SDI fabsurplus.com is pleased to announce the availability of the following listed used Tazmo/Semix TR 6133UD Photoresist Coater and Developer tRACK, SOG type.
Please click on the "Get Quote" button at the end of the TR 6133UD description, if you'd like to get a quotation, photos and specifications of this Photoresist Coater and Developer tRACK, SOG type, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Tazmo/Semix TR 6133UD Photoresist Coater and Developer tRACK, SOG type is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
| SDI ID: | 109015 |
|---|---|
| Manufacturer: | Tazmo/Semix |
| Model: | TR 6133UD |
| Description: | Photoresist Coater and Developer tRACK, SOG type |
| Version: | 100 mm to 150 mm |
| Vintage: | Inquire |
| Quantity: | 2 |
| Sales Condition: | as is where is |
| Lead Time: | immediately |
| Sales Price (each): | Inquire |
| Comments: | for Wafer Size: 4"- 6" Coater systems, 4"-6" (3) Zone hotplate Single / double cassette Fluoroware type with pitch of 3/16" for (25) Wafers SOG Nozzles: 0.85mm, 1/16" tubing Nozzle capping mechanism Nozzle cleaning with solvent Splash back cup cleaning with solvent Adjustable suck back valve Polypropylene tank: 1 gallon PVC, 11" Teflon solvent tubing and suck back valve (3) Vacuum chuck hot plates Heater capacity: 3.8 Kw (total) at 250°C Baking time: 0-999.9 secs with increments of 0.1 sec Normal indicator setting: ±3°C SOG Filter: .22 μm Fluoropore fitter Chemical cabinet: 5 Gallon capacity (2) Nozzles back side rinses (edge bead removal) Solvent filter: MILLIPORE CWFG00403 Fluorex / WGFG04HP6 Wafergard Gas line filter: MILLIPORE GTL WGFG01D Wafergard 0.22 μm filter Wafer transport system: Indexing elevator Vacuum chuck Shuttle mechanism Walking beam Control unit: Microprocessor: INTEL 8065 (main and (2) sub CPUs) Speed: 100-9000 RPM (4") / 8000 RPM (6") ± .15% (50-1990 RPM) and ±.1% (2000-6000 RPM) Alarm for speed ±3% of RPM (speed higher than 300 RPM) Acceleration: Maximum rate 1 sec for 0 to 5000 RPM (programmable in increments of 1 sec) Process: 20-Steps, 8 / 16 recipes Temperature control: ±1°C Uniformity with alarm setting of ±3°C Spinning, dispensing time: 0-99 Sec programmable Baking time: 0-999 Sec programmable Process display: Back-lit LCD. 2 pcs in Store
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Get Quote |
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