \| \| 0.58 \| 0.42 \| -0.35 \| \| 52 \| -12.72 \| -3.60 \| \| \| \| 3.87 \| 1.62 \| -1.90 \| \| 53 \| -10.60 \| -3.60 \| \| \| \| 1.74 \| 0.26 \| -0.24 \| \| 54 \| -8.48 \| -3.60 \| \| \| \| 0.57 \| 0.11 \| 0.69 \| \| 55 \| -6.36 \| -3.60 \| \| \| \| 0.30 \| 0.82 \| -0.18 \| \| 56 \| -4.24 \| -3.60 \| \| \| \| -0.77 \| -0.01 \| 0.05 \| \| 57 \| -2.12 \| -3.60 \| \| \| \| -1.20 \| 0.72 \| 0.69 \| \| 58 \| -0.00 \| -3.60 \| \| \| \| -1.37 \| 0.44 \| 0.50 \| \| 59 \| 2.12 \| -3.60 \| \| \| \| -1.30 \| 0.32 \| -0.47 \| \| 60 \| 4.24 \| -3.60 \| \| \| \| -0.17 \| 0.98 \| -0.36 \| \| 61 \| 6.36 \| -3.60 \| \| \| \| 0.50 \| 0.40 \| 0.13 \| \| 62 \| 8.48 \| -3.60 \| \| \| \| 1.16 \| 1.05 \| -0.56 \| \| 63 \| 10.60 \| -3.60 \| \| \| \| 2.45 \| 0.81 \| -0.51 \| \| 64 \| 12.72 \| -3.60 \| \| \| \| 2.90 \| 1.32 \| -0.42 \| +----+--------+-------+------+------+------+-------+-------+-------+ +----+--------+-------+-------+-------+-------+-------+-------+-------+ \| \| X \| Y \| Z8 \| Z9 \| Z10 \| Z11 \| Z12 \| Z13 \| \| \| [mm] \| [mm] \| [nm] \| [nm] \| [nm] \| [nm] \| [nm] \| [nm] \| +====+========+=======+=======+=======+=======+=======+=======+=======+ \| 0 \| -12.72 \| 3.60 \| -0.59 \| 0.71 \| 0.36 \| 2.18 \| 1.30 \| -0.61 \| \| 1 \| -10.60 \| 3.60 \| -0.19 \| 0.51 \| 0.77 \| 1.18 \| 1.58 \| -0.14 \| \| 2 \| -8.48 \| 3.60 \| 0.66 \| 0.03 \| -0.00 \| 0.58 \| 1.94 \| 0.37 \| \| 3 \| -6.36 \| 3.60 \| 0.89 \| -0.71 \| -0.46 \| 0.16 \| 1.98 \| 1.48 \| \| 4 \| -4.24 \| 3.60 \| 0.44 \| -0.30 \| -0.16 \| -0.86 \| 3.33 \| 0.64 \| \| 5 \| -2.12 \| 3.60 \| 0.57 \| -0.07 \| 0.07 \| -1.10 \| 3.43 \| 0.40 \| \| 6 \| -0.00 \| 3.60 \| 0.41 \| -0.23 \| -0.05 \| -0.95 \| 2.90 \| 0.23 \| \| 7 \| 2.12 \| 3.60 \| 0.27 \| -0.06 \| 0.03 \| -1.46 \| 3.35 \| -0.12 \| \| 8 \| 4.24 \| 3.60 \| 0.37 \| -0.03 \| 0.60 \| -1.48 \| 3.43 \| -1.07 \| \| 9 \| 6.36 \| 3.60 \| 0.96 \| -0.22 \| 0.33 \| -0.99 \| 2.63 \| -1.66 \| \| 10 \| 8.48 \| 3.60 \| 0.79 \| 0.43 \| -0.06 \| -1.18 \| 2.70 \| -1.77 \| \| 11 \| 10.60 \| 3.60 \| 0.50 \| 0.72 \| 0.09 \| -0.81 \| 2.64 \| -1.38 \| \| 12 \| 12.72 \| 3.60 \| 0.15 \| 0.42 \| 1.00 \| -0.74 \| 2.77 \| -0.95 \| \| 13 \| -12.72 \| 1.80 \| 1.17 \| 0.80 \| -0.16 \| 0.41 \| 0.93 \| 0.26 \| \| 14 \| -10.60 \| 1.80 \| 0.45 \| 0.22 \| 1.03 \| 0.28 \| 1.26 \| 0.68 \| \| 15 \| -8.48 \| 1.80 \| 0.19 \| -0.32 \| 0.72 \| 0.08 \| 1.75 \| -0.10 \| \| 16 \| -6.36 \| 1.80 \| 0.57 \| -1.04 \| 0.43 \| -0.66 \| 1.49 \| 0.53 \| \| 17 \| -4.24 \| 1.80 \| 0.87 \| -0.47 \| 0.19 \| -0.78 \| 3.25 \| 0.28 \| \| 18 \| -2.12 \| 1.80 \| 0.86 \| -0.58 \| 0.35 \| -1.29 \| 3.92 \| -0.14 \| \| 19 \| -0.00 \| 1.80 \| 0.63 \| -1.01 \| 0.02 \| -1.78 \| 3.75 \| 0.05 \| \| 20 \| 2.12 \| 1.80 \| 1.21 \| -0.46 \| -0.75 \| -1.61 \| 3.93 \| -0.37 \| \| 21 \| 4.24 \| 1.80 \| 1.31 \| -0.19 \| -0.01 \| -1.16 \| 3.66 \| -0.63 \| \| 22 \| 6.36 \| 1.80 \| 0.76 \| -0.55 \| -0.22 \| -1.11 \| 1.95 \| -1.37 \| \| 23 \| 8.48 \| 1.80 \| 0.30 \| 0.16 \| -0.60 \| -0.94 \| 2.55 \| -1.02 \| \| 24 \| 10.60 \| 1.80 \| 1.06 \| 0.40 \| -0.58 \| -0.25 \| 2.48 \| -0.88 \| \| 25 \| 12.72 \| 1.80 \| 0.56 \| 0.41 \| 0.43 \| -0.20 \| 2.53 \| -0.60 \| \| 26 \| -12.72 \| -0.00 \| 1.09 \| 0.62 \| -1.75 \| -0.38 \| 1.05 \| 0.28 \| \| 27 \| -10.60 \| -0.00 \| 0.82 \| 0.57 \| -0.24 \| -0.13 \| 0.75 \| -0.03 \| \| 28 \| -8.48 \| -0.00 \| 0.17 \| -0.21 \| 0.87 \| -0.49 \| 1.20 \| 0.38 \| \| 29 \| -6.36 \| -0.00 \| -0.01 \| -0.96 \| 0.93 \| -0.94 \| 0.88 \| -0.27 \| \| 30 \| -4.24 \| -0.00 \| 0.02 \| -0.55 \| 0.42 \| -0.53 \| 2.83 \| -0.13 \| \| 31 \| -2.12 \| -0.00 \| -0.20 \| -0.77 \| -0.00 \| -0.83 \| 3.19 \| 0.14 \| \| 32 \| -0.00 \| -0.00 \| 0.01 \| -0.74 \| -0.02 \| -0.74 \| 3.62 \| -0.23 \| \| 33 \| 2.12 \| -0.00 \| 0.14 \| -0.64 \| -0.25 \| -1.04 \| 3.43 \| -0.89 \| \| 34 \| 4.24 \| -0.00 \| 0.35 \| -0.33 \| -0.49 \| -0.81 \| 3.30 \| -0.99 \| \| 35 \| 6.36 \| -0.00 \| 0.45 \| -0.52 \| -1.03 \| -0.83 \| 1.49 \| -0.53 \| \| 36 \| 8.48 \| -0.00 \| 0.23 \| 0.17 \| -0.87 \| -0.65 \| 2.00 \| -0.25 \| \| 37 \| 10.60 \| -0.00 \| 0.75 \| 0.55 \| -0.89 \| 0.00 \| 1.36 \| -0.63 \| \| 38 \| 12.72 \| -0.00 \| 0.85 \| 0.83 \| -0.02 \| 0.77 \| 1.71 \| -1.13 \| \| 39 \| -12.72 \| -1.80 \| 0.10 \| 0.80 \| -1.58 \| 0.31 \| 1.04 \| 0.13 \| \| 40 \| -10.60 \| -1.80 \| 0.13 \| 0.39 \| -0.35 \| 0.84 \| 0.74 \| 0.20 \| \| 41 \| -8.48 \| -1.80 \| -0.49 \| 0.08 \| 0.14 \| 0.10 \| 0.74 \| -0.20 \| \| 42 \| -6.36 \| -1.80 \| -1.04 \| -0.90 \| 0.08 \| -0.46 \| 0.45 \| -0.91 \| \| 43 \| -4.24 \| -1.80 \| -1.45 \| -0.48 \| -0.32 \| -0.05 \| 2.25 \| -0.65 \| \| 44 \| -2.12 \| -1.80 \| -1.38 \| -0.21 \| 0.16 \| 0.48 \| 2.62 \| 0.29 \| \| 45 \| -0.00 \| -1.80 \| -1.16 \| -0.40 \| 0.38 \| 0.50 \| 3.15 \| -0.46 \| \| 46 \| 2.12 \| -1.80 \| -1.61 \| -0.18 \| -0.47 \| -0.09 \| 3.21 \| -0.94 \| \| 47 \| 4.24 \| -1.80 \| -1.26 \| -0.41 \| -0.08 \| -0.16 \| 2.82 \| -0.71 \| \| 48 \| 6.36 \| -1.80 \| -0.63 \| -0.76 \| -0.58 \| -0.04 \| 1.43 \| -0.04 \| \| 49 \| 8.48 \| -1.80 \| -0.04 \| -0.01 \| -1.29 \| -0.51 \| 1.96 \| -0.66 \| \| 50 \| 10.60 \| -1.80 \| 0.50 \| 0.69 \| -1.42 \| 0.04 \| 1.08 \| -0.31 \| \| 51 \| 12.72 \| -1.80 \| 1.05 \| 0.95 \| -0.31 \| 0.89 \| 1.05 \| -0.98 \| \| 52 \| -12.72 \| -3.60 \| -0.14 \| 0.88 \| -1.70 \| -0.92 \| 0.40 \| -0.35 \| \| 53 \| -10.60 \| -3.60 \| -0.37 \| 1.13 \| -0.83 \| 0.35 \| -0.29 \| -0.54 \| \| 54 \| -8.48 \| -3.60 \| -1.27 \| 0.61 \| -0.65 \| 0.41 \| -0.04 \| -0.39 \| \| 55 \| -6.36 \| -3.60 \| -2.46 \| -0.15 \| -0.54 \| -0.18 \| 0.50 \| -0.84 \| \| 56 \| -4.24 \| -3.60 \| -1.99 \| -0.12 \| -0.76 \| 0.76 \| 1.61 \| -1.32 \| \| 57 \| -2.12 \| -3.60 \| -1.98 \| 0.16 \| -0.28 \| 1.00 \| 2.02 \| -0.82 \| \| 58 \| -0.00 \| -3.60 \| -1.39 \| 0.39 \| -0.08 \| 0.87 \| 1.98 \| -0.45 \| \| 59 \| 2.12 \| -3.60 \| -1.54 \| 0.42 \| 0.20 \| 0.61 \| 2.56 \| -0.18 \| \| 60 \| 4.24 \| -3.60 \| -1.34 \| -0.07 \| 0.62 \| 0.90 \| 2.24 \| -0.04 \| \| 61 \| 6.36 \| -3.60 \| -1.84 \| -0.17 \| 0.78 \| 0.07 \| 1.55 \| 0.37 \| \| 62 \| 8.48 \| -3.60 \| -1.08 \| 0.50 \| -0.24 \| 0.17 \| 1.54 \| -0.18 \| \| 63 \| 10.60 \| -3.60 \| 0.61 \| 0.97 \| -0.76 \| 0.17 \| 1.04 \| -0.74 \| \| 64 \| 12.72 \| -3.60 \| 1.72 \| 1.30 \| -0.67 \| 0.14 \| 1.06 \| -1.73 \| +----+--------+-------+-------+-------+-------+-------+-------+-------+ +----+--------+-------+-------+-------+-------+-------+-------+-------+ \| \| X \| Y \| Z14 \| Z15 \| Z16 \| Z17 \| Z18 \| Z19 \| \| \| [mm] \| [mm] \| [nm] \| [nm] \| [nm] \| [nm] \| [nm] \| [nm] \| +====+========+=======+=======+=======+=======+=======+=======+=======+ \| 0 \| -12.72 \| 3.60 \| 1.03 \| -0.17 \| 1.17 \| -2.59 \| 0.86 \| 1.36 \| \| 1 \| -10.60 \| 3.60 \| 0.39 \| -0.11 \| 0.60 \| -2.59 \| 1.32 \| 0.51 \| \| 2 \| -8.48 \| 3.60 \| 0.30 \| -1.14 \| 0.43 \| -2.70 \| 1.00 \| 0.63 \| \| 3 \| -6.36 \| 3.60 \| -0.13 \| -1.00 \| 0.55 \| -3.34 \| 0.48 \| 0.11 \| \| 4 \| -4.24 \| 3.60 \| -1.33 \| -0.49 \| 0.03 \| -2.54 \| 0.77 \| 0.08 \| \| 5 \| -2.12 \| 3.60 \| -0.86 \| -0.05 \| -0.64 \| -2.68 \| 0.15 \| 0.39 \| \| 6 \| -0.00 \| 3.60 \| -0.32 \| 0.07 \| -1.00 \| -2.38 \| -0.32 \| -0.13 \| \| 7 \| 2.12 \| 3.60 \| 0.66 \| -0.02 \| -0.96 \| -1.96 \| -0.84 \| -0.71 \| \| 8 \| 4.24 \| 3.60 \| 1.13 \| 0.15 \| -0.63 \| -1.78 \| -1.13 \| -0.33 \| \| 9 \| 6.36 \| 3.60 \| 0.50 \| -0.44 \| 0.09 \| -2.16 \| -0.26 \| -0.41 \| \| 10 \| 8.48 \| 3.60 \| 0.19 \| -0.73 \| -0.35 \| -1.76 \| -0.17 \| -0.28 \| \| 11 \| 10.60 \| 3.60 \| 0.33 \| -0.40 \| -0.25 \| -1.57 \| 0.09 \| -0.03 \| \| 12 \| 12.72 \| 3.60 \| -0.86 \| -0.01 \| 0.05 \| -1.39 \| 0.37 \| -1.11 \| \| 13 \| -12.72 \| 1.80 \| 1.21 \| -0.12 \| 0.80 \| -2.80 \| 0.48 \| 0.70 \| \| 14 \| -10.60 \| 1.80 \| 0.94 \| -0.29 \| 0.33 \| -2.63 \| 0.56 \| -0.68 \| \| 15 \| -8.48 \| 1.80 \| 0.79 \| -0.17 \| 0.59 \| -2.51 \| 0.45 \| 0.15 \| \| 16 \| -6.36 \| 1.80 \| -0.67 \| -0.52 \| 0.44 \| -3.41 \| 1.05 \| 0.63 \| \| 17 \| -4.24 \| 1.80 \| -1.36 \| -0.30 \| -0.49 \| -3.25 \| 0.71 \| -0.30 \| \| 18 \| -2.12 \| 1.80 \| -0.99 \| -0.43 \| -1.33 \| -3.18 \| 0.42 \| -0.20 \| \| 19 \| -0.00 \| 1.80 \| -0.45 \| -0.04 \| -1.68 \| -2.94 \| -0.14 \| -0.18 \| \| 20 \| 2.12 \| 1.80 \| 0.30 \| 0.06 \| -1.71 \| -2.86 \| -0.46 \| 0.02 \| \| 21 \| 4.24 \| 1.80 \| 1.34 \| 0.07 \| -0.86 \| -2.78 \| -1.08 \| 0.21 \| \| 22 \| 6.36 \| 1.80 \| 0.90 \| 0.07 \| -0.32 \| -3.16 \| -1.01 \| -0.34 \| \| 23 \| 8.48 \| 1.80 \| 0.37 \| -0.08 \| -0.47 \| -2.11 \| 0.11 \| -0.17 \| \| 24 \| 10.60 \| 1.80 \| 0.20 \| -0.17 \| -0.50 \| -1.99 \| -0.00 \| 0.43 \| \| 25 \| 12.72 \| 1.80 \| -1.13 \| 0.19 \| -0.27 \| -2.27 \| 0.34 \| -0.33 \| \| 26 \| -12.72 \| -0.00 \| 1.36 \| -0.17 \| 0.96 \| -2.20 \| 0.14 \| 0.76 \| \| 27 \| -10.60 \| -0.00 \| 0.36 \| 0.21 \| 0.71 \| -2.75 \| 0.14 \| -0.49 \| \| 28 \| -8.48 \| -0.00 \| 0.78 \| 0.51 \| 0.70 \| -1.97 \| 0.35 \| 0.21 \| \| 29 \| -6.36 \| -0.00 \| -0.89 \| 0.42 \| 0.37 \| -3.21 \| -0.13 \| 0.45 \| \| 30 \| -4.24 \| -0.00 \| -1.41 \| 0.15 \| -0.67 \| -2.88 \| 0.04 \| -0.28 \| \| 31 \| -2.12 \| -0.00 \| -0.98 \| 0.33 \| -1.39 \| -2.46 \| 0.15 \| -0.14 \| \| 32 \| -0.00 \| -0.00 \| -0.38 \| 0.37 \| -2.03 \| -2.89 \| 0.19 \| -0.19 \| \| 33 \| 2.12 \| -0.00 \| 0.27 \| 0.53 \| -1.69 \| -2.40 \| -0.07 \| 0.17 \| \| 34 \| 4.24 \| -0.00 \| 1.08 \| 0.44 \| -0.85 \| -2.66 \| 0.03 \| 0.56 \| \| 35 \| 6.36 \| -0.00 \| 1.03 \| 0.43 \| -0.07 \| -2.80 \| 0.04 \| -0.20 \| \| 36 \| 8.48 \| -0.00 \| 0.18 \| 0.36 \| 0.28 \| -1.87 \| 0.06 \| 0.04 \| \| 37 \| 10.60 \| -0.00 \| 0.25 \| 0.83 \| 0.06 \| -1.94 \| 0.44 \| 0.60 \| \| 38 \| 12.72 \| -0.00 \| -0.59 \| 0.45 \| -0.13 \| -2.40 \| 0.54 \| -0.49 \| \| 39 \| -12.72 \| -1.80 \| 1.38 \| 0.43 \| 1.02 \| -1.64 \| 0.15 \| 1.22 \| \| 40 \| -10.60 \| -1.80 \| -0.10 \| 0.59 \| 0.75 \| -2.01 \| -0.24 \| -0.16 \| \| 41 \| -8.48 \| -1.80 \| 0.27 \| 0.63 \| 0.76 \| -2.08 \| 0.30 \| 0.53 \| \| 42 \| -6.36 \| -1.80 \| -0.44 \| 0.51 \| 0.70 \| -2.30 \| -0.72 \| 0.29 \| \| 43 \| -4.24 \| -1.80 \| -1.65 \| 0.13 \| -0.19 \| -1.65 \| -0.98 \| 0.28 \| \| 44 \| -2.12 \| -1.80 \| -1.31 \| 0.29 \| -1.07 \| -2.24 \| -0.03 \| 0.05 \| \| 45 \| -0.00 \| -1.80 \| -0.59 \| 0.42 \| -1.43 \| -2.40 \| 0.25 \| -0.14 \| \| 46 \| 2.12 \| -1.80 \| 0.66 \| 0.45 \| -1.40 \| -2.15 \| -0.18 \| -0.07 \| \| 47 \| 4.24 \| -1.80 \| 1.36 \| 0.27 \| -0.47 \| -1.89 \| 0.55 \| -0.14 \| \| 48 \| 6.36 \| -1.80 \| 0.64 \| 0.70 \| 0.30 \| -2.28 \| 1.12 \| -0.58 \| \| 49 \| 8.48 \| -1.80 \| 0.20 \| 0.62 \| 0.35 \| -1.43 \| 0.85 \| 0.24 \| \| 50 \| 10.60 \| -1.80 \| -0.12 \| 0.47 \| 0.13 \| -1.90 \| 1.04 \| 0.80 \| \| 51 \| 12.72 \| -1.80 \| -0.24 \| 0.17 \| -0.02 \| -1.94 \| 0.98 \| -1.19 \| \| 52 \| -12.72 \| -3.60 \| 1.01 \| -0.10 \| 1.29 \| 0.09 \| -0.43 \| 2.14 \| \| 53 \| -10.60 \| -3.60 \| -0.42 \| 0.18 \| 0.84 \| -1.04 \| -0.90 \| 0.45 \| \| 54 \| -8.48 \| -3.60 \| 0.04 \| 0.41 \| 0.72 \| -1.75 \| 0.00 \| 0.27 \| \| 55 \| -6.36 \| -3.60 \| 0.06 \| 0.39 \| 0.94 \| -1.46 \| -0.03 \| 0.33 \| \| 56 \| -4.24 \| -3.60 \| -1.05 \| -0.31 \| -0.04 \| -0.77 \| -0.79 \| 0.29 \| \| 57 \| -2.12 \| -3.60 \| -1.40 \| -0.97 \| -0.43 \| -1.13 \| -0.20 \| 0.62 \| \| 58 \| -0.00 \| -3.60 \| -0.73 \| -1.07 \| -0.73 \| -1.61 \| 0.06 \| -0.11 \| \| 59 \| 2.12 \| -3.60 \| 0.68 \| -0.74 \| -0.68 \| -0.98 \| -0.22 \| -0.48 \| \| 60 \| 4.24 \| -3.60 \| 1.11 \| -0.35 \| -0.05 \| -0.63 \| 0.15 \| -0.27 \| \| 61 \| 6.36 \| -3.60 \| 0.08 \| 0.23 \| 0.40 \| -1.84 \| 0.62 \| -0.30 \| \| 62 \| 8.48 \| -3.60 \| 0.61 \| 0.26 \| 0.26 \| -1.40 \| 1.38 \| -0.31 \| \| 63 \| 10.60 \| -3.60 \| 0.74 \| -0.30 \| 0.29 \| -1.48 \| 1.37 \| -0.44 \| \| 64 \| 12.72 \| -3.60 \| -0.27 \| 0.10 \| 0.27 \| -1.71 \| 1.25 \| -1.20 \| +----+--------+-------+-------+-------+-------+-------+-------+-------+ +----+--------+-------+-------+-------+-------+-------+-------+-------+ \| \| X \| Y \| Z20 \| Z21 \| Z22 \| Z23 \| Z24 \| Z25 \| \| \| [mm] \| [mm] \| [nm] \| [nm] \| [nm] \| [nm] \| [nm] \| [nm] \| +====+========+=======+=======+=======+=======+=======+=======+=======+ \| 0 \| -12.72 \| 3.60 \| -0.96 \| 0.42 \| -1.73 \| 1.22 \| -0.28 \| -0.42 \| \| 1 \| -10.60 \| 3.60 \| 0.31 \| 0.44 \| -1.78 \| 1.23 \| 0.17 \| -1.26 \| \| 2 \| -8.48 \| 3.60 \| 0.28 \| 0.71 \| -2.40 \| 0.42 \| 0.24 \| -1.02 \| \| 3 \| -6.36 \| 3.60 \| -0.25 \| 0.65 \| -2.95 \| 0.84 \| 0.69 \| -0.34 \| \| 4 \| -4.24 \| 3.60 \| 0.29 \| -0.50 \| -2.68 \| 0.29 \| 0.60 \| 0.34 \| \| 5 \| -2.12 \| 3.60 \| 0.69 \| -1.53 \| -2.00 \| 1.00 \| 0.26 \| 0.70 \| \| 6 \| -0.00 \| 3.60 \| 0.67 \| -2.25 \| -0.53 \| 0.76 \| -0.12 \| 1.26 \| \| 7 \| 2.12 \| 3.60 \| 0.66 \| -1.76 \| 0.83 \| 0.74 \| -0.18 \| 0.80 \| \| 8 \| 4.24 \| 3.60 \| 0.69 \| -0.44 \| 1.38 \| 1.05 \| -0.07 \| 0.50 \| \| 9 \| 6.36 \| 3.60 \| -0.24 \| 0.76 \| 2.25 \| 0.79 \| -0.47 \| -0.05 \| \| 10 \| 8.48 \| 3.60 \| 0.02 \| 0.66 \| 1.73 \| -0.09 \| -0.43 \| -0.83 \| \| 11 \| 10.60 \| 3.60 \| 0.18 \| 0.15 \| 0.86 \| -0.48 \| -0.35 \| -0.84 \| \| 12 \| 12.72 \| 3.60 \| -1.04 \| 0.49 \| 0.55 \| -0.57 \| -0.36 \| -0.21 \| \| 13 \| -12.72 \| 1.80 \| -0.23 \| 1.00 \| -1.17 \| 1.32 \| -0.10 \| -0.63 \| \| 14 \| -10.60 \| 1.80 \| -0.02 \| 1.29 \| -1.06 \| 1.07 \| -0.03 \| -1.28 \| \| 15 \| -8.48 \| 1.80 \| 0.31 \| 1.71 \| -1.60 \| 0.37 \| -0.16 \| -0.90 \| \| 16 \| -6.36 \| 1.80 \| -0.06 \| 1.98 \| -2.09 \| 0.71 \| -0.18 \| -0.38 \| \| 17 \| -4.24 \| 1.80 \| 0.42 \| 0.50 \| -1.89 \| 0.73 \| -0.07 \| 0.37 \| \| 18 \| -2.12 \| 1.80 \| 0.23 \| -0.45 \| -0.84 \| 0.87 \| -0.36 \| 1.03 \| \| 19 \| -0.00 \| 1.80 \| 0.57 \| -1.06 \| -0.31 \| 0.95 \| -0.03 \| 1.52 \| \| 20 \| 2.12 \| 1.80 \| 0.62 \| -0.44 \| -0.03 \| 0.86 \| -0.59 \| 1.24 \| \| 21 \| 4.24 \| 1.80 \| 0.40 \| 0.68 \| 0.98 \| 1.02 \| -0.68 \| 0.47 \| \| 22 \| 6.36 \| 1.80 \| -0.23 \| 2.00 \| 1.19 \| 0.65 \| -0.53 \| -0.14 \| \| 23 \| 8.48 \| 1.80 \| -0.01 \| 1.87 \| 0.99 \| 0.45 \| -0.87 \| -0.86 \| \| 24 \| 10.60 \| 1.80 \| -0.09 \| 1.23 \| -0.48 \| -0.68 \| -0.86 \| -1.22 \| \| 25 \| 12.72 \| 1.80 \| -0.21 \| 0.78 \| 0.19 \| -0.32 \| -0.56 \| -0.62 \| \| 26 \| -12.72 \| -0.00 \| -0.51 \| 1.20 \| 0.33 \| 1.71 \| 0.17 \| -0.96 \| \| 27 \| -10.60 \| -0.00 \| -0.29 \| 1.30 \| -0.58 \| 1.01 \| -0.24 \| -1.56 \| \| 28 \| -8.48 \| -0.00 \| 0.29 \| 1.60 \| -0.62 \| 