Applied Materials Centura 5200 HTF Epitaxial 3 Chamber Atmospheric Epitaxial Deposition system for Sale

The equipment is still installed in the cleanroom. . Equipment condition: Good.Software Ver: B6.30 CB1 Amps: 300A SBC Type: V452 Flow Point Model: Nano Valve Gas Panel Type: Configurable Wafer Size: 200mm (with conversion kit 150mm is possible) M-Monitor: CRT 3 Chambers HTF ATM EPI With digital Flow-Control of the cooling systems with interlock and passphrase (Siemens PLC) HDD was upgraded to RAID System Temperature Control Dual Pyrometer. The system was used for Phosphor doping only. The tool is set up for 8 inch wafers, but it would be also possible to run 6 inch wafers, after changing the process kit and robot set-up.

Configuration Notes:-

Application type:-
Toxic

System SSR is available Y/N NO
System BOM is available Y/N NO
Current system configuration matches the SSR, BOM or the original configuration Y/N NO
List all upgrades, modifications or retrofits that are not listed in the original system SSR or BOM (Skip if you answered YES to the previous question)

CONTROLLER
**********
Select all that apply to the System:
208VAC
Legacy With 68040 Processor
Flash Memory Drive
VSB Blowers
Accusette Controller
External Stepdown Transfromer
Controller Grade (1-4):2
MCAC Grade(1-4):1
ACAC Grade(1-4):1

MAIN FRAME
**********
Select all that apply to the Main Frame:
Wide Body LL
HP Robot
ENP
Transfer Chamber Complete
Upper Frame Ass'y Complete
Lid Lift Present
Skins Present
Comments (IE Damage or Missing)
1 NONE
2
Main Frame Grade (1-4):2

GEN RACK
********
Select all that apply to the Gen Rack
Power Supply Present
Second Gen Rack
Leak Detect Present
Smoke Detect Present
Gen Rack Grade (1-4): 1
Comments (IE Damage or Missing): NONE

HEAT EXCHANGER
**************
Select all that apply to the Heat Exchanger
Neslab
AMAT 0
AMAT 1
SMC
Steelhead 0
Steelhead 1
Heat Exchanger Grade (1-4): 1
Comments (IE Damage or Missing):NONE

CHAMBER A
*********
Comments (IE damage or missing):
1 Software controlled (Dongle) AccuSett with Flowpoint valves
2 VSB Blower

What type of Chamber is installed on A
EPI ATM

Chamber A Grade(1-4): 3

CHAMBER B
*********
Comments (IE damage or missing):
1 Software controlled (Dongle) AccuSett with Flowpoint valves
2 VSB Blower

What type of Chamber is installed on B
EPI ATM

Chamber B Grade(1-4): 3

CHAMBER C
*********
Comments (IE damage or missing):
1 Software controlled (Dongle) AccuSett with Flowpoint valves
2 VSB Blower

What type of Chamber is installed on C
EPI ATM

Chamber C Grade(1-4): 3

CHAMBER D
*********
Comments (IE damage or missing): NO CHAMBER D

CHAMBER E
*********
Comments (IE damage or missing): NO CHAMBER E

CHAMBER F
*********
Comments (IE damage or missing):
1 self made plastic lid

What type of Chamber is installed on F
Cool Down

Chamber F Grade(1-4): 2

GAS PANEL
*********
Configurable:N
Legacy:Y
Glass Doors present Y/N: (Applies to older EPI only)N.A.

Main (Mixer Pallet) EPI / Poly Only
***********************************
Stick #    Gas    MFC Size
1    H2    20 slm
2    Ph3    100 sccm
3    H2    20 slm
4    Ph3    100 sccm

Chamber A
*********
Stick #    Gas    MFC Size
1    H2    100 slm
2    H2    30 slm
3    Mx-Dop    300 sccm
4    Aux-Dop    20 sccm
5    HCL    30 slm
6    TCS    10 slm

Chamber B
*********
Stick #    Gas    MFC Size
10    H2    100 slm
11    H2    30 slm
12    Mx-Dop    300 sccm
13    Aux-Dop    20 sccm
14    HCL    30 slm
15    TCS    10 slm
16    Ph3    3 slm

Chamber C
*********
Stick #    Gas    MFC Size
19    H2    100 slm
20    H2    30 slm
21    Mx-Dop    300 sccm
22    Aux-Dop    20 sccm
23    HCL    30 slm
24    TCS    10 slm

Chamber D
*********
Stick #    Gas    MFC Size
NO CHAMBER D       

CONTROLLER
**********
Enter an "X" to show what is present on the system                   
Slot #    Top Rack Bd.            Present   
                   
1    Serial Isolator                x
2    Leak Detect/Sys Reset                x
3    Leak Detect/Sys Reset                x
4    EMPTY               
5    TC Gauge               
6    Conv Card CH ABCD                
7    Conv Card A/B for LL               
8    Conv Card CH C/D                 
9    OTF/CENTERFIND            remote    x
10    EMPTY               
11    EMPTY               
12    Floppy Drive            Flash    no
13    Hard Drive                no
14    Ch. A Interlock                x
                    HTF
15    Ch. B Interlock                x
                    HTF
16    Ch. C Interlock                x
                    HTF
17    Ch. D Interlock               
                   
18    Ch. E Interlock               
19    M/F Interlock                x
20    LL Interlock                x
21    DI/O1 Ch. A                x
22    DI/O2 Ch. A                x
23    DI/O1 Ch. B                x
24    DI/O2 Ch. B                x
25    DI/O1 Ch. C                x
26    DI/O2 Ch. C                x   
27    DI/O1 Ch.D                 x   
28    DI/O2 Ch.D                 x   
29    DI/O0 Ch.E                    
30    SBC                x    V452
31    EMPTY                   
32    Video                x   
33    Center Finder                   
34    SEI                x   
35    CHBR A AIO                x   
36    CHBR B AIO                x   
37    CHBR C AIO                x   
38    CHBR D AIO                   
39    Mainframe AIO1                x   
40    CH E / MF AIO2                x   
41    Mainframe DIO1                x   
42    Mainframe DIO2                x   
43    Mainframe DIO3                x   
44    Mainframe DIO4                x   
45    Mainframe DIO5                x   
46    Mainframe DIO6                x   
47    Mainframe                 x   
    Stepper 1                   
48    Mainframe                   
    Stepper 2                   
49    Mainframe                    
    Stepper 3                   
50    Robot &                 x    Vmex
    Indexer Stepper                   

Slot #    VME 2 Bd.            Present       
1    CHBR A AIO           
2    CHBR B AIO           
3    CHBR C AIO           
4    CHBR D AIO           
5    DI/O1 Ch. A           
6    DI/O2 Ch. A    B       
7    DI/O1 Ch. B    C       
8    DI/O2 Ch. B    D   

INSPECTION NOTES
****************
1. Look for any damage to any chambers and document if possible:
2. Look for rust:    no heavy rust outside, fresh painted doors (rough paint and dents on the door sheet metal)and feet; inside some rusty parts below chambers as usual for the age of the system, corrosion inside side raceways
3. Look for any modification:    self made:door interlock override with capacitive switches; H2O water flow switches with digital display; UPS integration; dual-seal switch with digital display; Ch C bulged door self made from Aluminum; E23 fab connection for front robot and optical cass present sensor; cambera on ChF to check for wafer edge damage
4. If possible, look inside Load Locks and Xfer chambers for damage    :
5. Any writing on the pcbs in the controller:    no
6. Any major scrapes or dents on the AC or Controller boxes:    good condition
7. EPI look to see if the baserings are old style with welded Temp Port.:    old style all three base rings