TEL Tokyo Electron Alpha 8S-Z (AP) Vertical Furnace Oxide Process for Sale

1  Process    Oxide
2  Wafer Size    200mm
3  Process Wafer Qty    XXX
4  Process Type    Oxide
5  I/O Port / Smif    I/O port
6  Load Lock    NO
7  Carrier Slot    25 Slot
8  boat type    Two boat
System Control   
1  System Controller    WAVES
2  Operation Screen    Touch Screen
3  Gas Flow Chart (Front & Rear)   
4  Temperature Controller    M560
5  Vacuum Pressure Control    N/A
6  Controller Transformer    1 PHASE 100V
7  Heater Transformer    3 PHASE 440V
8  Oxygen Analyzer    N/A
9  HEC Pyro Ctl    YES
10 RCU BOX    YES
11 Power BOX    YES
Process Gas Configuration   
1   Process Gas 1    N/A
2   Process Gas 2    N2 30SLM
3   Process Gas 3    O2 10SLM
4   Process Gas 4    O2 30SLM
5   Process Gas 5    O2 10SLM
6   Process Gas 6    N/A
7   Process Gas 7    H2 10SLM
8   Process Gas 8    HCL 3SLM
9   Process Gas 9    N2 5SLM
10  Process Gas 10    N2 5SLM
Gas Distribution System   
1   Basic Style    Conventional
2   Tubing Material    SUS-316L
3   Tubing Finish    VCR
4   Manual Valve    N/A
5 Air-Operated Valve    Fujikin
6 MFC    STEC
Exhaust Distribution System   
1 Air-Operated Valve Type    VCR Connect
2 Main Valve    Fujikin
3 Cold Trap    NO
4 Pump Line    NO
Wafer/Cassette Handling   
1 Wafer Alignment    NO
2 Cassette Storage Qty    12
3 Cassette In/Out Port    YES
4 Cassette Handling Robot    YES
5 Wafer Transfer Type    1
6 Fork Material    Not known
7 Fork Qty    1
8 Fork Variable Pitch    NO
9 Fork Wafer Presence Sensor    NO
Elevator Handling   
1 Boat Elevator    YES
2 Auto Shutter    YES
3 Boat Rotation    YES
4 Mechanical Parts    YES
Heating Chamber   
1 Heater Type    VOS-40-107 (FTPS)
2 T/C Type    4
3 Spike T/C    4