0.45 \| -0.61 \| -1.17 \| \| 29 \| -6.36 \| -0.00 \| -0.26 \| 1.95 \| -0.46 \| 0.59 \| -0.24 \| -0.32 \| \| 30 \| -4.24 \| -0.00 \| -0.71 \| 0.64 \| -0.39 \| 0.72 \| -0.27 \| 0.32 \| \| 31 \| -2.12 \| -0.00 \| -0.56 \| -0.34 \| -0.43 \| 0.82 \| -0.30 \| 1.16 \| \| 32 \| -0.00 \| -0.00 \| -0.22 \| -0.78 \| -0.36 \| 1.18 \| -0.40 \| 1.34 \| \| 33 \| 2.12 \| -0.00 \| -0.36 \| -0.75 \| -0.17 \| 1.05 \| -0.17 \| 1.24 \| \| 34 \| 4.24 \| -0.00 \| -0.37 \| 0.75 \| -0.19 \| 0.89 \| -0.08 \| 0.62 \| \| 35 \| 6.36 \| -0.00 \| -0.18 \| 1.67 \| -0.30 \| 0.51 \| -0.25 \| 0.07 \| \| 36 \| 8.48 \| -0.00 \| -0.42 \| 1.50 \| -0.45 \| 0.60 \| -0.00 \| -0.94 \| \| 37 \| 10.60 \| -0.00 \| -0.53 \| 0.87 \| -0.67 \| -0.48 \| -0.00 \| -1.37 \| \| 38 \| 12.72 \| -0.00 \| -0.19 \| 0.35 \| -0.45 \| -0.80 \| -0.46 \| -1.05 \| \| 39 \| -12.72 \| -1.80 \| -0.57 \| 0.43 \| 0.56 \| 1.13 \| 0.52 \| -0.97 \| \| 40 \| -10.60 \| -1.80 \| -0.82 \| 0.68 \| 0.22 \| 1.77 \| 0.12 \| -1.40 \| \| 41 \| -8.48 \| -1.80 \| -0.14 \| 1.00 \| 0.77 \| 0.17 \| 0.20 \| -1.25 \| \| 42 \| -6.36 \| -1.80 \| 0.27 \| 1.25 \| 1.04 \| 0.47 \| -0.14 \| -0.39 \| \| 43 \| -4.24 \| -1.80 \| -0.86 \| -0.11 \| 0.89 \| 0.78 \| 0.06 \| 0.34 \| \| 44 \| -2.12 \| -1.80 \| -1.06 \| -0.92 \| 0.31 \| 0.85 \| 0.30 \| 1.01 \| \| 45 \| -0.00 \| -1.80 \| -0.90 \| -1.26 \| -0.61 \| 1.03 \| -0.18 \| 1.58 \| \| 46 \| 2.12 \| -1.80 \| -0.93 \| -1.28 \| -0.59 \| 0.68 \| 0.50 \| 1.13 \| \| 47 \| 4.24 \| -1.80 \| -1.34 \| -0.42 \| -1.74 \| 1.03 \| 0.14 \| 0.47 \| \| 48 \| 6.36 \| -1.80 \| -0.33 \| 0.71 \| -2.05 \| 0.70 \| 0.34 \| -0.01 \| \| 49 \| 8.48 \| -1.80 \| -0.26 \| 0.91 \| -1.36 \| 0.89 \| 0.34 \| -0.66 \| \| 50 \| 10.60 \| -1.80 \| -0.25 \| 0.66 \| -1.09 \| -0.08 \| 0.35 \| -1.41 \| \| 51 \| 12.72 \| -1.80 \| -0.15 \| 0.20 \| -1.56 \| -0.81 \| 0.15 \| -0.71 \| \| 52 \| -12.72 \| -3.60 \| 0.03 \| 0.38 \| 0.83 \| 1.62 \| 0.43 \| -0.60 \| \| 53 \| -10.60 \| -3.60 \| -0.88 \| 0.06 \| 1.27 \| 1.38 \| 0.39 \| -1.21 \| \| 54 \| -8.48 \| -3.60 \| -0.55 \| 0.30 \| 1.64 \| 0.49 \| 0.17 \| -1.13 \| \| 55 \| -6.36 \| -3.60 \| 0.80 \| -0.07 \| 1.96 \| 0.25 \| 0.14 \| -0.27 \| \| 56 \| -4.24 \| -3.60 \| 0.05 \| -1.30 \| 1.93 \| 0.64 \| -0.21 \| 0.35 \| \| 57 \| -2.12 \| -3.60 \| -0.53 \| -1.91 \| 1.32 \| 0.54 \| -0.11 \| 0.37 \| \| 58 \| -0.00 \| -3.60 \| -0.53 \| -2.50 \| -0.14 \| 0.90 \| 0.33 \| 0.83 \| \| 59 \| 2.12 \| -3.60 \| -0.82 \| -2.12 \| -1.92 \| 0.59 \| 0.21 \| 0.60 \| \| 60 \| 4.24 \| -3.60 \| -0.51 \| -1.22 \| -2.53 \| 1.08 \| -0.02 \| 0.28 \| \| 61 \| 6.36 \| -3.60 \| 0.47 \| -0.30 \| -2.96 \| 0.56 \| 0.25 \| -0.29 \| \| 62 \| 8.48 \| -3.60 \| 0.25 \| -0.09 \| -2.25 \| 0.54 \| 0.24 \| -0.78 \| \| 63 \| 10.60 \| -3.60 \| -0.31 \| 0.06 \| -1.17 \| -0.41 \| 0.76 \| -1.15 \| \| 64 \| 12.72 \| -3.60 \| 0.81 \| -0.46 \| -1.37 \| -0.27 \| 0.70 \| -0.13 \| +----+--------+-------+-------+-------+-------+-------+-------+-------+ +----+--------+-------+-------+-------+------+-------+-------+-------+ \| \| X \| Y \| Z26 \| Z27 \| Z28 \| Z29 \| Z30 \| Z31 \| \| \| [mm] \| [mm] \| [nm] \| [nm] \| [nm] \| [nm] \| [nm] \| [nm] \| +====+========+=======+=======+=======+======+=======+=======+=======+ \| 0 \| -12.72 \| 3.60 \| -0.28 \| -0.89 \| 1.44 \| -0.19 \| 1.38 \| -1.18 \| \| 1 \| -10.60 \| 3.60 \| -0.45 \| -0.17 \| 1.33 \| 0.62 \| 0.53 \| -0.26 \| \| 2 \| -8.48 \| 3.60 \| 0.20 \| 0.79 \| 1.78 \| 0.71 \| 0.02 \| 0.11 \| \| 3 \| -6.36 \| 3.60 \| -0.12 \| -0.19 \| 2.16 \| 0.79 \| 0.31 \| 0.12 \| \| 4 \| -4.24 \| 3.60 \| 0.05 \| -0.65 \| 1.94 \| 0.31 \| 0.33 \| -0.25 \| \| 5 \| -2.12 \| 3.60 \| 0.18 \| -0.54 \| 2.14 \| -0.03 \| 0.54 \| -0.28 \| \| 6 \| -0.00 \| 3.60 \| -0.00 \| -0.41 \| 2.04 \| 0.04 \| 0.40 \| -0.37 \| \| 7 \| 2.12 \| 3.60 \| 0.09 \| -0.35 \| 1.97 \| 0.52 \| 0.03 \| -0.25 \| \| 8 \| 4.24 \| 3.60 \| 0.32 \| -0.29 \| 2.13 \| 0.21 \| 0.03 \| 0.05 \| \| 9 \| 6.36 \| 3.60 \| 0.27 \| -0.29 \| 2.13 \| -0.16 \| 0.15 \| 0.19 \| \| 10 \| 8.48 \| 3.60 \| 0.30 \| 0.57 \| 2.11 \| -0.74 \| 0.55 \| -0.15 \| \| 11 \| 10.60 \| 3.60 \| 0.35 \| 0.21 \| 1.15 \| -0.33 \| -0.31 \| -0.03 \| \| 12 \| 12.72 \| 3.60 \| -0.03 \| -0.34 \| 0.93 \| 0.25 \| -0.91 \| -1.12 \| \| 13 \| -12.72 \| 1.80 \| 0.27 \| -0.98 \| 0.94 \| 0.34 \| 1.29 \| -0.62 \| \| 14 \| -10.60 \| 1.80 \| -0.52 \| -0.31 \| 0.64 \| 0.36 \| 0.88 \| -0.18 \| \| 15 \| -8.48 \| 1.80 \| -0.13 \| 0.14 \| 0.64 \| 0.70 \| -0.10 \| -0.19 \| \| 16 \| -6.36 \| 1.80 \| 0.57 \| -0.11 \| 1.53 \| 0.25 \| -0.21 \| 0.20 \| \| 17 \| -4.24 \| 1.80 \| 0.58 \| -0.67 \| 1.41 \| -0.08 \| -0.25 \| 0.09 \| \| 18 \| -2.12 \| 1.80 \| 0.47 \| -0.80 \| 1.72 \| -0.04 \| 0.16 \| -0.17 \| \| 19 \| -0.00 \| 1.80 \| 0.08 \| -0.59 \| 1.48 \| -0.07 \| -0.13 \| -0.05 \| \| 20 \| 2.12 \| 1.80 \| -0.17 \| -0.61 \| 1.76 \| 0.13 \| -0.19 \| -0.13 \| \| 21 \| 4.24 \| 1.80 \| -0.45 \| -0.47 \| 1.51 \| 0.12 \| 0.25 \| 0.47 \| \| 22 \| 6.36 \| 1.80 \| -0.49 \| -0.28 \| 1.45 \| 0.14 \| 0.13 \| 0.64 \| \| 23 \| 8.48 \| 1.80 \| 0.22 \| 0.26 \| 0.72 \| -0.26 \| 1.01 \| 0.51 \| \| 24 \| 10.60 \| 1.80 \| 0.36 \| 0.32 \| 0.70 \| -0.37 \| 0.01 \| -0.10 \| \| 25 \| 12.72 \| 1.80 \| -0.25 \| -0.26 \| 0.74 \| 0.46 \| -0.76 \| -0.41 \| \| 26 \| -12.72 \| -0.00 \| 0.84 \| -0.69 \| 1.55 \| 0.18 \| 1.25 \| 0.15 \| \| 27 \| -10.60 \| -0.00 \| -0.43 \| -0.67 \| 0.70 \| 0.01 \| 0.63 \| -0.36 \| \| 28 \| -8.48 \| -0.00 \| -0.31 \| -0.38 \| 0.56 \| 0.26 \| -0.32 \| 0.02 \| \| 29 \| -6.36 \| -0.00 \| 0.29 \| 0.05 \| 1.37 \| -0.13 \| -0.12 \| 0.38 \| \| 30 \| -4.24 \| -0.00 \| 0.74 \| -0.03 \| 1.37 \| -0.19 \| -0.26 \| 0.14 \| \| 31 \| -2.12 \| -0.00 \| 0.70 \| -0.60 \| 1.69 \| -0.02 \| 0.32 \| 0.27 \| \| 32 \| -0.00 \| -0.00 \| 0.02 \| -0.21 \| 1.71 \| -0.09 \| -0.16 \| 0.17 \| \| 33 \| 2.12 \| -0.00 \| -0.25 \| -0.17 \| 1.71 \| -0.02 \| -0.41 \| 0.01 \| \| 34 \| 4.24 \| -0.00 \| -0.47 \| -0.30 \| 1.75 \| -0.32 \| 0.35 \| 0.22 \| \| 35 \| 6.36 \| -0.00 \| -0.83 \| 0.22 \| 1.51 \| 0.15 \| 0.13 \| 0.20 \| \| 36 \| 8.48 \| -0.00 \| -0.09 \| 0.41 \| 0.28 \| 0.51 \| 0.29 \| 0.34 \| \| 37 \| 10.60 \| -0.00 \| 0.41 \| -0.39 \| 0.78 \| 0.24 \| 0.11 \| 0.34 \| \| 38 \| 12.72 \| -0.00 \| -0.07 \| -0.11 \| 1.59 \| 0.46 \| -0.62 \| -0.26 \| \| 39 \| -12.72 \| -1.80 \| 0.53 \| -0.06 \| 1.52 \| 0.29 \| 1.03 \| 0.59 \| \| 40 \| -10.60 \| -1.80 \| -0.58 \| -0.93 \| 1.14 \| -0.33 \| 0.26 \| -0.37 \| \| 41 \| -8.48 \| -1.80 \| -0.67 \| -0.55 \| 1.03 \| -0.67 \| -0.41 \| -0.60 \| \| 42 \| -6.36 \| -1.80 \| -0.16 \| 0.56 \| 1.76 \| -0.21 \| -0.35 \| -0.52 \| \| 43 \| -4.24 \| -1.80 \| 0.66 \| 0.40 \| 1.66 \| -0.00 \| 0.08 \| -0.64 \| \| 44 \| -2.12 \| -1.80 \| 0.67 \| -0.04 \| 2.06 \| 0.20 \| -0.29 \| -0.20 \| \| 45 \| -0.00 \| -1.80 \| 0.11 \| -0.02 \| 2.00 \| -0.09 \| 0.06 \| -0.44 \| \| 46 \| 2.12 \| -1.80 \| -0.06 \| 0.25 \| 2.29 \| -0.17 \| -0.12 \| 0.13 \| \| 47 \| 4.24 \| -1.80 \| -0.33 \| 0.32 \| 2.00 \| -0.11 \| 0.15 \| -0.42 \| \| 48 \| 6.36 \| -1.80 \| -0.47 \| 0.64 \| 1.78 \| 0.35 \| 0.32 \| -0.33 \| \| 49 \| 8.48 \| -1.80 \| 0.17 \| 0.14 \| 1.08 \| 0.84 \| 0.46 \| -0.08 \| \| 50 \| 10.60 \| -1.80 \| 0.49 \| 0.15 \| 