Applied Materials Centura 5200 AP DPS2 Advantedge Carina Mesa

SDI fabsurplus.com is pleased to announce the availability of the following listed used Applied Materials Centura 5200 AP DPS2 Advantedge Carina Mesa Dry Etch Cluster Tool - 2 CHAMBER - METAL ETCH PROCESS.
Please click on the "Get Quote" button at the end of the Centura 5200 AP DPS2 Advantedge Carina Mesa description, if you'd like to get a quotation, photos and specifications of this Dry Etch Cluster Tool - 2 CHAMBER - METAL ETCH PROCESS, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Applied Materials Centura 5200 AP DPS2 Advantedge Carina Mesa Dry Etch Cluster Tool - 2 CHAMBER - METAL ETCH PROCESS is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

Applied Materials Centura 5200 AP DPS2 Advantedge Carina Mesa Equipment Details

SDI ID:

109544

Manufacturer:

Applied Materials

Model:

Centura 5200 AP DPS2 Advantedge Carina Mesa

Description:

Dry Etch Cluster Tool - 2 CHAMBER - METAL ETCH PROCESS

Version:

300 mm

Vintage:

01.05.2013

Quantity:

Sales Condition:

as is where is

Lead Time:

immediately

Sales Price:

Inquire

Comments:

EFEM/ TM Module/ DPS2 Chamber B / Mesa Chamber D / AC Rack/ Accessories

The equipment has been professionally de-installed, and inspection of the equipment is welcomed by appointment in the warehouse.
For details about the tool's condition, please refer to the attached photos.

Etch chamber gas box config:
Cl2 50
Cl2 20
HBr 50
SiCl4 50
H2 200
NF3 20
BCl3 40
O2 200
CHF3 300
CH2F2 100
N2 200
SF6 100
CF4 30
Ar 500

CHAMBER B
Model	CH AC DIST BOX DUAL HTR, ADVANTEDGE TSUBASA
AMAT P/N	-
MFG P/N	-
Serial Number	06278536
Voltage	208V
Nr. of Wires	Three + GND
Phase	-
Full load current	80A
Max. System Rating	-
Freq	50/60 Hz
Ampere Rating of the largest load	32 AMPS
Panel main protection device	100 A
Year of construction	-
Diagram #	0170-02572 REV. 04

AXIOM CHAMBER D
Model	CHAMBER AC DISTRIBUTION BOX AXIOM 300mm
AMAT P/N	0190-30702 REV. 03
MFG P/N	IATAMT019030702
Serial Number	11246109
Voltage	208V
Nr. of Wires	Three + GND
Phase	3Ø “∆”
Full load current	80 AMPS
Max. System Rating	36 KVA
Freq	50/60 Hz
Ampere Rating of the largest load	30 AMPS
Interrupting current	10K AMPS I.C
Year of construction	JUN 2011
Diagram #	0170-01579 REV. 4

Remote AC Rack
System Number	424973-XA-ACGR
Model	REMOTE AC RACK UVR, BASIC, CONDUCTOR/CLOSED COUPLE
AMAT P/N	0190-09581 REV. 002
C-H P/N	84-33087-4 REV 5
Serial Number	566604293-1
Voltage	208V
Nr. of Wires	FOUR
Phase	3Ø “∆”
Full load current	320A
Max. AMP rating of main OC device	400 A
Freq	50/60 Hz
Ampere Rating of the largest load	80A
Short-circuit interrupting Capacity of main overcurrent protective device	65K AMPS I.C
Year of construction	MAR 2012
Diagram #	0170-04191 REV 3

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Applied Materials Centura 5200 AP DPS2 Advantedge Carina Mesa

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Applied Materials Centura 5200 AP DPS2 Advantedge Carina Mesa Dry Etch Cluster Tool - 2 CHAMBER - METAL ETCH PROCESS for Sale