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Applied Materials Centura DPS2 AE Minos Poly Dry Etch with 2CH DPS2 and 2 CH Axiom for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Applied Materials Centura DPS2 AE Minos Poly Dry Etch with 2CH DPS2 and 2 CH Axiom.
Please click on the "Get Quote" button at the end of the Centura DPS2 AE Minos Poly description, if you'd like to get a quotation, photos and specifications of this Dry Etch with 2CH DPS2 and 2 CH Axiom, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Applied Materials Centura DPS2 AE Minos Poly Dry Etch with 2CH DPS2 and 2 CH Axiom is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Applied Materials Centura DPS2 AE Minos Poly Equipment Details

SDI ID: 109549
Manufacturer: Applied Materials
Model: Centura DPS2 AE Minos Poly
Description: Dry Etch with 2CH DPS2 and 2 CH Axiom
Version: 300 mm
Vintage: 01.06.2006
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

-De-installed, warehoused and plastic wrapped.
-Can be inspected by appointment
-Includes qty 3 DPS2 process chambers and one Axiom Strip cleaning chamber.
-Other parts included:-
-Centura AP SWLL Ch qty 2 (Heated)
-AMAT Remote UPS Interface Box P/N 0190-23195 rev 003
-Voltage: 208V
-Wires: 3
-Phases: 2 Phase Delta
-Full Load Current: 40A , 50/60 Hz Year of Construction:: Jun 2006

-Gas box capacity: 12 sticks per chamber
-MFC Maker: Mykrolis / Celerity Intelliflow II
-MFC Sizes (Per Chamber):-

1-CL2  300 SCCM
2-NF3   50 SCCM
3-SF6   50 SCCM
4-HBr  500 SCCM
5-O2   200 SCCM
6-O2    20 SCCM
7-He   500 SCCM
8-N2   200 SCCM
9-CHF3 200 SCCM
10-N2   20 SCCM
11-CF4 300 SCCM
12-Ar  500 SCCM

Gas Panel Manual Valves: Parker / MKS


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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