1.08 \| 0.42 \| -0.84 \| 0.01 \| \| 51 \| 12.72 \| -1.80 \| -0.07 \| 0.28 \| 1.10 \| 0.09 \| -0.59 \| 0.42 \| \| 52 \| -12.72 \| -3.60 \| -0.35 \| -0.46 \| 1.35 \| 0.76 \| 0.60 \| 1.00 \| \| 53 \| -10.60 \| -3.60 \| -0.60 \| -0.76 \| 1.43 \| 0.08 \| 0.60 \| -0.34 \| \| 54 \| -8.48 \| -3.60 \| -0.34 \| -0.33 \| 1.92 \| -1.27 \| -0.43 \| -0.81 \| \| 55 \| -6.36 \| -3.60 \| -0.30 \| 0.85 \| 1.96 \| -0.90 \| 0.14 \| -0.88 \| \| 56 \| -4.24 \| -3.60 \| -0.03 \| 0.17 \| 2.03 \| -0.13 \| 0.10 \| -0.66 \| \| 57 \| -2.12 \| -3.60 \| 0.51 \| 0.16 \| 2.33 \| 0.30 \| 0.20 \| -0.55 \| \| 58 \| -0.00 \| -3.60 \| -0.10 \| -0.03 \| 2.48 \| 0.04 \| 0.08 \| -0.08 \| \| 59 \| 2.12 \| -3.60 \| -0.01 \| 0.39 \| 2.30 \| -0.04 \| -0.36 \| -0.29 \| \| 60 \| 4.24 \| -3.60 \| 0.35 \| 0.15 \| 2.48 \| 0.36 \| -0.06 \| -0.16 \| \| 61 \| 6.36 \| -3.60 \| 0.38 \| 0.19 \| 2.14 \| 0.89 \| -0.13 \| -0.26 \| \| 62 \| 8.48 \| -3.60 \| 0.03 \| -0.47 \| 1.72 \| 0.65 \| 0.04 \| -0.28 \| \| 63 \| 10.60 \| -3.60 \| 0.35 \| 0.41 \| 1.46 \| 0.74 \| -0.85 \| -0.03 \| \| 64 \| 12.72 \| -3.60 \| 0.64 \| 0.48 \| 1.27 \| -0.61 \| -1.05 \| 0.59 \| +----+--------+-------+-------+-------+------+-------+-------+-------+ +----+--------+-------+-------+-------+-------+-------+-------+------+ \| \| X \| Y \| Z32 \| Z33 \| Z34 \| Z35 \| Z36 \| Z37 \| \| \| [mm] \| [mm] \| [nm] \| [nm] \| [nm] \| [nm] \| [nm] \| [nm] \| +====+========+=======+=======+=======+=======+=======+=======+======+ \| 0 \| -12.72 \| 3.60 \| 0.64 \| -0.02 \| 1.12 \| -0.14 \| 0.22 \| 1.58 \| \| 1 \| -10.60 \| 3.60 \| -0.55 \| 0.21 \| 1.51 \| -0.17 \| -0.16 \| 1.44 \| \| 2 \| -8.48 \| 3.60 \| -0.24 \| 0.63 \| 0.92 \| 0.35 \| -0.96 \| 1.40 \| \| 3 \| -6.36 \| 3.60 \| -0.46 \| 0.45 \| 0.27 \| -0.11 \| -0.61 \| 1.55 \| \| 4 \| -4.24 \| 3.60 \| -0.33 \| 0.39 \| 0.06 \| 0.22 \| -0.23 \| 1.71 \| \| 5 \| -2.12 \| 3.60 \| 0.05 \| 0.41 \| 0.06 \| 0.33 \| 0.10 \| 1.58 \| \| 6 \| -0.00 \| 3.60 \| 0.21 \| -0.03 \| 0.37 \| 0.28 \| 0.31 \| 1.90 \| \| 7 \| 2.12 \| 3.60 \| 0.24 \| -0.59 \| 0.89 \| 0.41 \| 0.10 \| 1.76 \| \| 8 \| 4.24 \| 3.60 \| 0.15 \| -0.17 \| 0.54 \| 0.40 \| -0.04 \| 1.30 \| \| 9 \| 6.36 \| 3.60 \| -0.12 \| -0.51 \| 0.22 \| 0.47 \| -0.24 \| 1.61 \| \| 10 \| 8.48 \| 3.60 \| -0.30 \| -0.59 \| -0.27 \| 0.19 \| -0.22 \| 1.91 \| \| 11 \| 10.60 \| 3.60 \| -0.09 \| -0.68 \| -0.66 \| -0.18 \| -0.03 \| 1.67 \| \| 12 \| 12.72 \| 3.60 \| -0.08 \| 0.11 \| -0.48 \| -0.03 \| 0.72 \| 1.91 \| \| 13 \| -12.72 \| 1.80 \| -0.16 \| -0.14 \| 1.00 \| 0.14 \| -0.11 \| 1.48 \| \| 14 \| -10.60 \| 1.80 \| -0.63 \| -0.05 \| 1.69 \| 0.15 \| -0.45 \| 1.74 \| \| 15 \| -8.48 \| 1.80 \| -0.25 \| 0.17 \| 1.33 \| 0.09 \| -0.76 \| 1.88 \| \| 16 \| -6.36 \| 1.80 \| -0.07 \| 0.06 \| 0.19 \| 0.25 \| -0.26 \| 1.48 \| \| 17 \| -4.24 \| 1.80 \| -0.13 \| 0.38 \| 0.39 \| -0.01 \| 0.01 \| 1.68 \| \| 18 \| -2.12 \| 1.80 \| -0.04 \| -0.15 \| -0.27 \| 0.37 \| 0.43 \| 2.23 \| \| 19 \| -0.00 \| 1.80 \| -0.12 \| 0.05 \| 0.47 \| 0.35 \| 0.62 \| 2.23 \| \| 20 \| 2.12 \| 1.80 \| 0.41 \| -0.01 \| 0.95 \| 0.50 \| 0.44 \| 1.99 \| \| 21 \| 4.24 \| 1.80 \| 0.03 \| -0.20 \| 0.48 \| -0.03 \| 0.28 \| 1.76 \| \| 22 \| 6.36 \| 1.80 \| 0.34 \| -0.32 \| 0.68 \| -0.21 \| 0.05 \| 1.84 \| \| 23 \| 8.48 \| 1.80 \| 0.02 \| -0.52 \| -0.52 \| -0.01 \| -0.22 \| 1.83 \| \| 24 \| 10.60 \| 1.80 \| 0.03 \| -0.26 \| -0.34 \| 0.17 \| -0.18 \| 2.06 \| \| 25 \| 12.72 \| 1.80 \| 0.10 \| -0.13 \| -0.53 \| 0.31 \| 0.46 \| 1.91 \| \| 26 \| -12.72 \| -0.00 \| 0.49 \| -0.61 \| 1.64 \| -0.07 \| -0.15 \| 1.36 \| \| 27 \| -10.60 \| -0.00 \| 0.05 \| 0.18 \| 1.17 \| -0.11 \| -0.74 \| 1.79 \| \| 28 \| -8.48 \| -0.00 \| -0.02 \| -0.09 \| 1.29 \| -0.10 \| -0.89 \| 1.82 \| \| 29 \| -6.36 \| -0.00 \| -0.18 \| -0.14 \| 0.27 \| -0.17 \| -0.68 \| 1.72 \| \| 30 \| -4.24 \| -0.00 \| 0.02 \| -0.28 \| 0.13 \| -0.27 \| -0.03 \| 1.73 \| \| 31 \| -2.12 \| -0.00 \| 0.51 \| -0.45 \| 0.00 \| -0.28 \| 0.27 \| 2.12 \| \| 32 \| -0.00 \| -0.00 \| 0.92 \| 0.13 \| 0.27 \| -0.48 \| 0.56 \| 2.83 \| \| 33 \| 2.12 \| -0.00 \| 0.63 \| -0.05 \| 1.17 \| -0.15 \| 0.17 \| 1.90 \| \| 34 \| 4.24 \| -0.00 \| 0.33 \| 0.09 \| 0.57 \| -0.47 \| 0.43 \| 1.91 \| \| 35 \| 6.36 \| -0.00 \| 0.45 \| 0.13 \| 0.42 \| -0.44 \| -0.60 \| 1.54 \| \| 36 \| 8.48 \| -0.00 \| 0.07 \| -0.26 \| -0.35 \| -0.38 \| -0.69 \| 1.72 \| \| 37 \| 10.60 \| -0.00 \| 0.28 \| -0.12 \| -0.61 \| -0.47 \| -0.63 \| 2.03 \| \| 38 \| 12.72 \| -0.00 \| 0.69 \| -0.09 \| -0.97 \| -0.26 \| 0.28 \| 1.91 \| \| 39 \| -12.72 \| -1.80 \| 0.18 \| -0.56 \| 1.53 \| 0.02 \| -0.15 \| 1.73 \| \| 40 \| -10.60 \| -1.80 \| 0.23 \| -0.27 \| 1.14 \| -0.21 \| -0.67 \| 1.91 \| \| 41 \| -8.48 \| -1.80 \| -0.07 \| -0.60 \| 1.11 \| -0.08 \| -1.09 \| 1.55 \| \| 42 \| -6.36 \| -1.80 \| 0.16 \| -0.61 \| 0.18 \| 0.03 \| -0.56 \| 1.56 \| \| 43 \| -4.24 \| -1.80 \| 0.09 \| -0.70 \| 0.37 \| -0.16 \| -0.17 \| 1.55 \| \| 44 \| -2.12 \| -1.80 \| 0.05 \| -0.34 \| 0.03 \| -0.64 \| 0.14 \| 1.79 \| \| 45 \| -0.00 \| -1.80 \| 0.14 \| -0.34 \| 0.36 \| -0.40 \| 0.47 \| 2.19 \| \| 46 \| 2.12 \| -1.80 \| 0.09 \| -0.06 \| 1.09 \| -0.36 \| 0.53 \| 1.98 \| \| 47 \| 4.24 \| -1.80 \| -0.11 \| 0.46 \| 0.47 \| -0.07 \| 0.11 \| 1.75 \| \| 48 \| 6.36 \| -1.80 \| 0.31 \| 0.36 \| 0.68 \| -0.27 \| -0.29 \| 1.46 \| \| 49 \| 8.48 \| -1.80 \| -0.05 \| 0.46 \| -0.32 \| 0.05 \| -0.47 \| 1.65 \| \| 50 \| 10.60 \| -1.80 \| 0.06 \| 0.26 \| -0.68 \| 0.07 \| -0.33 \| 2.02 \| \| 51 \| 12.72 \| -1.80 \| 0.91 \| 0.03 \| -0.90 \| 0.25 \| 0.51 \| 1.92 \| \| 52 \| -12.72 \| -3.60 \| -0.43 \| -0.14 \| 1.35 \| 0.27 \| 0.23 \| 1.65 \| \| 53 \| -10.60 \| -3.60 \| -0.23 \| -1.07 \| 1.65 \| 0.75 \| -0.53 \| 1.57 \| \| 54 \| -8.48 \| -3.60 \| -0.04 \| -1.04 \| 0.85 \| 0.48 \| -0.69 \| 1.91 \| \| 55 \| -6.36 \| -3.60 \| -0.19 \| -0.91 \| 0.50 \| 0.14 \| -0.70 \| 1.57 \| \| 56 \| -4.24 \| -3.60 \| 0.10 \| -0.53 \| 0.21 \| 0.20 \| -0.14 \| 1.47 \| \| 57 \| -2.12 \| -3.60 \| 0.32 \| -0.91 \| 0.28 \| -0.06 \| 0.12 \| 1.76 \| \| 58 \| -0.00 \| -3.60 \| 0.67 \| -0.28 \| 0.43 \| -0.26 \| 0.20 \| 1.88 \| \| 59 \| 2.12 \| -3.60 \| 0.59 \| 0.28 \| 0.97 \| -0.30 \| 0.36 \| 1.64 \| \| 60 \| 4.24 \| -3.60 \| 0.15 \| 0.21 \| 0.47 \| 0.20 \| 0.26 \| 1.61 \| \| 61 \| 6.36 \| -3.60 \| 0.14 \| 0.70 \| 0.51 \| 0.62 \| -0.28 \| 1.76 \| \| 62 \| 8.48 \| -3.60 \| 0.04 \| 0.86 \| -0.34 \| 0.39 \| -0.45 \| 1.52 \| \| 63 \| 10.60 \| -3.60 \| -0.53 \| 0.61 \| -0.87 \| 0.43 \| 0.23 \| 1.44 \| \| 64 \| 12.72 \| -3.60 \| 0.72 \| 0.46 \| -0.63 \| -0.02 \| 0.69 \| 1.71 \| +----+--------+-------+-------+-------+-------+-------+-------+------+ Operator:ASML Machine:6xxx Release:4.1.0 Date:04/01/2016 Time:13:30 Report Filename : LUPI.27 Report Path : TM/Illumination/Performance/LUPI.log/ Machine Type : 1250D Testname : ILIAS Pupil Measurement Start Time : Mon, 04 Jan 2016 13:25:59 273037us +0800 Stop Time : Mon, 04 Jan 2016 13:30:26 094390us +0800 Execution Time : 00:04:26 Test Run Result : OK Test Status : Test is Finished Results Validation : In Limits Measurement Quality : OK Comment : +----------------------+------------+-----------+----------+----------------+ \| Step \| Start Time \| Stop Time \| Status \| Execution Time \| +======================+============+===========+==========+================+ \| Initialize Drivers \| 13:25:59 \| 13:26:09 \| Finished \| 00:00:09 \| \| Prepare Machine \| 13:26:09 \| 13:27:48 \| Finished \| 00:01:38 \| \| Perform Measurements \| 13:27:48 \| 13:29:51 \| Finished \| 00:02:03 \| \| Perform Analysis \| 13:29:51 \| 13:30:25 \| Finished \| 00:00:33 \| +----------------------+------------+-----------+----------+----------------+ Scenario Inputs Selected Scenario : ATP-1 Verification Set : Final Verification Overrule Inputs : No Manual Scenario Selected : No Measurement input values Measurement mode : Static Image size : 256 x 256 Pupil Shape Illumination mode : Annular NA : 0.850 DOE ID : 15 Sigma inner : 0.690 outer : 0.930 Polarization mode : Unpolarized Start beam Beam Mode : Automatic Beam Positioning Position x : -3.000 [mm] Position y : 0.000 [mm] Pointing x : 0.450 [mRad] Pointing y : 0.000 [mRad] Beam Window Beam position control window : 300 [um] Beam pointing control window : 50 [uRad] Measurement sequence : 5x1 Auto reticle Perform measurement : Yes Perform analysis : Yes Raw data file : service_data/LU/LUPI/LUPI_RAW_m6xxx.355 Save avg pupil as picture file : No sigma correction : Yes Pupil Qualification Method : Automatic Pupil Qualification Pupil Numbers Method : Center of Gravity Method verification_type : Final Verification Average Sigma Outer minimum : 0.000 maximum : 1.000 Average Sigma Inner minimum : 0.000 maximum : 1.000 Sigma Outer Range minimum : 0.000 maximum : 1.000 Sigma Inner Range minimum : 0.000 maximum : 1.000 Deviation Sigma Outer (set - get) minimum : -1.000 maximum : 1.000 Deviation Sigma Inner (set - get) minimum : -1.000 maximum : 1.000 Average Sigma variation minimum : 0.000 maximum : 0.012 Show Ellipticity : No Average Range Sigma Inner Range minimum : 0.000 maximum : 1.000 Average Range Sigma Outer Range minimum : 0.000 maximum : 1.000 Average Ellipticity minimum : -3.000e+00 [%] maximum : 3.000 [%] Minimum Ellipticity minimum : 0.000e+00 [%] maximum : 100.000 [%] Maximum Ellipticity minimum : 0.000e+00 [%] maximum : 100.000 [%] Ellipticity Range minimum : 0.000e+00 [%] maximum : 100.000 [%] Average Ellipticity (45 deg) minimum : -1.000e+02 [%] maximum : 100.000 [%] Minimum Ellipticity (45 deg) minimum : 0.000e+00 [%] maximum : 100.000 [%] Maximum Ellipticity (45 deg) minimum : 0.000e+00 [%] maximum : 100.000 [%] Ellipticity Range (45 deg) minimum : 0.000e+00 [%] maximum : 100.000 [%] Show COG : No COG X field variation minimum : 0.0000 maximum : 1.0000 COG Y field variation minimum : 0.0000 maximum : 1.0000 Balance type : None Average Balance minimum : 0.000e+00 [%] maximum : 100.000 [%] Balance Range minimum : 0.000e+00 [%] maximum : 100.000 [%] Balance Minimum minimum : 0.000e+00 [%] maximum : 100.000 [%] Balance Maximum minimum : 0.000e+00 [%] maximum : 100.000 [%] Avg Pole Width +---+---------+---------+ \| \| minimum \| maximum \| \| \| [deg] \| [deg] \| +===+=========+=========+ \| 0 \| 0.0 \| 180.0 \| \| 1 \| 0.0 \| 180.0 \| \| 2 \| 0.0 \| 180.0 \| \| 3 \| 0.0 \| 180.0 \| +---+---------+---------+ Avg Pole Width variation +---+---------+---------+ \| \| minimum \| maximum \| \| \| [deg] \| [deg] \| +===+=========+=========+ \| 0 \| 0.0 \| 180.0 \| \| 1 \| 0.0 \| 180.0 \| \| 2 \| 0.0 \| 180.0 \| \| 3 \| 0.0 \| 180.0 \| +---+---------+---------+ Measurement Result values Picture file : Pupil data to analyse Test_identifier : LUPI Time of measurement : Mon, 04 Jan 2016 13:29:49 098907us +0800 mach_info Machine number : 6xxx Machine type : 1250D Machine architecture : XT Machine Architecture Machine specification : pep-D Specification Lightsource type : Cymer Laser: XLA 165 Illuminator type : 120 Software release : 4.1.0.c Lens number : 0122xxxx DOE data +----+--------+-------------------+----------------+------------------+ \| \| DOE ID \| Illumination mode \| DOE Table name \| DOE File version \| +====+========+===================+================+==================+ \| 0 \| 2 \| Quasar \| cQuad20 \| 2.0.1 \| \| 1 \| 15 \| Conventional \| conventional \| 2.0.1 \| \| 2 \| 14 \| Quasar \| cQuad 60 \| 2.0.1 \| \| 3 \| 18 \| Quasar \| Dipole40 Y \| 2.0.1 \| \| 4 \| 15 \| Annular \| annular \| 2.0.1 \| \| 5 \| 0 \| Conventional \| \| \| \| 6 \| 0 \| Conventional \| \| \| \| 7 \| 0 \| Conventional \| \| \| \| 8 \| 0 \| Conventional \| \| \| \| 9 \| 0 \| Conventional \| \| \| \| 10 \| 0 \| Conventional \| \| \| \| 11 \| 0 \| Conventional \| \| \| \| 12 \| 0 \| Conventional \| \| \| \| 13 \| 0 \| Conventional \| \| \| \| 14 \| 0 \| Conventional \| \| \| \| 15 \| 0 \| Conventional \| \| \| \| 16 \| 0 \| Conventional \| \| \| +----+--------+-------------------+----------------+------------------+ mach_settings Pupil shape Illumination mode : Annular NA : 0.850 DOE ID : 15 Sigma inner : 0.690 outer : 0.930 DOE Table name : annular DOE File version : 2.0.1 Actual beam position and pointing Beam Mode : Automatic Beam Positioning Position x : -2.741 [mm] Position y : -0.171 [mm] Pointing x : 0.472 [mRad] Pointing y : 0.000 [mRad] Beam Window Beam position control window : 300 [um] Beam pointing control window : 50 [uRad] VAT Compensation : No Uniformity Improvement Package mode : UIP mode on Actual Pupicom setting Mode : Automatic Angle : 0.8 [deg] Actual Unicom setting Mode : Automatic Position : 47.145 [mm] Reticle information Reticle ID : 45563154P009 Reticle chrome y-offset (WS coordinates) : 0.901 [mm] Chrome offset direction : Positive direction Number of pinholes : 5 ILIAS sensor type on chuck1 : None ILIAS sensor type on chuck 2 : Multiple scan grid Sensor used for measurement : ILIAS on chuck 2 mode : Static Values all pinholes Average Pupil Values +--------------------------+---------+---------+--------+---------+ \| \| Minimum \| Maximum \| Range \| Average \| +==========================+=========+=========+========+=========+ \| Sigma Inner [10%] \| 0.6689 \| 0.6756 \| 0.0067 \| 0.6727 \| \| Sigma Outer [90%] \| 0.9375 \| 0.9403 \| 0.0028 \| 0.9393 \| \| Ellipticity [%] \| -1.598 \| 1.385 \| 2.983 \| -0.252 \| \| Ellipticity (45 Deg) [%] \| -0.801 \| 0.464 \| 1.266 \| -0.144 \| \| Quadrant balance [%] \| 0.250 \| 2.928 \| 2.679 \| 1.417 \| \| cQuadrant balance [%] \| 0.949 \| 2.961 \| 2.012 \| 1.733 \| \| Balance X [%] \| 0.219 \| 2.528 \| 2.309 \| 1.201 \| \| Balance Y [%] \| 0.031 \| 0.289 \| 0.258 \| 0.120 \| +--------------------------+---------+---------+--------+---------+ Average Pole Information Pole 1 Pole 2 Pole 3 Pole 4 Pole 5 Pole 6 Pole 7 Pole 8 Pole group info Group 1 Group 2 Group 3 Inter Group Max. value Values per pinhole +----+-------------------------------------------+-------------------+ \| \| Pinhole position (Waferstage coordinates) \| Pupil values \| \| +-------------+-------------+---------------+-------------------+ \| \| Position X \| Position Y \| Slit y-offset \| Sigma inner [10%] \| \| \| [mm] \| [mm] \| [mm] \| \| +====+=============+=============+===============+===================+ \| 0 \| -12.72 \| -11.00 \| 0.00 \| 0.6691 \| \| 1 \| -6.36 \| -11.00 \| 0.00 \| 0.6756 \| \| 2 \| 0.00 \| -11.00 \| 0.00 \| 0.6756 \| \| 3 \| 6.36 \| -11.00 \| 0.00 \| 0.6746 \| \| 4 \| 12.72 \| -11.00 \| 0.00 \| 0.6689 \| \| 5 \| 0.00 \| 0.00 \| 0.00 \| 0.0000 \| \| 6 \| 0.00 \| 0.00 \| 0.00 \| 0.0000 \| \| 7 \| 0.00 \| 0.00 \| 0.00 \| 0.0000 \| \| 8 \| 0.00 \| 0.00 \| 0.00 \| 0.0000 \| \| 9 \| 0.00 \| 0.00 \| 0.00 \| 0.0000 \| \| 10 \| 0.00 \| 0.00 \| 0.00 \| 0.0000 \| \| 11 \| 0.00 \| 0.00 \| 0.00 \| 0.0000 \| \| 12 \| 0.00 \| 0.00 \| 0.00 \| 0.0000 \| \| 13 \| 0.00 \| 0.00 \| 0.00 \| 0.0000 \| \| 14 \| 0.00 \| 0.00 \| 0.00 \| 0.0000 \| \| 15 \| 0.00 \| 0.00 \| 0.00 \| 0.0000 \| \| 16 \| 0.00 \| 0.00 \| 0.00 \| 0.0000 \| \| 17 \| 0.00 \| 0.00 \| 0.00 \| 0.0000 \| \| 18 \| 0.00 \| 0.00 \| 0.00 \| 0.0000 \| \| 19 \| 0.00 \| 0.00 \| 0.00 \| 0.0000 \| +----+-------------+-------------+---------------+-------------------+ +----+---------------------------------------------------------------------------+ \| \| Pupil values \| \| +-------------------+-------------+----------------------+------------------+ \| \| Sigma outer [90%] \| Ellipticity \| Ellipticity (45 Deg) \| Quadrant balance \| \| \| \| [%] \| [%] \| [%] \| +====+===================+=============+======================+==================+ \| 0 \| 0.9393 \| 1.4 \| -0.8 \| 2.9 \| \| 1 \| 0.9399 \| -0.7 \| -0.3 \| 0.6 \| \| 2 \| 0.9403 \| -1.6 \| -0.1 \| 0.7 \| \| 3 \| 0.9394 \| -1.5 \| -0.0 \| 0.2 \| \| 4 \| 0.9375 \| 1.1 \| 0.5 \| 2.6 \| \| 5 \| 0.0000 \| 0.0 \| 0.0 \| 0.0 \| \| 6 \| 0.0000 \| 0.0 \| 0.0 \| 0.0 \| \| 7 \| 0.0000 \| 0.0 \| 0.0 \| 0.0 \| \| 8 \| 0.0000 \| 0.0 \| 0.0 \| 0.0 \| \| 9 \| 0.0000 \| 0.0 \| 0.0 \| 0.0 \| \| 10 \| 0.0000 \| 0.0 \| 0.0 \| 0.0 \| \| 11 \| 0.0000 \| 0.0 \| 0.0 \| 0.0 \| \| 12 \| 0.0000 \| 0.0 \| 0.0 \| 0.0 \| \| 13 \| 0.0000 \| 0.0 \| 0.0 \| 0.0 \| \| 14 \| 0.0000 \| 0.0 \| 0.0 \| 0.0 \| \| 15 \| 0.0000 \| 0.0 \| 0.0 \| 0.0 \| \| 16 \| 0.0000 \| 0.0 \| 0.0 \| 0.0 \| \| 17 \| 0.0000 \| 0.0 \| 0.0 \| 0.0 \| \| 18 \| 0.0000 \| 0.0 \| 0.0 \| 0.0 \| \| 19 \| 0.0000 \| 0.0 \| 0.0 \| 0.0 \| +----+-------------------+-------------+----------------------+------------------+ +----+----------------------------------------------------------+------------------+ \| \| Pupil values \| COG \| \| +-------------------+-----------+-----------+--------------+---------+--------+ \| \| cQuadrant balance \| Balance X \| Balance Y \| Nr. of poles \| cog X \| cog Y \| \| \| [%] \| [%] \| [%] \| \| [-] \| [-] \| +====+===================+===========+===========+==============+=========+========+ \| 0 \| 3.0 \| 2.5 \| 0.1 \| 0 \| -0.0295 \| 0.0062 \| \| 1 \| 1.0 \| 0.5 \| 0.1 \| 0 \| -0.0017 \| 0.0023 \| \| 2 \| 1.0 \| 0.4 \| 0.3 \| 0 \| 0.0014 \| 0.0037 \| \| 3 \| 0.9 \| 0.2 \| 0.0 \| 0 \| 0.0036 \| 0.0031 \| \| 4 \| 2.7 \| 2.3 \| 0.1 \| 0 \| 0.0230 \| 0.0067 \| \| 5 \| 0.0 \| 0.0 \| 0.0 \| 0 \| 0.0000 \| 0.0000 \| \| 6 \| 0.0 \| 0.0 \| 0.0 \| 0 \| 0.0000 \| 0.0000 \| \| 7 \| 0.0 \| 0.0 \| 0.0 \| 0 \| 0.0000 \| 0.0000 \| \| 8 \| 0.0 \| 0.0 \| 0.0 \| 0 \| 0.0000 \| 0.0000 \| \| 9 \| 0.0 \| 0.0 \| 0.0 \| 0 \| 0.0000 \| 0.0000 \| \| 10 \| 0.0 \| 0.0 \| 0.0 \| 0 \| 0.0000 \| 0.0000 \| \| 11 \| 0.0 \| 0.0 \| 0.0 \| 0 \| 0.0000 \| 0.0000 \| \| 12 \| 0.0 \| 0.0 \| 0.0 \| 0 \| 0.0000 \| 0.0000 \| \| 13 \| 0.0 \| 0.0 \| 0.0 \| 0 \| 0.0000 \| 0.0000 \| \| 14 \| 0.0 \| 0.0 \| 0.0 \| 0 \| 0.0000 \| 0.0000 \| \| 15 \| 0.0 \| 0.0 \| 0.0 \| 0 \| 0.0000 \| 0.0000 \| \| 16 \| 0.0 \| 0.0 \| 0.0 \| 0 \| 0.0000 \| 0.0000 \| \| 17 \| 0.0 \| 0.0 \| 0.0 \| 0 \| 0.0000 \| 0.0000 \| \| 18 \| 0.0 \| 0.0 \| 0.0 \| 0 \| 0.0000 \| 0.0000 \| \| 19 \| 0.0 \| 0.0 \| 0.0 \| 0 \| 0.0000 \| 0.0000 \| +----+-------------------+-----------+-----------+--------------+---------+--------+ +----+-----------+----------+ \| \| \| \| \| \| \| \| \| \| Nr pulses \| Dose \| \| \| \| [mJ] \| +====+===========+==========+ \| 0 \| 68 \| 29584.74 \| \| 1 \| 69 \| 29836.71 \| \| 2 \| 66 \| 28325.13 \| \| 3 \| 65 \| 28088.92 \| \| 4 \| 65 \| 28332.11 \| \| 5 \| 0 \| 0.00 \| \| 6 \| 0 \| 0.00 \| \| 7 \| 0 \| 0.00 \| \| 8 \| 0 \| 0.00 \| \| 9 \| 0 \| 0.00 \| \| 10 \| 0 \| 0.00 \| \| 11 \| 0 \| 0.00 \| \| 12 \| 0 \| 0.00 \| \| 13 \| 0 \| 0.00 \| \| 14 \| 0 \| 0.00 \| \| 15 \| 0 \| 0.00 \| \| 16 \| 0 \| 0.00 \| \| 17 \| 0 \| 0.00 \| \| 18 \| 0 \| 0.00 \| \| 19 \| 0 \| 0.00 \| +----+-----------+----------+ Pole pos. and orientation per pinhole pole_orient_matrix +----+--------+--------+--------+--------+--------+--------+--------+--------+ \| \| Pole 1 \| Pole 2 \| Pole 3 \| Pole 4 \| Pole 5 \| Pole 6 \| Pole 7 \| Pole 8 \| +====+========+========+========+========+========+========+========+========+ \| 0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 1 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 2 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 3 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 4 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 5 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 6 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 7 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 8 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 9 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 10 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 11 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 12 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 13 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 14 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 15 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 16 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 17 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 18 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 19 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 20 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 21 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 22 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 23 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 24 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 25 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 26 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| +----+--------+--------+--------+--------+--------+--------+--------+--------+ pole_width_matrix +----+--------+--------+--------+--------+--------+--------+--------+--------+ \| \| Pole 1 \| Pole 2 \| Pole 3 \| Pole 4 \| Pole 5 \| Pole 6 \| Pole 7 \| Pole 8 \| +====+========+========+========+========+========+========+========+========+ \| 0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 1 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 2 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 3 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 4 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 5 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 6 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 7 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 8 