Applied Materials Mirra 3400 Stand-Alone Oxide/STI CMP for sale

SDI fabsurplus.com is pleased to announce the availability of the following listed used Applied Materials Mirra 3400 Stand-Alone Oxide/STI CMP.
Please click on the "Get Quote" button at the end of the Mirra 3400 Stand-Alone description, if you'd like to get a quotation, photos and specifications of this Oxide/STI CMP, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Applied Materials Mirra 3400 Stand-Alone Oxide/STI CMP is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

Applied Materials Mirra 3400 Stand-Alone Equipment Details

SDI ID:	106203
Manufacturer:	Applied Materials
Model:	Mirra 3400 Stand-Alone
Description:	Oxide/STI CMP
Version:	200 mm
Vintage:	01.06.1998
Quantity:	1
Sales Condition:	inquire
Lead Time:	Inquire
Sales Price:	Inquire
Comments:	THIS EQUIPMENT IS AVAILABLE IN COMPLETELY REFURBISHED CONDITION, RE-BUILT TO YOUR REQUIRED SPECIFICATION. AMAT MIRRA 3400 STAND-ALONE CONFIGURATION Technology Oxide/STI/WCMP/CUCMP Platform Type MIRRA 3400 Wafer Specification Selected Option Wafer Size 200mm Wafer Shape Notch Type Mirra 3400 CMP System System Information Selected Option Application Oxide/STI/WCMP/CUCMP System Wet-In-Wet-Out Process Type All Process Cleaner Type NIL Wet Robot Type Standard, Refurbished Wet Queue Tank Yes System Skins Clear Skins Load Cup Full Contact HCLU, Overhauled Cassette Type 8 inch Performance Enhancement Options Selected Option Daily PM Reduction Kit (Clean Kit) Yes Pad Conditioner Head 1~3 DDF3 Pad Conditioner Disk Holder Universal Pad Conditioner Sweep Hard Stop Yes Pad Conditioner Retrofit Normal DDF3 Pad Conditioner Gear Assembly Overhaul Yes Factory Interface Options Selected Option Platen 1 ISRM Legacy ISRM Platen 2 ISRM Legacy ISRM Platen 3 ISRM Legacy ISRM In Line Metrology Not Applicable SECS GEM Interface Yes Installation Type Wet in Wet Out Integrated System Basic FABS Not included FABS Robot Blade NA Cassette Tank Optional Factory Automation No Polisher Options Selected Option Polishing Head (Head1~4) TITAN 1 x 4ea Upper Pneumatics Assembly (UPA) TITAN1 UPA UPA Location External Relocated Pad Wafer Loss Sensor Dual Sensor Platen Temperature Control No Platen Temp Control Cable No Upper Platen Coating Teflon Coating Platen Gear Assembly Overhaul Yes, Greaseless type Slurry Delivery Options Selected Option Slurry Delivery 3 Slurries Slurry Flow Rate Standard Flow Slurry Flow Controller (CLC) Tokyo Keiso CLC x 3ea Slurry Pump Head Yes (Not Applicable, if CLC model) Slurry Containment Bulkhead Double Containment Slurry Facilities None Slurry Loop Line No Slurry Loop Line A Slurry (PL1, PL2, PL3) Slurry Loop Line B Optional Slurry Loop Line C Optional Slurry Dispense Arm Standard Length, Platen1~3 High Pressure Rinse Slurry Leak Detector Yes Cleaner Plumbing Not Applicable DI Water Standard Slurry Tube Yes Slurry Filter & Housing Optional Slip Out Sensor Slurry Cover Each Head Yes FACILITIES OPTIONS System Safety Selected Option EMO Guard Ring Yes EMO IO No System Labels English System User Labels English LOTO Box No Smoke Detector Yes Polisher Slurry Leak Sensor Yes Electrical Requirements Selected Option Line Frequency 50 HZ Line Voltage 200/208 VAC Uninterruptible Power Supply None Power Lamp Green Lamp Power Connected Lamp No Circuit Breaker 200A Controller Top Panel Holes punched out for AC Power Cables Entry Configurable IO No GFI Type Standard 30mA Isolation Transformer No Umbilical's Selected Option CAT Track Style Water Fall Polisher to Controller Cable Standard 30ft Controller to Monitor Cable Standard Slurry System Interface Cable None Factory Hookup Selected Option Upper Exhaust Standard Upper Exhaust Material Stainless Steel Lower Exhaust None Process Exhaust Vent Interlock Sensor Yes Upper Exhaust Connection No Flange Drain Manifold 4 Lines to Facilities Drain Adapter NPT Fittings Internal Vacuum Venturi Yes OPERATOR INTERFACE OPTIONS Operating Hardware & Software Selected Option Hard Disk Dual Hard Disk Memory 128M or above CPU PIII CPU or above Fabs Software Fabs Daemon 1.35 Operating System Windows NT 4.00.1381 or above Software Version MB60a1 or above Endpoint IB11h8 Cleaner Software 2.3.8 User Interface Selected Option Monitor Selection 1 FPD Monitor 1 Location Front FPD On Cart Mouse or Trackball Mouse (include keyboard） Start Stop Button Controller Light Towers Selection Polisher and Controller Polisher Light Tower Selected Option Polisher Tower Mounting Type Pole Mounted Polisher Tower No of Colors 3 Color Polisher Tower Lamp Type Incandescent Polisher Tower Colors Sequence RYG Controller Light Tower Selected Option Controller Tower Mounting Type Pole Mounted Controller Tower No of Colors 3 Color Controller Tower Lamp Type Incandescent Controller Colors Sequence RYG
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Applied Materials Mirra 3400 Stand-Alone

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Applied Materials Mirra 3400 Stand-Alone Oxide/STI CMP for Sale

Applied Materials Mirra 3400 Stand-Alone Equipment Details

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