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TEGAL 903E Plasma dry etch for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used TEGAL 903E Plasma dry etch.
Please click on the "Get Quote" button at the end of the 903E description, if you'd like to get a quotation, photos and specifications of this Plasma dry etch, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This TEGAL 903E Plasma dry etch is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


TEGAL 903E Equipment Details

SDI ID: 106152
Manufacturer: TEGAL
Model: 903E
Description: Plasma dry etch
Version: 100 mm
Vintage: 01.06.1985
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

De-installed, warehoused. Can be inspected by appointment.

-Set up for load and unload of 4 inch wafers, cassette to cassette.
-Sold Strictly "as is, where is", with condition as shown in the photos.
-Parts included:-
-RF Delivery Item CR1044-00406RW s/n 10511
-Matching Network Item CR1113-00301 s/n 14321
-Item CS1017-400xx s/n 10135 S22233232222W
Gas Box Setup:-
Gas N2 Range 2 SLM UPC1300
Gas: CF4 Range 100 sccm UFC1200A
Gas: N2 Range 20 SCCM UFC1000
Gas: C2F6 Range 50 sccm UFC1000
Gas: N2 Range 500 sccm Brooks 5850E


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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