Applied Materials Centura 5200 HTF Epitaxial 3 Chamber Atmospheric Epitaxial Deposition system for Sale

The equipment is still installed in the cleanroom. The equipment is set up for use with 8 inch wafers, but it could also be used for 6 inch after changing the process kits and robot adjustment.

Equipment condition: very good.

Configuration Notes:

Application type:-
Toxic

System SSR is available Y/N NO
System BOM is available Y/N NO
Current system configuration matches the SSR, BOM or the original configuration Y/N NO
List all upgrades, modifications or retrofits that are not listed in the original system SSR or BOM (Skip if you answered YES to the previous question)

CONTROLLER
**********
Select all that apply to the System:
208VAC
The system has been upgraded by the OEM to a VITA Controller, and the software version running is B6.50V (Windows)
Flash Memory Drive
VSB Blowers
Accusette Controller
External Stepdown Transfromer
Controller Grade (1-4):3
MCAC Grade(1-4):1
ACAC Grade(1-4):1
Comments (IE Damage or Missing):
1 has three motor stepper boards
2 rack has some damage to the lower frame

MAIN FRAME
**********
Select all that apply to the Main Frame:
Wide Body LL
HP Robot
ENP
Transfer Chamber Complete
Upper Frame Ass'y Complete
Skins Present
Comments (IE Damage or Missing)
1 NONE
2
Main Frame Grade (1-4):2

GEN RACK
********
Select all that apply to the Gen Rack
Power Supply Present
Second Gen Rack
Leak Detect Present
Smoke Detect Present
Gen Rack Grade (1-4): 1
Comments (IE Damage or Missing): NONE

HEAT EXCHANGER
**************
Select all that apply to the Heat Exchanger
Neslab
AMAT 0
AMAT 1
SMC
Steelhead 0
Steelhead 1
Other
Heat Exchanger Grade (1-4): 1
Comments (IE Damage or Missing):NONE

CHAMBER A
*********
Comments (IE damage or missing):
1 Software controlled (Dongle) AccuSett with Flowpoint valves
2 VSB Blower

What type of Chamber is installed on A
EPI ATM

Chamber A Grade(1-4): 3

CHAMBER B
*********
Comments (IE damage or missing):
1 Software controlled (Dongle) AccuSett with Flowpoint valves
2 VSB Blower

What type of Chamber is installed on B
EPI ATM

Chamber B Grade(1-4): 3

CHAMBER C
*********
Comments (IE damage or missing):
1 Software controlled (Dongle) AccuSett with Flowpoint valves
2 VSB Blower

What type of Chamber is installed on C
EPI ATM

Chamber C Grade(1-4): 3

CHAMBER D
*********
Comments (IE damage or missing): NO CHAMBER D

CHAMBER E
*********
Comments (IE damage or missing): NO CHAMBER E

CHAMBER F
*********
Comments (IE damage or missing):
1 self made plastic lid

What type of Chamber is installed on F
Cool Down

Chamber F Grade(1-4): 2

GAS PANEL
*********
Configurable:N
Legacy:Y
Glass Doors present Y/N: (Applies to older EPI only)N.A.

This system has been used for doping of Phosphorus and Arsenic.

Main (Mixer Pallet) EPI / Poly Only
***********************************
Stick #    Gas    MFC Size
1    H2    20 slm
2    AsH3    300 sccm
3    H2    20 slm
4    Ph3    100 sccm

Chamber A
*********
Stick #    Gas    MFC Size
1    H2    100 slm
2    H2    30 slm
3    Mx-Dop    300 sccm
4    TCS    10 slm
5    HCL    30 slm
6    Aux-Dop    20 sccm

Chamber B
*********
Stick #    Gas    MFC Size
10    H2    100 slm
11    H2    30 slm
12    Mx-Dop    300 sccm
13    TCS    10 slm
14    HCL    30 slm
15    Aux-Dop    20 sccm


Chamber C
*********
Stick #    Gas    MFC Size
19    H2    100 slm
20    H2    30 slm
21    Mx-Dop    300 sccm
22    TCS    10 slm
23    HCL    30 slm
24    Aux-Dop    20 sccm


Chamber D
*********
Stick #    Gas    MFC Size
NO CHAMBER D       

CONTROLLER
**********
Enter an "X" to show what is present on the system                   
Slot #    Top Rack Bd.            Present   
                   
1    Serial Isolator                x
2    Leak Detect/Sys Reset                x
3    Leak Detect/Sys Reset                x
4    EMPTY               
5    TC Gauge               
6    Conv Card CH ABCD                
7    Conv Card A/B for LL               
8    Conv Card CH C/D                 
9    OTF/CENTERFIND            remote    x
10    EMPTY               
11    EMPTY               
12    Floppy Drive            Flash    no
13    Hard Drive                no
14    Ch. A Interlock                x
                    HTF
15    Ch. B Interlock                x
                    HTF
16    Ch. C Interlock                x
                    HTF
17    Ch. D Interlock               
                   
18    Ch. E Interlock               
19    M/F Interlock                x
20    LL Interlock                x
21    DI/O1 Ch. A                x
22    DI/O2 Ch. A                x
23    DI/O1 Ch. B                x
24    DI/O2 Ch. B                x
25    DI/O1 Ch. C                x
26    DI/O2 Ch. C                x   
27    DI/O1 Ch.D                 x   
28    DI/O2 Ch.D                 x   
29    DI/O0 Ch.E                    
30    SBC                x    V452
31    EMPTY                   
32    Video                x   
33    Center Finder                   
34    SEI                x   
35    CHBR A AIO                x   
36    CHBR B AIO                x   
37    CHBR C AIO                x   
38    CHBR D AIO                   
39    Mainframe AIO1                x   
40    CH E / MF AIO2                x   
41    Mainframe DIO1                x   
42    Mainframe DIO2                x   
43    Mainframe DIO3                x   
44    Mainframe DIO4                x   
45    Mainframe DIO5                x   
46    Mainframe DIO6                x   
47    Mainframe                 x   
    Stepper 1                   
48    Mainframe                   
    Stepper 2                   
49    Mainframe                    
    Stepper 3                   
50    Robot &                 x    Vmex
    Indexer Stepper                   

Slot #    VME 2 Bd.            Present       
1    CHBR A AIO           
2    CHBR B AIO           
3    CHBR C AIO           
4    CHBR D AIO           
5    DI/O1 Ch. A           
6    DI/O2 Ch. A    B       
7    DI/O1 Ch. B    C       
8    DI/O2 Ch. B    D   

INSPECTION NOTES
****************
1. Look for any damage to any chambers and document if possible    X-fer outside: Ni coating damaged by the clamps to hold the lid down, see pictures.
2. Look for rust    no heavy rust outside, fresh painted doors and feet; inside some rusty parts below chambers and floor.
3. Look for any modification    self made:door interlock override with capacitive switches; H2O chamber water flow switches with digital flow-rate  displays, with Siemens PLC control system; UPS integration; dual-seal switch with digital display; Ch C bulged door self made from Aluminum; Cooldown chamber with clear lid and camera system; E23 (front load) interface and cass-present sensor for outside (optical)
4. If possible, look inside Load Locks and Xfer chambers for damage     n.a.
5. Any writing on the pcbs in the controller    no
6. Any major scrapes or dents on the AC or Controller boxes    AC rack has signs of damage on the lower frame, maybe transport or while standing in place
7. EPI look to see if the baserings are old style with welded Temp Port.    old style all 3 chambers