TEL Tokyo Electron CS800M Flat Panel Display Photoresist Coater and Developer system for Sale

Production on this machine ended in December, 2019. This system is currently shut down in the fab. The equipment was in excellent, operational condition, before it was shut down .Inspection (Without power on) is available by appointment.

The CS Series of FPD coater/developers realizes high process performance and cost efficiency. The CS Series supports AGV/CIM, making it easy to introduce factory automation. It can be integrated with the CS series, as well as exposure systems and other peripheral equipment, such as a titler and edge exposure into an inline system. To reduce costs, a method of decreasing resist and developing fluids consumption has been implemented. The CS series can be connected to the recycle (mixing) system.

· Reduced footprint by common transfer machine
· High process performance and high throughput
· Flexible system layout
· High system reliability
· Substrate size: 620mm x 750mm
· Size of the equipment parts:(l x w x h, mm)
26610 X 4360 X 2200 mm (Main Body)
900 x 900 x 1845 mm, 420 KG
900 x 900 x 1845 mm, 320 KG
1430 x 952 x 1828 mm, 350 KG
1000 X 1000 X 2000 mm, 500 KG
1540 x 850 x 1403 mm, 100 KG
1300 x 780 x 1725 mm, 150 KG
440 x 700 x 925 mm, 220 KG
1140 x 935 x 450 mm, 200 KG
940 x 940 x 2100 mm, 150 KG

Basic Config:
1. C/S QTY 1
2. SCR
3. COAT QTY 1
4. ER QTY 1
5. DEV QTY 3
6. EX QTY 2
7. I/F QTY 1