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 9 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 10 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 11 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 12 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 13 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 14 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 15 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 16 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 17 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 18 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 19 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 20 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 21 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 22 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 23 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 24 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 25 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| \| 26 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| 0.0 \| +----+--------+--------+--------+--------+--------+--------+--------+--------+ Verification Results +-------------------------+---------+---------+----------+-----------+ \| \| Minimum \| Maximum \| Measured \| In Limits \| +=========================+=========+=========+==========+===========+ \| Sigma Inner \| 0.000 \| 1.000 \| 0.673 \| Ok \| \| Sigma Outer \| 0.000 \| 1.000 \| 0.939 \| Ok \| \| Sigma Variation \| 0.000 \| 0.012 \| 0.007 \| Ok \| \| Range Sigma Inner \| 0.000 \| 1.000 \| 0.007 \| Ok \| \| Range Sigma Outer \| 0.000 \| 1.000 \| 0.003 \| Ok \| \| Average Ellipticity [%] \| -3.000 \| 3.000 \| -0.252 \| Ok \| +-------------------------+---------+---------+----------+-----------+ sigma correction pupil_shape Illumination mode : Conventional NA : 0.000 DOE ID : 0 Sigma inner : 0.000 outer : 0.000 offset inner : 0.000 outer : 0.000 Operator:ASML Machine:6xxx Release:4.1.0 Date:13/01/2016 Time:17:46 Report Filename : LUSL.99 Report Path : TM/Projection/StrayLightMonitoring/LUSL.log/ Machine Type : 1250D File name of logfile(s) : service_data/LU/LUSL/LUSL.0352.log Testname : Uniformity Stray Light Measurement Start Time : Wed, 13 Jan 2016 17:45:44 039008us +0800 Stop Time : Wed, 13 Jan 2016 17:46:49 102252us +0800 Execution Time : 00:01:05 Test Run Result : Finished Test Status : Test is Finished Results Validation : In Limits Measurement Quality : OK Comment : Scheduled execution (m-action) +----------------------+------------+-----------+----------+----------------+ \| Step \| Start Time \| Stop Time \| Status \| Execution Time \| +======================+============+===========+==========+================+ \| Initialize drivers \| 17:45:44 \| 17:45:46 \| Finished \| 00:00:02 \| \| Prepare machine \| 17:45:46 \| 17:46:12 \| Finished \| 00:00:25 \| \| Perform measurements \| 17:46:12 \| 17:46:48 \| Finished \| 00:00:36 \| \| Calculate results \| 17:46:48 \| 17:46:49 \| Finished \| 00:00:00 \| +----------------------+------------+-----------+----------+----------------+ Scenario Inputs Selected Scenario : Monitoring Verification Set : Single Verification Overrule Inputs : No Manual Scenario Selected : No Input parameters pupil_shape Illumination mode : Annular NA : 0.850 DOE ID : 15 Sigma inner : 0.690 outer : 0.930 Image Field Size X : 26.00 [mm] Image Field Size Y : 26.00 [mm] Steps in X : 11 Steps in Y : 1 No. of Pulses : 200 Pulse Frequency : 4000 Attenuator Transmission : 100 [%] spot_sensor : Non-Leading Reticle used : No REMA settings Rema use : Spot disable_BBS : No Unicom Mode : Automatic Position : 47.153 [mm] Use Nominal Pulse Frequency : Yes Verification data verification_type : Single Verification Results Machine information Machine Type : 1250D Lens number : 0122xxxx UNICOM position : 47.15 [mm] Stray light results Maximum Stray Light Value : 0.530 [%] X position : 2.588 [mm] Y position : 0.000 [mm] At (0,0) Stray Light Value : 0.516 [%] X position : -0.000 [mm] Y position : 0.000 [mm] Max. Centre-to-edge Stray Light Value : 0.252 [%] X position : -12.939 [mm] Y position : 0.000 [mm] Slit Average Stray Light Value : 0.445 [%] Y position : 0.000 [mm] Result with UNICOM at centre position UNICOM centre position : 35.1 [mm] Stray Light at (0,0) Stray Light Value : 0.571 [%] X position : 0.000 [mm] Y position : 0.000 [mm] Stray light results per point on the line y=0 +----+-------------------+------------+------------+ \| \| Stray Light Value \| X position \| Y position \| \| \| [%] \| [mm] \| [mm] \| +====+===================+============+============+ \| 0 \| 0.264 \| -12.939 \| 0.000 \| \| 1 \| 0.434 \| -10.351 \| 0.000 \| \| 2 \| 0.455 \| -7.763 \| 0.000 \| \| 3 \| 0.484 \| -5.175 \| 0.000 \| \| 4 \| 0.506 \| -2.588 \| 0.000 \| \| 5 \| 0.516 \| -0.000 \| 0.000 \| \| 6 \| 0.530 \| 2.588 \| 0.000 \| \| 7 \| 0.514 \| 5.175 \| 0.000 \| \| 8 \| 0.465 \| 7.763 \| 0.000 \| \| 9 \| 0.430 \| 10.351 \| 0.000 \| \| 10 \| 0.293 \| 12.939 \| 0.000 \| \| 11 \| 0.000 \| 0.000 \| 0.000 \| \| 12 \| 0.000 \| 0.000 \| 0.000 \| \| 13 \| 0.000 \| 0.000 \| 0.000 \| \| 14 \| 0.000 \| 0.000 \| 0.000 \| \| 15 \| 0.000 \| 0.000 \| 0.000 \| \| 16 \| 0.000 \| 0.000 \| 0.000 \| \| 17 \| 0.000 \| 0.000 \| 0.000 \| \| 18 \| 0.000 \| 0.000 \| 0.000 \| \| 19 \| 0.000 \| 0.000 \| 0.000 \| \| 20 \| 0.000 \| 0.000 \| 0.000 \| \| 21 \| 0.000 \| 0.000 \| 0.000 \| \| 22 \| 0.000 \| 0.000 \| 0.000 \| \| 23 \| 0.000 \| 0.000 \| 0.000 \| \| 24 \| 0.000 \| 0.000 \| 0.000 \| \| 25 \| 0.000 \| 0.000 \| 0.000 \| \| 26 \| 0.000 \| 0.000 \| 0.000 \| \| 27 \| 0.000 \| 0.000 \| 0.000 \| \| 28 \| 0.000 \| 0.000 \| 0.000 \| \| 29 \| 0.000 \| 0.000 \| 0.000 \| \| 30 \| 0.000 \| 0.000 \| 0.000 \| \| 31 \| 0.000 \| 0.000 \| 0.000 \| \| 32 \| 0.000 \| 0.000 \| 0.000 \| \| 33 \| 0.000 \| 0.000 \| 0.000 \| \| 34 \| 0.000 \| 0.000 \| 0.000 \| \| 35 \| 0.000 \| 0.000 \| 0.000 \| \| 36 \| 0.000 \| 0.000 \| 0.000 \| \| 37 \| 0.000 \| 0.000 \| 0.000 \| \| 38 \| 0.000 \| 0.000 \| 0.000 \| \| 39 \| 0.000 \| 0.000 \| 0.000 \| \| 40 \| 0.000 \| 0.000 \| 0.000 \| \| 41 \| 0.000 \| 0.000 \| 0.000 \| \| 42 \| 0.000 \| 0.000 \| 0.000 \| \| 43 \| 0.000 \| 0.000 \| 0.000 \| \| 44 \| 0.000 \| 0.000 \| 0.000 \| \| 45 \| 0.000 \| 0.000 \| 0.000 \| \| 46 \| 0.000 \| 0.000 \| 0.000 \| \| 47 \| 0.000 \| 0.000 \| 0.000 \| \| 48 \| 0.000 \| 0.000 \| 0.000 \| \| 49 \| 0.000 \| 0.000 \| 0.000 \| \| 50 \| 0.000 \| 0.000 \| 0.000 \| +----+-------------------+------------+------------+ Operator:ASML Machine:6xxx Release:4.1.0 Date:12/01/2016 Time:20:12 Report Filename : LUSU.65 Report Path : TM/Illumination/Performance/LUSU.log/ Machine Type : 1250D File name of logfile(s) : service_data/LU/LUSU/LUSU.1637.log Testname : Slit Uniformity Start Time : Tue, 12 Jan 2016 20:10:33 598505us +0800 Stop Time : Tue, 12 Jan 2016 20:12:51 657772us +0800 Execution Time : 00:02:18 Test Run Result : OK Test Status : Test is Finished Results Validation : In Limits Measurement Quality : OK Comment : +---------------------+------------+-----------+----------+----------------+ \| Step \| Start Time \| Stop Time \| Status \| Execution Time \| +=====================+============+===========+==========+================+ \| Initialize Drivers \| 20:10:33 \| 20:10:33 \| Finished \| 00:00:00 \| \| Prepare Machine \| 20:10:33 \| 20:10:53 \| Finished \| 00:00:19 \| \| Perform Measurement \| 20:10:53 \| 20:12:47 \| Finished \| 00:01:54 \| \| Generate Results \| 20:12:47 \| 20:12:50 \| Finished \| 00:00:03 \| +---------------------+------------+-----------+----------+----------------+ Scenario Inputs Selected Scenario : m-action Verification Set : Single Verification Overrule Inputs : No Manual Scenario Selected : No Measurement mode : Stepping Slit Uniformity X Size : 26.000 [mm] Slit Uniformity Y Size : 11.000 [mm] Field Uniformity X Size : 26.000 [mm] Field Uniformity Y Size : 7.000 [mm] Field Shift X : 0.000 [mm] Field Shift Y : 0.000 [mm] Steps in X Direction : 11 Steps in Y Direction : 51 Number of pulses : 100 Number of pre-expose pulses : 0 Attenuator transmission laser : 1.00 Pulse frequency : 4000 Use the nominal pulse frequency as pulse frequency : Yes Pupil shape Illumination mode : Annular NA : 0.850 DOE ID : 15 Sigma inner : 0.690 outer : 0.930 Polarization mode : Unpolarized Spot sensor : Leading REMA window REMA window X centre : 0.00000 [m] REMA window Y centre : 0.00000 [m] REMA window X size : 0.00000 [m] REMA window Y size : 0.00000 [m] REMA set_ps Rema use : Spot disable_BBS : No Unicom Mode : Automatic Position : 47.152 [mm] Pupicom Mode : Automatic Angle : 0.8 [deg] Beam Beam Mode : Automatic Beam Positioning Position x : -3.000 [mm] Position y : 0.000 [mm] Pointing x : 0.450 [mRad] Pointing y : 0.000 [mRad] Beam Window Beam position control window : 300 [um] Beam pointing control window : 50 [uRad] UIP on : Yes type : Single Verification slit_uniformity_limits minimum : 0.00 [%] maximum : 20.00 [%] average spot sensor light intensity limits minimum : 0.00 [mW/cm^2] maximum : 10000.00 [mW/cm^2] av_ss_light_int_1_bp_limits minimum : 0.00 [mW/cm^2] maximum : 10000.00 [mW/cm^2] av_point_ratio_limits minimum : 0.00 [%] maximum : 10.00 [%] tilt_x_limits minimum : -20.00 [%] maximum : 20.00 [%] tilt_y_limits minimum : -20.00 [%] maximum : 20.00 [%] field_uniformity_limits minimum : 0.00 [%] maximum : 20.00 [%] slit_uni_tilt_x_limits minimum : 0.00 [%] maximum : 20.00 [%] slit_uni_sym_limits minimum : 0.00 [%] maximum : 20.00 [%] slit_uni_tilt_x_sym_limits minimum : 0.00 [%] maximum : 20.00 [%] symmetrical_error_limits minimum : -20.00 [%] maximum : 20.00 [%] unicom_position_limits minimum : 0.0 [mm] maximum : 100.0 [mm] pupicom_position_limits minimum : -60.0 [deg] maximum : 60.0 [deg] beam_pos_x_limits minimum : -10.000 [mm] maximum : 10.000 [mm] beam_pos_y_limits minimum : -10.000 [mm] maximum : 10.000 [mm] beam_poi_x_limits minimum : -5.000 [mrad] maximum : 5.000 [mrad] beam_poi_y_limits minimum : -5.000 [mrad] maximum : 5.000 [mrad] Main Results Slit Uniformity : 0.93 [%] Tilt X : -0.12 [%] Symmetrical Error : 0.69 [%] UNICOM correctable : 0.42 [%] Selected Chuck : Spot sensor WS chuck 1 Corrected Slit Uniformities Slit Uniformity if corrected for Tilt X : 0.90 [%] Slit Uniformity if corrected for Symmetrical Error : 0.35 [%] Slit Uniformity if corrected for Tilt X and Symmetrical Error : 0.36 [%] Slit Uniformity if corrected for UNICOM : 0.51 [%] Slit Uniformity if corrected for UNICOM and Tilt X : 0.56 [%] Light Source Properties Number of Laser Pulses emitted since installation [*10^6] : 31030 Illumination Properties DOE data file name : annular DOE data file version : 2.0.1 Beam Position and Pointing Beam position X : -2.68 [mm] Beam position Y : 0.08 [mm] Beam pointing X : 0.446 [mrad] Beam pointing Y : 0.012 [mrad] Beam data valid : Yes Beam drift during measurement Beam position X : -0.74 [mm] Beam position Y : -0.08 [mm] Beam pointing X : -0.001 [mrad] Beam pointing Y : -0.013 [mrad] Beam drift during measurement valid : Yes Field Uniformity Results Field Uniformity : 2.46 [%] Tilt Y : -1.02 [%] Field Value Statistics Average Spot Sensor Light Intensity : 1826.93 [mW/cm2] Standard Deviation of the Spot Sensor Light Intensity : 25.17 [mW/cm2] Average Energy Sensor Light Intensity : 1790.55 [mW/cm2] Standard Deviation of the Energy Sensor Light Intensity : 13.58 [mW/cm2] Average Point Ratio : 1.0203 Standard Deviation of the Point Ratio : 0.0115 Corrected Intensities Average Spot Sensor Light Intensity Corrected to 1 external BP : 2003.15 [mW/cm2] Intensity constants ATP Intensity Specification : 2000 [mW/cm2] Number of Bending Points : 3 Greyfilter Coefficients Comment : Calculated a0 : -0.00000e+00 a2 : -7.71078e-02 [1/mm2] a4 : 1.93402e-03 [1/mm4] a6 : -1.81279e-05 [1/mm6] a8 : 5.27786e-08 [1/mm8] Slit Profile +----+--------+---------------+----------------------+---------+----------+ \| \| X \| Average Ratio \| Ratio per run (0..4) \| (5..14) \| (15..24) \| \| \| [mm] \| [%] \| [%] \| [%] \| [%] \| +====+========+===============+======================+=========+==========+ \| 0 \| -12.94 \| 80.350 \| \| \| \| \| 1 \| -10.35 \| 79.461 \| \| \| \| \| 2 \| -7.77 \| 79.189 \| \| \| \| \| 3 \| -5.18 \| 79.439 \| \| \| \| \| 4 \| -2.59 \| 79.269 \| \| \| \| \| 5 \| 0.00 \| 79.166 \| \| \| \| \| 6 \| 2.59 \| 78.864 \| \| \| \| \| 7 \| 5.18 \| 78.915 \| \| \| \| \| 8 \| 7.77 \| 79.151 \| \| \| \| \| 9 \| 10.35 \| 79.952 \| \| \| \| \| 10 \| 12.94 \| 80.066 \| \| \| \| +----+--------+---------------+----------------------+---------+----------+ Verification Results +-------------------------------------------+--------------------+-----------+----------+ \| \| limits \| \| \| \| +---------+----------+ \| \| \| \| minimum \| maximum \| In Limits \| Measured \| +===========================================+=========+==========+===========+==========+ \| Slit uniformity [%] \| 0.00 \| 20.00 \| OK \| 0.93 \| \| Avg SS light intensity [mW/cm^2] \| 0.00 \| 10000.00 \| OK \| 1826.93 \| \| Avg SS light intensity corr 1BP [mW/cm^2] \| 0.00 \| 10000.00 \| OK \| 2003.15 \| \| Average point ratio [%] \| 0.00 \| 10.00 \| OK \| 1.02 \| \| Tilt X [%] \| -20.00 \| 20.00 \| OK \| -0.12 \| \| Tilt Y [%] \| -20.00 \| 20.00 \| OK \| -1.02 \| \| Field uniformity [%] \| 0.00 \| 20.00 \| OK \| 2.46 \| \| Slit uniformity tilt X [%] \| 0.00 \| 20.00 \| OK \| 0.90 \| \| Slit uniformity symmetrical [%] \| 0.00 \| 20.00 \| OK \| 0.35 \| \| Slit uniformity tilt X & symmetrical [%] \| 0.00 \| 20.00 \| OK \| 0.36 \| \| Symmetrical error [%] \| -20.00 \| 20.00 \| OK \| 0.69 \| \| Unicom position [mm] \| 0.0 \| 100.0 \| OK \| 47.2 \| \| Pupicom position [deg] \| -60.0 \| 60.0 \| OK \| 0.0 \| \| Beam position X [mm] \| -10.000 \| 10.000 \| OK \| -2.685 \| \| Beam position Y [mm] \| -10.000 \| 10.000 \| OK \| 0.084 \| \| Beam pointing X [mrad] \| -5.000 \| 5.000 \| OK \| 0.446 \| \| Beam pointing Y [mrad] \| -5.000 \| 5.000 \| OK \| 0.012 \| +-------------------------------------------+---------+----------+-----------+----------+
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